IL105142A - Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition - Google Patents

Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition

Info

Publication number
IL105142A
IL105142A IL10514293A IL10514293A IL105142A IL 105142 A IL105142 A IL 105142A IL 10514293 A IL10514293 A IL 10514293A IL 10514293 A IL10514293 A IL 10514293A IL 105142 A IL105142 A IL 105142A
Authority
IL
Israel
Prior art keywords
carbon
selectivity
improving
vapor deposition
chemical
Prior art date
Application number
IL10514293A
Other languages
English (en)
Other versions
IL105142A0 (en
Inventor
Abraham Soffer
Moshe Azariah
Abraham Amar
Haim Cohen
Dan Golub
Shlomo Saguee
Original Assignee
Aga Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aga Ab filed Critical Aga Ab
Priority to IL10514293A priority Critical patent/IL105142A/xx
Publication of IL105142A0 publication Critical patent/IL105142A0/xx
Priority to EP94200680A priority patent/EP0617997B1/en
Priority to CA002119198A priority patent/CA2119198C/en
Priority to DE69425340T priority patent/DE69425340T2/de
Priority to JP6048131A priority patent/JPH0751551A/ja
Priority to CN94103200A priority patent/CN1037158C/zh
Priority to US08/701,205 priority patent/US5695818A/en
Publication of IL105142A publication Critical patent/IL105142A/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0067—Inorganic membrane manufacture by carbonisation or pyrolysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/08—Hollow fibre membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/021—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/08—Specific temperatures applied
    • B01D2323/081—Heating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C04B2111/00801—Membranes; Diaphragms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
IL10514293A 1993-03-23 1993-03-23 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition IL105142A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IL10514293A IL105142A (en) 1993-03-23 1993-03-23 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
EP94200680A EP0617997B1 (en) 1993-03-23 1994-03-16 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
CA002119198A CA2119198C (en) 1993-03-23 1994-03-16 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
DE69425340T DE69425340T2 (de) 1993-03-23 1994-03-16 Verfahren zur Verbesserung der Selektivität von Kohlenstoffmembranen durch chemische Kohlenstoffdampfabscheidung
JP6048131A JPH0751551A (ja) 1993-03-23 1994-03-18 制御された気孔を有する炭素薄膜の製造方法
CN94103200A CN1037158C (zh) 1993-03-23 1994-03-21 具有控制孔径的碳膜的制备方法
US08/701,205 US5695818A (en) 1993-03-23 1996-08-21 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL10514293A IL105142A (en) 1993-03-23 1993-03-23 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition

Publications (2)

Publication Number Publication Date
IL105142A0 IL105142A0 (en) 1993-07-08
IL105142A true IL105142A (en) 1997-01-10

Family

ID=11064646

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10514293A IL105142A (en) 1993-03-23 1993-03-23 Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition

Country Status (7)

Country Link
US (1) US5695818A (zh)
EP (1) EP0617997B1 (zh)
JP (1) JPH0751551A (zh)
CN (1) CN1037158C (zh)
CA (1) CA2119198C (zh)
DE (1) DE69425340T2 (zh)
IL (1) IL105142A (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914434A (en) * 1995-01-16 1999-06-22 Carbon Membranes, Ltd. Separation of linear from branched hydrocarbons using a carbon membrane
IL131851A0 (en) * 1999-09-09 2001-03-19 Carbon Membranes Ltd Recovery of olefins from gaseous mixtures
DE10051910A1 (de) * 2000-10-19 2002-05-02 Membrana Mundi Gmbh Flexible, poröse Membranen und Adsorbentien, und Verfahren zu deren Herstellung
EP1358465A1 (en) * 2001-01-31 2003-11-05 Porous Materials, Inc. Pore structure analysis of individual layers of multi-layered composite porous materials
US6730364B2 (en) * 2002-03-28 2004-05-04 National Science Council Preparation of carbon molecular sieve membranes on porous substrate
US7040141B2 (en) * 2003-04-21 2006-05-09 Porous Materials, Inc. Capillary condensation method and apparatus for determining porosity characteristics of a sample
US6845651B2 (en) * 2003-04-21 2005-01-25 Porous Materials, Inc. Quick BET method and apparatus for determining surface area and pore distribution of a sample
CA2530806A1 (en) 2003-07-03 2005-01-27 Drexel University Nanoporous carbide derived carbon with tunable pore size
DE10335131A1 (de) * 2003-07-31 2005-02-24 Blue Membranes Gmbh Verfahren und Herstellung von porösen kohlenstoffbasierten Formkörpern
US6789410B1 (en) 2003-08-28 2004-09-14 Krishna M. Gupta Method and apparatus for reduction of gas bubble formation due to gas diffusion through liquids contained in pores
KR100789219B1 (ko) * 2004-03-12 2008-01-02 니뽄 가이시 가부시키가이샤 탄소막 적층체 및 그 제조 방법, 및 ｖｏｃ 제거 장치
US20050229679A1 (en) * 2004-04-16 2005-10-20 Porous Materials, Inc. Automated clamp-on sample chamber for flow porometry and a method of using same
JP2006239663A (ja) * 2005-03-07 2006-09-14 Noritake Co Ltd 水素ガス分離膜の製造方法
US7374731B2 (en) * 2005-09-02 2008-05-20 Yonyu Plastics Co., Ltd. Reaction apparatus for producing vapor-grown carbon fibers and continuous production system thereof
US20100012576A1 (en) * 2006-05-12 2010-01-21 Drexel University Nanoporous carbonaceous membranes and related methods
US7901776B2 (en) 2006-12-29 2011-03-08 3M Innovative Properties Company Plasma deposited microporous carbon material
CN103347596A (zh) 2011-03-07 2013-10-09 佐治亚科技研究公司 用于乙烯/乙烷分离的基于聚酰亚胺的碳分子筛膜
WO2016067900A1 (ja) * 2014-10-30 2016-05-06 Nok株式会社 炭素膜用製膜原液およびこれを用いた炭素中空糸膜の製造方法
CN106999867B (zh) * 2014-12-12 2020-08-18 Nok株式会社 中空纤维碳膜的制备方法
US10456751B2 (en) * 2015-03-27 2019-10-29 National Institute Of Advanced Industrial Science And Technology Method for producing hollow fiber carbon membrane and separation membrane module
PT108896A (pt) 2015-10-19 2017-04-19 Univ Do Porto Uma membrana de peneiro molecular de carbono, métodos de preparação e seus usos

