US3798875A - Recovery of hydrogen fluoride - Google Patents

Recovery of hydrogen fluoride Download PDF

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US3798875A
US3798875A US00228109A US22810972A US3798875A US 3798875 A US3798875 A US 3798875A US 00228109 A US00228109 A US 00228109A US 22810972 A US22810972 A US 22810972A US 3798875 A US3798875 A US 3798875A
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process according
hydrogen fluoride
fluoride
mixture
alkali
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G Morris
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Imperial Chemical Industries Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/1493Selection of liquid materials for use as absorbents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds

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  • the alkali-metal fluoride is preferably sodium fluoride, but other alkali-metal fluorides or mixtures thereof may be used if desired.
  • the alkali-metal fluoride is usually used in the form of a suspension in the inert liquid and may be suspended in the liquid by any convenient means, for example by mechanical stirring, but adequate suspension may be achieved in some cases by the flow of the gaseous mixture through the suspension.
  • the particle size of the alkali-metal fluoride is not critical, and may be chosen to achieve the desired degree of suspension in the system concerned.
  • the liquid may be any which is substantially inert under the conditions of use. Thus is should not be decomposed by contact with the hydrogen fluoride or the alkali metal fluoride or react to any substantial extent with either of them, and it should not be decomposed appreciably at the temperature of use. Preferably it is one which has a boiling point of at least 250C and, conveniently, it is one which is substantially immiscible with water. It is also desirable that the liquid is one which can dissolve hydrogen fluoride, even if only to a limited extent, and it is one which does not appreciably dissolve the alkali-metal fluoride.
  • suitable liquids include high-boiling aromatic compounds, for example diphenyl, diphenyl ether and mixtures of these, especially the eutectic mixture, and halogenated aromatic compounds, for example chlorinated diphenyl; esters, for example the phthalate esters, and in particular di-n-butyl phthalate; polyglycols for example those having a molecular weight of at least 1,000, for example polypropylene glycol, mineral oils; long-chain carboxylic acids, for example oleic acid; and mixtures of such liquids.
  • the concentration of the alkali-metal fluoride in the liquid is not critical and may vary over a wide range for example between 1 and 50 percent by weight, preferably between 15 and 25 percent by weight, of alkalimetal fluoride in the mixture.
  • the absorption is generally carried out at a temperature in the range of -180C, and preferably in the range l10130C.
  • the further heating to liberate hydrogen fluoride is preferably carried out at a temperature about C, for example in the range 240280C.
  • the process of our present invention may be applied to the recovery of hydrogen fluoride from a wide range of gaseous mixtures.
  • it may be used to recover hydrogen fluoride from mixtures in which the hydrogen fluoride content may vary as widely as, for example, from 2 to 98 percent by weight, and the undesired component of the gas mixture may include for example one or more of nitrogen, oxygen, water-vapour, organic vapours, oxides of carbon and other acidic gases, for example sulphur dioxide, hydrogen sulphide, silicon tetrafluoride and hydrogen chloride.
  • the undesired components of the gaseous mixture pass on unabsorbed, and accordingly the temperature used for the absorption stage should be selected to minimise or avoid condensation of such components, for example steam.
  • the process is especially useful for the recovery of hydrogen fluoride from mixtures containing water.
  • the process of the present invention may be applied to the recovery of hydrogen fluoride from the crude reaction vapours obtained for example in the pyrohydrolysis of fluorspar (calcium fluoride). Since the process of the invention is highly efficient in separating hydrogen fluoride from a large variety of gases, the invention is particularly applicable in separating hydrogen fluoride from the vapours obtained by pyrohydrolysis of crude fluorspar and/or low grade fluorspar.
  • hydrogen fluoride may be obtained by pyrohydrolysis or other treatment of fluorspar varying in quality from crude ore as mined, which may contain as little as 20 percent by weight of calcium fluoride, through concentrated low grade ores to high grade concentrate containing at least 97 percent by weight of calcium fluoride.
  • Typical impurities in the fluorspar include silica, alumina, barytes and heavy metal carbonates and sulphides.
  • one of the major contaminant gases from which the hydrogen fluoride is to be separated may be sulphur dioxide which is obtained, for instance by decomposition of the barytes or oxidation of the sul phides.
  • the process of the invention may also be applied to recovering hydrogen fluoride obtained by pyrohydrolysis of fluorosilicic acid or its salts, e. g., calcium fluorosilicate, which salts may optionally be mixed with a silicate, e.g., calcium silicate.
  • the process of the invention may also be applied to the recovery of hydrogen fluoride obtained as a by-product in other chemical reactions, or where it is recovered in reactions when it is used as a starting material, for instance in the fluorination of chlorinated hydrocarbons. It may also be recovered from aqueous solution, for example the aqueous condensates obtained from any of the above processes. If desired it may be applied to recover anhydrous hydrogen fluoride from the aqueous constant boiling acid, which contains about 38 percent of hydrogen fluoride.
  • the gaseous product containing hydrogen fluoride which is obtained as a result of the second heating stage of the process of the invention may be treated in conventional manner to recover the hydrogen fluoride therefrom.
  • it may be cooled to a temperature below 195C to condense the hydrogen fluoride or the gaseous stream of hydrogen fluoride may be used directly for any desired chemical reaction without intermediate isolation.
  • the process may be operated in batchwise or continuous manner, but is especially useful for continuous operation.
  • a gaseous stream containing hydrogen fluoride enters along channel (3) into a reactor (1) which contains a slurry of alkalimetal fluoride in an inert liquid maintained at the absorption temperature, for example about 120C, and unabsorbed gases leave the reactor along channel (4).
  • the slurry of alkali-metal fluoride containing absorbed hydrogen fluoride is passed along channel (5) to the reactor (2) where it is heated to the evolution temperature, for example about 260C; dry hydrogen fluoride is thus liberated and leaves along channel (6).
  • the residual slurry is then returned to reactor (1) along channel (7) for re-cycle through the process.
  • the invention is further illustrated in the following Example.
  • the slurry was then heated to 260C over a period of 2 hours and the weight of hydrogen fluoride liberated was measured.
  • a process for the recovery of hydrogen fluoride from a gaseous mixture containing it which comprises (i) passing the said gaseous mixture through a suspension of an alkalimetal fluoride in an inert liquid having a boiling point of at least 250C, the said suspension being maintained at a temperature below 180C, and at a temperature at which the hydrogen fluoride is absorbed by the said suspension, (ii) heating the said suspension to a temperature above 180C, whereby hydrogen fluoride is liberated from the said suspension and the said suspension is regenerated.
  • a process according to claim 1 wherein the process is carried out continuously and the gaseous mixture is passed to the suspension in a first stage where the gaseous mixture is absorbed by the suspension, the suspension of the first stage is heated in a second stage to liberate the hydrogen fluoride and regenerate the suspension and the regenerated suspension is recycled to the first stage.
  • a process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is one which does not appreciably dissolve the alkali-metal fluoride.
  • liquid with which the alkali metal fluoride is mixed is one which is substantially immiscible with water.
  • a process according to claim 1 in which the liq uid with which the alkali-metal fluoride is mixed is di-nbutyl phthalate, polypropylene glycol, mineral oil, oleic acid or a mixture of two or more of these.

