IL132660A0 - T shaped electron-beam microcolumn as general purpose scanning electron microscope - Google Patents

T shaped electron-beam microcolumn as general purpose scanning electron microscope

Info

Publication number
IL132660A0
IL132660A0 IL13266099A IL13266099A IL132660A0 IL 132660 A0 IL132660 A0 IL 132660A0 IL 13266099 A IL13266099 A IL 13266099A IL 13266099 A IL13266099 A IL 13266099A IL 132660 A0 IL132660 A0 IL 132660A0
Authority
IL
Israel
Prior art keywords
general purpose
electron microscope
scanning electron
shaped
purpose scanning
Prior art date
Application number
IL13266099A
Other languages
English (en)
Original Assignee
Etec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etec Systems Inc filed Critical Etec Systems Inc
Publication of IL132660A0 publication Critical patent/IL132660A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1205—Microlenses
IL13266099A 1998-03-03 1999-03-02 T shaped electron-beam microcolumn as general purpose scanning electron microscope IL132660A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/034,893 US6023060A (en) 1998-03-03 1998-03-03 T-shaped electron-beam microcolumn as a general purpose scanning electron microscope
PCT/US1999/004472 WO1999045565A1 (fr) 1998-03-03 1999-03-02 Microcolonne a faisceau electronique utilisee comme microscope a balayage electronique polyvalent

Publications (1)

Publication Number Publication Date
IL132660A0 true IL132660A0 (en) 2001-03-19

Family

ID=21879272

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13266099A IL132660A0 (en) 1998-03-03 1999-03-02 T shaped electron-beam microcolumn as general purpose scanning electron microscope

Country Status (8)

Country Link
US (1) US6023060A (fr)
EP (1) EP0980584A1 (fr)
JP (1) JP2000514238A (fr)
KR (1) KR20010006414A (fr)
CA (1) CA2286804A1 (fr)
IL (1) IL132660A0 (fr)
TW (1) TW420821B (fr)
WO (1) WO1999045565A1 (fr)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3403036B2 (ja) * 1997-11-14 2003-05-06 株式会社東芝 電子ビーム検査方法及びその装置
US6171165B1 (en) * 1998-11-19 2001-01-09 Etec Systems, Inc. Precision alignment of microcolumn tip to a micron-size extractor aperture
US6281508B1 (en) * 1999-02-08 2001-08-28 Etec Systems, Inc. Precision alignment and assembly of microlenses and microcolumns
AU1926501A (en) * 1999-11-23 2001-06-04 Ion Diagnostics, Inc. Electron optics for multi-beam electron beam lithography tool
US6291828B1 (en) * 1999-12-21 2001-09-18 Axchlisrtechnologies, Inc. Glass-like insulator for electrically isolating electrodes from ion implanter housing
EP1122761B1 (fr) * 2000-02-01 2004-05-26 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Colonne optique pour dispositif à faisceau de particules chargées
DE60136036D1 (de) 2000-02-09 2008-11-20 Fei Co Zur anwendung in der herstellung von nanostrukturen
US6734428B2 (en) * 2000-02-19 2004-05-11 Multibeam Systems, Inc. Multi-beam multi-column electron beam inspection system
AU2001239801A1 (en) 2000-02-19 2001-08-27 Ion Diagnostics, Inc. Multi-beam multi-column electron beam inspection system
US6943351B2 (en) * 2000-02-19 2005-09-13 Multibeam Systems, Inc. Multi-column charged particle optics assembly
US6512235B1 (en) * 2000-05-01 2003-01-28 El-Mul Technologies Ltd. Nanotube-based electron emission device and systems using the same
US6797953B2 (en) 2001-02-23 2004-09-28 Fei Company Electron beam system using multiple electron beams
US7122795B2 (en) * 2001-04-18 2006-10-17 Multibeam Systems, Inc. Detector optics for charged particle beam inspection system
JP4392346B2 (ja) * 2002-06-15 2009-12-24 エヌエフエイビー・リミテッド 粒子ビーム発生装置
US7227141B2 (en) * 2002-07-15 2007-06-05 Ebara Corporation Electron beam apparatus
US7446601B2 (en) * 2003-06-23 2008-11-04 Astronix Research, Llc Electron beam RF amplifier and emitter
US7279686B2 (en) * 2003-07-08 2007-10-09 Biomed Solutions, Llc Integrated sub-nanometer-scale electron beam systems
EP1498930A1 (fr) * 2003-07-14 2005-01-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Dispositif à faisceaux de particules chargées avec ensemble à sources multiples
KR100973337B1 (ko) * 2005-06-03 2010-07-30 전자빔기술센터 주식회사 단순 구조의 초소형 전자칼럼
JP5243793B2 (ja) * 2004-07-05 2013-07-24 シーイービーティー・カンパニー・リミティッド マルチマイクロコラムにおける電子ビームの制御方法及びこの方法を利用したマルチマイクロコラム
US8071944B2 (en) * 2004-09-01 2011-12-06 Cebt Co. Ltd. Portable electron microscope using micro-column
EP1794771A1 (fr) * 2004-09-01 2007-06-13 Cebt Co., Ltd. Equipement de mouvement pour colonne electronique
KR100687717B1 (ko) * 2004-12-16 2007-02-27 한국전자통신연구원 압전소자를 채용한 마이크로 스테이지
KR100628321B1 (ko) * 2004-12-16 2006-09-27 한국전자통신연구원 마이크로 칼럼 전자빔 장치
KR100895959B1 (ko) 2005-02-24 2009-05-06 전자빔기술센터 주식회사 초소형 전자칼럼용 하우징
US8067732B2 (en) * 2005-07-26 2011-11-29 Ebara Corporation Electron beam apparatus
KR101011242B1 (ko) * 2005-07-30 2011-01-26 전자빔기술센터 주식회사 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치
US20080054180A1 (en) * 2006-05-25 2008-03-06 Charles Silver Apparatus and method of detecting secondary electrons
US8953869B2 (en) 2012-06-14 2015-02-10 Kla-Tencor Corporation Apparatus and methods for inspecting extreme ultra violet reticles
JP5935766B2 (ja) * 2013-06-26 2016-06-15 Ｊｆｅスチール株式会社 微生物試料の観察方法
US11033146B2 (en) 2019-02-25 2021-06-15 Sharkninja Operating Llc Cooking device and components thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193453U (ja) * 1982-06-14 1983-12-22 株式会社明石製作所 電子線装置における反射電子検出装置
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US5042058A (en) * 1989-03-22 1991-08-20 University Of California Ultrashort time-resolved x-ray source
US5155412A (en) * 1991-05-28 1992-10-13 International Business Machines Corporation Method for selectively scaling a field emission electron gun and device formed thereby
JPH04355041A (ja) * 1991-05-31 1992-12-09 Elionix Kk 二次電子検出器
JP2970113B2 (ja) * 1991-09-20 1999-11-02 富士通株式会社 パターン検査装置
US5122663A (en) * 1991-07-24 1992-06-16 International Business Machine Corporation Compact, integrated electron beam imaging system
US5263073A (en) * 1991-12-20 1993-11-16 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Scanning systems for high resolution E-beam and X-ray lithography
JPH065245A (ja) * 1992-06-22 1994-01-14 Fujitsu Ltd 走査型電子ビーム装置及び画像取得方法
JPH0620637A (ja) * 1992-06-30 1994-01-28 Shimadzu Corp イオン散乱分光装置
JPH0636723A (ja) * 1992-07-14 1994-02-10 Hitachi Ltd 走査型電子顕微鏡およびその対物レンズ
JP2987417B2 (ja) * 1993-03-04 1999-12-06 科学技術庁金属材料技術研究所長 透過型電子顕微鏡用の薄膜試料のその場作製および観察方法並びにその装置
JPH0794132A (ja) * 1993-09-27 1995-04-07 Seiko Instr Inc 二次荷電粒子検出器および集束イオンビーム装置
JP2615411B2 (ja) * 1993-12-27 1997-05-28 工業技術院長 多重電子ビーム照射装置および照射方法
US5684360A (en) * 1995-07-10 1997-11-04 Intevac, Inc. Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
KR970016648A (ko) * 1995-09-26 1997-04-28 김광호 넓은 해상 영역을 갖는 주사 전자 현미경의 구조
JPH09147774A (ja) * 1995-11-27 1997-06-06 Jeol Ltd 走査電子顕微鏡用対物レンズ
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column