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685940A (en) * 1984-03-12 1987-08-11 Abraham Soffer Separation device
JPS61238303A (ja) * 1985-04-15 1986-10-23 Mitsubishi Heavy Ind Ltd 微細多孔質膜の製造方法
JPS62121616A (ja) * 1985-11-21 1987-06-02 Ngk Insulators Ltd 水素ガス分離膜
JPS63295476A (ja) * 1987-05-28 1988-12-01 Nippon Steel Corp 炭素繊維強化炭素材料の製造方法
IL83310A (en) * 1987-07-24 1992-07-15 Israel Atomic Energy Comm Carbon membranes and their production
GB2207666B (en) * 1987-08-06 1992-03-18 Israel Atomic Energy Comm Carbon membranes and process for producing them
JP2688751B2 (ja) * 1988-02-29 1997-12-10 三菱レイヨン株式会社 中空炭素膜繊維の製造方法
EP0394449A4 (en) * 1988-03-15 1990-12-12 Mitsubishi Rayon Co., Ltd. Porous hollow carbon fiber film and method of manufacturing the same
JPH01301506A (ja) * 1988-05-31 1989-12-05 Meidensha Corp 水素化アモルファス炭素薄膜の製造方法
GB2222346B (en) * 1988-08-24 1993-02-17 Mitsubishi Pencil Co Process for producing acoustic carbon diaphragm
US5024688A (en) * 1988-11-30 1991-06-18 Fujikura Ltd. Method for producing carbon-coated optical fiber
JP2626837B2 (ja) * 1990-11-27 1997-07-02 宇部興産株式会社 非対称性中空糸炭素膜の製法
US5098880A (en) * 1990-08-30 1992-03-24 Air Products And Chemicals, Inc. Modified carbon molecular sieves for gas separation
US5071450A (en) * 1990-09-14 1991-12-10 Air Products And Chemicals, Inc. Modified carbon molecular sieve adsorbents

Also Published As

Publication number Publication date
CA2119198C (en) 2000-10-24
CA2119198A1 (en) 1994-09-24
EP0617997B1 (en) 2000-07-26
DE69425340T2 (de) 2001-02-22
DE69425340D1 (de) 2000-08-31
US5695818A (en) 1997-12-09
CN1093299A (zh) 1994-10-12
JPH0751551A (ja) 1995-02-28
EP0617997A1 (en) 1994-10-05
IL105142A0 (en) 1993-07-08
CN1037158C (zh) 1998-01-28

Similar Documents

Publication Publication Date Title
IL105142A0 (en) Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition
AU7062091A (en) Method and apparatus for the rapid deposition by chemical vapor deposition with low vapor pressure reactants
AU5461998A (en) Chemical vapor deposition apparatus
AU663201B2 (en) Catalyst-downcomer-tray for chemical process tower
DE3564290D1 (en) Chemical vapour deposition process
EP0311401A3 (en) Process for chemical vapor deposition
EP0601956A3 (en) Process for the preparation of carbon monoxide rich gas.
EP0630989A3 (en) Process for plasma-chemical vapor deposition of strains with an improved interface.
ZA931111B (en) Method for producing articles by chemical vapor deposition and the articles produced therefrom
EP0367289A3 (en) Plasma chemical vapor deposition apparatus
GB2282825B (en) Chemical vapor deposition apparatus
EP0629600A3 (de) Verfahren zur Abtrennung von Alkanolen von weiteren organischen Verbindungen mit höherer Kohlenstoffzahl.
EP0418554A3 (en) Chemical vapor deposition system
GR3018814T3 (en) Process for the purification of 1,1,1,2-tetrafluoroethane.
AU5330590A (en) Process for the continuous recovery of hydrogen fluoride gas
EP0597329A3 (de) Verfahren zur Herstellung von alpha-Fluor -beta-dicarbonylverbindungen.
AU6947694A (en) Solar-induced chemical vapor deposition of diamond-type carbon films
EP0622384A3 (de) Verfahren zur Herstellung von Polymerpolyesterolen.
ZA923960B (en) Method for producing articles by chemical vapor deposition and the articles produced therefrom.
EP0656431A3 (en) Filing process by OMCVD.
ZA9314B (en) Chemical process.
GB8506478D0 (en) Plasma chemical vapour deposition apparatus
ZA926246B (en) Process for the separation of rhodium from organic solutions.
WO1996008211A3 (en) Plasma grafting methods and compounds
AU7578494A (en) Process for the purification of 1,1,1,2-tetrafluoroethane

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
RH1 Patent not in force