Abstract

Hydrogen fluoride is recovered from a gaseous mixture containing it by passing the gaseous mixture through a mixture of an alkalimetal fluoride in an inert liquid maintained at a temperature at which the hydrogen fluoride is absorbed and thereafter heating the mixture to a temperature sufficient to liberate hydrogen fluoride.

Description

United States Patent [191 Morris RECOVERY OF HYDROGEN FLUORIDE [75] inventor: George Oswald Morris, Runcorn,
England [73] Assignee: Imperial Chemical Industries,
Limited, London, England [22] Filed: Feb. 22, 1972 [21] Appl. No.: 228,109
[52] US. Cl 55/22, 55/71, 423/240, 423/483, 423/485 [51] Int. Cl B0ld 47/00 [58] Field of Search 55/22, 56, 71, 74; 423/240, 483-485 [56] References Cited UNITED STATES PATENTS 2,426,558 8/1947 Long et a1 55/71 X Mar. 26, 1974 2,858,901 11/1958 Fort, Jr. 55/22 Primary Examiner-Samih N. Zaharna Assistant Examiner-Richard W. Burks Attorney, Agent, or Firm--Cushman, Darby & Cushman [57] ABSTRACT 16 Claims, 1 Drawing Figure RECOVERY OF HYDROGEN FLUORIDE This invention relates to a process for the recovery of hydrogen fluoride, and especially for the production of substantially dry hydrogen fluoride from aqueous mixtures.
In a number of processes in which hydrogen fluoride is produced or used, hydrogen fluoride is obtained in the form of a dilute gaseous mixture or is contaminated with water Separation of hydrogen fluoride from water is made especially difficult by the fact that these two components form an azeotrope, and so cannot be separated readily by simple distillation. It is therefore desirable to have an effective method for recovering hydrogen fluoride and especially for recovering it in a substantially anhydrous condition from aqueous mixtures.
It is known that hydrogen fluoride can be absorbed by solid sodium fluoride and can subsequently be recovered from it by heating, but this method presents great difficulties in practice; for example heat transfer problems make it necessary for the apparatus to be bulky and the breakdown of the solid absorbent (caused by expansion and contraction during the process) results in pressure build-up in the apparatus.
We have now found that these disadvantages may be obviated by using the absorbing solid in an inert liquid.
Thus according to the present invention we provide a process for the recovery of hydrogen fluoride from a gaseous mixture containing it which comprises passing the said gaseous mixture through a mixture of an alkalimetal fluoride in an inert liquid maintained at a temperature at which the hydrogen fluoride is absorbed and thereafter heating the mixture to a temperature sufficient to liberate hydrogen fluoride.
The alkali-metal fluoride is preferably sodium fluoride, but other alkali-metal fluorides or mixtures thereof may be used if desired.
The alkali-metal fluoride is usually used in the form of a suspension in the inert liquid and may be suspended in the liquid by any convenient means, for example by mechanical stirring, but adequate suspension may be achieved in some cases by the flow of the gaseous mixture through the suspension. The particle size of the alkali-metal fluoride is not critical, and may be chosen to achieve the desired degree of suspension in the system concerned.
The liquid may be any which is substantially inert under the conditions of use. Thus is should not be decomposed by contact with the hydrogen fluoride or the alkali metal fluoride or react to any substantial extent with either of them, and it should not be decomposed appreciably at the temperature of use. Preferably it is one which has a boiling point of at least 250C and, conveniently, it is one which is substantially immiscible with water. It is also desirable that the liquid is one which can dissolve hydrogen fluoride, even if only to a limited extent, and it is one which does not appreciably dissolve the alkali-metal fluoride.
Examples of suitable liquids include high-boiling aromatic compounds, for example diphenyl, diphenyl ether and mixtures of these, especially the eutectic mixture, and halogenated aromatic compounds, for example chlorinated diphenyl; esters, for example the phthalate esters, and in particular di-n-butyl phthalate; polyglycols for example those having a molecular weight of at least 1,000, for example polypropylene glycol, mineral oils; long-chain carboxylic acids, for example oleic acid; and mixtures of such liquids.