Also Published As

Publication number Publication date
KR20010006414A (ko) 2001-01-26
TW420821B (en) 2001-02-01
EP0980584A1 (fr) 2000-02-23
WO1999045565A1 (fr) 1999-09-10
US6023060A (en) 2000-02-08
CA2286804A1 (fr) 1999-09-10
JP2000514238A (ja) 2000-10-24

Similar Documents

Publication Publication Date Title
IL132660A0 (en) T shaped electron-beam microcolumn as general purpose scanning electron microscope
AU6136799A (en) Scanning electron beam microscope
EP1117125A4 (fr) Microscope electronique a balayage
EP1271603A4 (fr) Microscope electronique a balayage
DE69840533D1 (de) Rasterelektronenmikroskop
IL135115A0 (en) Electron beam microscope using electron beam patterns
DE69638126D1 (de) Rasterelektronenmikroskop
DE69611739T2 (de) Rasterelektronenmikroskop
AUPQ932200A0 (en) Environmental scanning electron microscope
GB9719417D0 (en) Electron microscope
GB2374723B (en) Scanning electron microscope
DE69624192T2 (de) Rasterelektronenmikroskop
GB2304982B (en) Electron microscope specimen supports
AU7735796A (en) Spin-split scanning electron microscope
IL133320A0 (en) Shaped shadow projection for an electron beam column
IL139743A0 (en) Dissolution stage for an environmental scanning electron microscope
DE69807151T2 (de) Rasterelektronenmikroskop
US5731580B1 (en) Scanning electron microscope
DE59912305D1 (de) Rasterelektronenmikroskop
EP0735563A3 (fr) Microscope électronique à balayage
DE69628367D1 (de) Rasterelektronenmikroskop
GB0005717D0 (en) Scanning electron microscope
PL338538A1 (en) Emission-type electron microscope
EP1071109A4 (fr) Source d'electrons a emission de champ
GB2335787B (en) Electron beam tubes