The concentration of the alkali-metal fluoride in the liquid is not critical and may vary over a wide range for example between 1 and 50 percent by weight, preferably between 15 and 25 percent by weight, of alkalimetal fluoride in the mixture.
The absorption is generally carried out at a temperature in the range of -180C, and preferably in the range l10130C. The further heating to liberate hydrogen fluoride, is preferably carried out at a temperature about C, for example in the range 240280C.
The process of our present invention may be applied to the recovery of hydrogen fluoride from a wide range of gaseous mixtures. Thus it may be used to recover hydrogen fluoride from mixtures in which the hydrogen fluoride content may vary as widely as, for example, from 2 to 98 percent by weight, and the undesired component of the gas mixture may include for example one or more of nitrogen, oxygen, water-vapour, organic vapours, oxides of carbon and other acidic gases, for example sulphur dioxide, hydrogen sulphide, silicon tetrafluoride and hydrogen chloride. The undesired components of the gaseous mixture pass on unabsorbed, and accordingly the temperature used for the absorption stage should be selected to minimise or avoid condensation of such components, for example steam. The process is especially useful for the recovery of hydrogen fluoride from mixtures containing water.
The process of the present invention may be applied to the recovery of hydrogen fluoride from the crude reaction vapours obtained for example in the pyrohydrolysis of fluorspar (calcium fluoride). Since the process of the invention is highly efficient in separating hydrogen fluoride from a large variety of gases, the invention is particularly applicable in separating hydrogen fluoride from the vapours obtained by pyrohydrolysis of crude fluorspar and/or low grade fluorspar.
Thus hydrogen fluoride may be obtained by pyrohydrolysis or other treatment of fluorspar varying in quality from crude ore as mined, which may contain as little as 20 percent by weight of calcium fluoride, through concentrated low grade ores to high grade concentrate containing at least 97 percent by weight of calcium fluoride.
Typical impurities in the fluorspar include silica, alumina, barytes and heavy metal carbonates and sulphides. Thus one of the major contaminant gases from which the hydrogen fluoride is to be separated, may be sulphur dioxide which is obtained, for instance by decomposition of the barytes or oxidation of the sul phides.
The process of the invention may also be applied to recovering hydrogen fluoride obtained by pyrohydrolysis of fluorosilicic acid or its salts, e. g., calcium fluorosilicate, which salts may optionally be mixed with a silicate, e.g., calcium silicate. The process of the invention may also be applied to the recovery of hydrogen fluoride obtained as a by-product in other chemical reactions, or where it is recovered in reactions when it is used as a starting material, for instance in the fluorination of chlorinated hydrocarbons. It may also be recovered from aqueous solution, for example the aqueous condensates obtained from any of the above processes. If desired it may be applied to recover anhydrous hydrogen fluoride from the aqueous constant boiling acid, which contains about 38 percent of hydrogen fluoride.
The gaseous product containing hydrogen fluoride which is obtained as a result of the second heating stage of the process of the invention may be treated in conventional manner to recover the hydrogen fluoride therefrom. For example it may be cooled to a temperature below 195C to condense the hydrogen fluoride or the gaseous stream of hydrogen fluoride may be used directly for any desired chemical reaction without intermediate isolation.
The process may be operated in batchwise or continuous manner, but is especially useful for continuous operation.
The accompanying drawing is a schematic representation of a process according to the present invention, adapted for continuous operation. A gaseous stream containing hydrogen fluoride enters along channel (3) into a reactor (1) which contains a slurry of alkalimetal fluoride in an inert liquid maintained at the absorption temperature, for example about 120C, and unabsorbed gases leave the reactor along channel (4). The slurry of alkali-metal fluoride containing absorbed hydrogen fluoride is passed along channel (5) to the reactor (2) where it is heated to the evolution temperature, for example about 260C; dry hydrogen fluoride is thus liberated and leaves along channel (6). The residual slurry is then returned to reactor (1) along channel (7) for re-cycle through the process.
The invention is further illustrated in the following Example.
EXAMPLE Gaseous mixtures of steam, hydrogen fluoride and nitrogen were passed into a slurry comprising 55g of sodium fluoride in 188g of inert liquid maintained at l l0l20C. The slurry was analysed to determine how much hydrogen fluoride had been absorbed.
The slurry was then heated to 260C over a period of 2 hours and the weight of hydrogen fluoride liberated was measured.
The results are shown in the following Table.
TABLE Liquid in which lnlet Gas Composition HF HF NaF is dispersed (71' w/w) absorbed recovered steam HF Nitrogen of Hf absorbed) Diphenyl/ Diphenyl ether eutectic mixture 23.1 5.2 71.7 56.0 91.5 Di-n-butyl phthalate 23.0 6.0 71.0 83.3 93.6 Ditto 21.9 7.1 61.0 93.1 89.6 Polypropylene glycol (M.W. 2025) 23.3 6.1 70.6 87.6 74.0
What we claim is: 1. A process for the recovery of hydrogen fluoride from a gaseous mixture containing it which comprises (i) passing the said gaseous mixture through a suspension of an alkalimetal fluoride in an inert liquid having a boiling point of at least 250C, the said suspension being maintained at a temperature below 180C, and at a temperature at which the hydrogen fluoride is absorbed by the said suspension, (ii) heating the said suspension to a temperature above 180C, whereby hydrogen fluoride is liberated from the said suspension and the said suspension is regenerated.
2. A process according to claim 1 wherein the process is carried out continuously and the gaseous mixture is passed to the suspension in a first stage where the gaseous mixture is absorbed by the suspension, the suspension of the first stage is heated in a second stage to liberate the hydrogen fluoride and regenerate the suspension and the regenerated suspension is recycled to the first stage.
3. A process according to claim 1 in which the alkalimetal fluoride is sodium fluoride.
4. A process according to claim 1 in which the alkalimetal fluoride comprises 1,to 50 percent by weight of the mixture with the liquid.
5. A process according to claim 4 in which the alkalimetal fluoride comprises 15 to 25 percent by weight of the mixture.
6. A process according to claim 1 in which the mixture is maintained at a temperature of to 180C whilst the hydrogen fluoride is absorbed.
7. A process according to claim 6 in which the temperature is 1 10 to C.
8. A process according to claim 1 in which the mixture has been heated to a temperature of 240 to 280C to liberate the hydrogen fluoride.
9. A process according to claim 1 in which the hydrogen fluoride is recovered from a gaseous mixture containing water.
10. A process according to claim 9 in which the gaseous mixture is obtained by the pyrohydrolysis of fluorspar.
11. A process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is one which does not appreciably dissolve the alkali-metal fluoride.
12. A process according to claim 1 in which the liquid with which the alkali metal fluoride is mixed is one which is substantially immiscible with water.
13. A process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is a high-boiling aromatic compound.
14. A process according to claim 13 in which the liquid is diphenyl, diphenyl ether or a mixture of these.
15. A process according to claim 13 in which the liquid is chlorinated diphenyl.
16. A process according to claim 1 in which the liq uid with which the alkali-metal fluoride is mixed is di-nbutyl phthalate, polypropylene glycol, mineral oil, oleic acid or a mixture of two or more of these.
- QFZ'QEQE Patent No, 3 ,798,875 I Q d March 26, 1974 :nvemwm George Oswald Morris k y it is certified that error appears in the above-identified patent and that said Letters Patent are hereby corrected as 'shownbelow:
Please add the following" to the front page format after the application nw'aber: 1
{36] Foreign Application Priority Data 7 March-8, 3.971 Great Britain 6269/71 I Signed and Seale this 10th day of Se tember 197g.
(SEAL) Attest:
MCCOY M. GIBSON; JR. '0. MARSHALL DANN Attest ing Officer I Commissioner of Patents -2050 ((0-59) USCOMM-CC 60376-959

Claims (15)

  1. 2. A process according to claim 1 wherein the process is carried out continuously and the gaseous mixture is passed to the suspension in a first stage where the gaseous mixture is absorbed by the suspension, the suspension of the first stage is heated in a second stage to liberate the hydrogen fluoride and regenerate the suspension and the regenerated suspension is recycled to the first stage.
  2. 3. A process according to claim 1 in which the alkali-metal fluoride is sodium fluoride.
  3. 4. A process according to claim 1 in which the alkali-metal fluoride comprises 1 to 50 percent by weight of the mixture with the liquid.
  4. 5. A process according to claim 4 in which the alkali-metal fluoride comprises 15 to 25 percent by weight of the mixture.
  5. 6. A process according to claim 1 in which the mixture is maintained at a temperature of 70* to 180*C whilst the hydrogen fluoride is absorbed.
  6. 7. A process according to claim 6 in which the temperature is 110* to 130*C.
  7. 8. A process according to claim 1 in which the mixture has been heated to a temperature of 240* to 280*C to liberate the hydrogen fluoride.
  8. 9. A process according to claim 1 in which the hydrogen fluoride is recovered from a gaseous mixture containing water.
  9. 10. A process according to claim 9 in which the gaseous mixture is obtained by the pyrohydrolysis of fluorspar.
  10. 11. A process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is one which does not appreciably dissolve the alkali-metal fluoride.
  11. 12. A process according to claim 1 in which the liquid with which the alkali metal fluoride is mixed is one which is substantially immiscible with water.
  12. 13. A process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is a high-boiling aromatic compound.
  13. 14. A process according to claim 13 in which the liquid is diphenyl, diphenyl ether or a mixture of these.
  14. 15. A process according to claim 13 in which the liquid is chlorinated diphenyl.
  15. 16. A process according to claim 1 in which the liquid with which the alkali-metal fluoride is mixed is di-n-butyl phthalate, polypropylene glycol, mineral oil, oleic acid or a mixture of two or more of these.
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3976447A (en) * 1973-04-26 1976-08-24 Pennwalt Corporation Removal of hydrogen fluoride from gaseous mixture by absorption on alkaline earth metal fluoride
EP0201881A2 (en) * 1985-05-10 1986-11-20 The Dow Chemical Company Hydrogen fluoride recovery process
US4695290A (en) * 1983-07-26 1987-09-22 Integrated Carbons Corporation Integrated coal cleaning process with mixed acid regeneration
US5336832A (en) * 1992-11-06 1994-08-09 Conoco Inc. Recovery of HF from hydrocarbon streams
US5391363A (en) * 1991-09-13 1995-02-21 Basf Aktiengesellschaft Continuous purification of an off-gas composed of CO2 +HCl+COCl2
US5766483A (en) * 1996-05-10 1998-06-16 Alliedsignal Inc. Process for hydrogen fluoride separation
US6103212A (en) * 1999-07-22 2000-08-15 Praxair Technology, Inc. Method for making UHP tungsten hexafluoride
US20110179827A1 (en) * 2008-10-06 2011-07-28 Asahi Glass Company, Limited Process for production of synthetic quartz glass
CN114534453A (en) * 2022-03-24 2022-05-27 中船(邯郸)派瑞特种气体股份有限公司 Process for recovering HF (hydrogen fluoride) in cathode tail gas discharged from nitrogen trifluoride electrolytic cell

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2426558A (en) * 1944-09-19 1947-08-26 Harshaw Chem Corp Process for removal of hydrogen fluoride from nonaqueous fluids and porous body for use in such process
US2858901A (en) * 1955-07-11 1958-11-04 Texas Co Adsorption process

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2426558A (en) * 1944-09-19 1947-08-26 Harshaw Chem Corp Process for removal of hydrogen fluoride from nonaqueous fluids and porous body for use in such process
US2858901A (en) * 1955-07-11 1958-11-04 Texas Co Adsorption process

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3976447A (en) * 1973-04-26 1976-08-24 Pennwalt Corporation Removal of hydrogen fluoride from gaseous mixture by absorption on alkaline earth metal fluoride
US4695290A (en) * 1983-07-26 1987-09-22 Integrated Carbons Corporation Integrated coal cleaning process with mixed acid regeneration
EP0201881A2 (en) * 1985-05-10 1986-11-20 The Dow Chemical Company Hydrogen fluoride recovery process
EP0201881A3 (en) * 1985-05-10 1988-01-07 The Dow Chemical Company Hydrogen fluoride recovery process
US5391363A (en) * 1991-09-13 1995-02-21 Basf Aktiengesellschaft Continuous purification of an off-gas composed of CO2 +HCl+COCl2
US5336832A (en) * 1992-11-06 1994-08-09 Conoco Inc. Recovery of HF from hydrocarbon streams
US5766483A (en) * 1996-05-10 1998-06-16 Alliedsignal Inc. Process for hydrogen fluoride separation
US6103212A (en) * 1999-07-22 2000-08-15 Praxair Technology, Inc. Method for making UHP tungsten hexafluoride
EP1070680A1 (en) * 1999-07-22 2001-01-24 Praxair Technology, Inc. Method for making UHP tungsten hexafluoride
US20110179827A1 (en) * 2008-10-06 2011-07-28 Asahi Glass Company, Limited Process for production of synthetic quartz glass
US8240172B2 (en) * 2008-10-06 2012-08-14 Asahi Glass Company, Limited Process for production of synthetic quartz glass
CN114534453A (en) * 2022-03-24 2022-05-27 中船(邯郸)派瑞特种气体股份有限公司 Process for recovering HF (hydrogen fluoride) in cathode tail gas discharged from nitrogen trifluoride electrolytic cell
CN114534453B (en) * 2022-03-24 2023-05-02 中船(邯郸)派瑞特种气体股份有限公司 Recovery process of HF in cathode tail gas discharged by nitrogen trifluoride electrolytic tank

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