HK87196A - Process for depositing a superconducting thin film - Google Patents

Process for depositing a superconducting thin film

Info

Publication number
HK87196A
HK87196A HK87196A HK87196A HK87196A HK 87196 A HK87196 A HK 87196A HK 87196 A HK87196 A HK 87196A HK 87196 A HK87196 A HK 87196A HK 87196 A HK87196 A HK 87196A
Authority
HK
Hong Kong
Prior art keywords
depositing
thin film
superconducting thin
superconducting
film
Prior art date
Application number
HK87196A
Other languages
English (en)
Inventor
Kenjiro Higaki
Keizo Harada
Naoji Fujimori
Hideo Itozaki
Shuji Yazu
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of HK87196A publication Critical patent/HK87196A/xx

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0604—Monocrystalline substrates, e.g. epitaxial growth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0548—Processes for depositing or forming copper oxide superconductor layers by deposition and subsequent treatment, e.g. oxidation of pre-deposited material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/901—Printed circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
HK87196A 1988-06-17 1996-05-16 Process for depositing a superconducting thin film HK87196A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941488 1988-06-17

Publications (1)

Publication Number Publication Date
HK87196A true HK87196A (en) 1996-05-24

Family

ID=15474597

Family Applications (1)

Application Number Title Priority Date Filing Date
HK87196A HK87196A (en) 1988-06-17 1996-05-16 Process for depositing a superconducting thin film

Country Status (7)

Country Link
US (3) US4996190A (de)
EP (2) EP0347335B1 (de)
JP (1) JPH0286014A (de)
AU (2) AU606287B2 (de)
CA (2) CA1336557C (de)
DE (2) DE68921253T2 (de)
HK (1) HK87196A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU615014B2 (en) * 1987-02-17 1991-09-19 Sumitomo Electric Industries, Ltd. Superconducting thin film and wire and a process for producing the same
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法
JP2664070B2 (ja) * 1988-08-29 1997-10-15 住友電気工業株式会社 複合酸化物超電導薄膜の作製方法
JPH04310521A (ja) * 1991-01-29 1992-11-02 Internatl Business Mach Corp <Ibm> 酸化物薄膜生成方法
US6156707A (en) * 1992-05-20 2000-12-05 Sumitomo Electric Industries, Ltd. Method of manufacturing superconducting microwave component substrate
JP2939530B2 (ja) * 1996-11-29 1999-08-25 工業技術院長 ビスマスを構成元素に含む多元系酸化物薄膜の結晶成長法
KR20040050458A (ko) * 2002-12-10 2004-06-16 크리스탈솔루션 (주) 단결정 산화마그네슘의 처리 방법
US20160068990A1 (en) * 2013-04-18 2016-03-10 Drexel University Methods of forming perovskite films

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0292958B1 (de) * 1987-05-26 1993-12-29 Sumitomo Electric Industries Limited Verfahren zur Herstellung einer dünnen Schicht aus supraleitendem Mischoxid
DE3855246T2 (de) * 1987-07-06 1996-12-05 Sumitomo Electric Industries Supraleitende dünne Schicht und Verfahren zu ihrer Herstellung
DE3889024T2 (de) * 1987-07-13 1994-10-13 Sumitomo Electric Industries Verfahren zum Herstellen einer supraleitenden Dünnschicht.
EP0299879B1 (de) * 1987-07-17 1994-06-08 Sumitomo Electric Industries Limited Supraleitende Dünnschicht und Verfahren zu deren Herstellung
US4942142A (en) * 1987-07-27 1990-07-17 Sumitomo Electric Industries Ltd. Superconducting thin film and a method for preparing the same
KR900017216A (ko) * 1988-04-30 1990-11-15 나까하라 쯔네오 초전도체 박막을 가지는 반도체 기판과 그 제조 방법
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法

Also Published As

Publication number Publication date
DE68925239D1 (de) 1996-02-08
DE68921253T2 (de) 1995-10-19
JPH0286014A (ja) 1990-03-27
DE68921253D1 (de) 1995-03-30
EP0347335A3 (en) 1990-05-02
EP0347336A3 (en) 1990-04-25
AU3660289A (en) 1989-12-21
EP0347336B1 (de) 1995-02-22
US4996190A (en) 1991-02-26
DE68925239T2 (de) 1996-09-19
CA1336556C (en) 1995-08-08
AU606287B2 (en) 1991-01-31
EP0347335A2 (de) 1989-12-20
CA1336557C (en) 1995-08-08
US4997813A (en) 1991-03-05
US5114906A (en) 1992-05-19
AU606807B2 (en) 1991-02-14
EP0347335B1 (de) 1995-12-27
EP0347336A2 (de) 1989-12-20
AU3660389A (en) 1989-12-21

Similar Documents

Publication Publication Date Title
EP0298866A3 (en) A superconducting thin film and a method for preparing the same
SG26394G (en) A superconducting thin film and a method for preparing the same
HK87296A (en) A superconducting thin film and a method for preparing the same
AU1309388A (en) Process for depositing a superconducting thin film
EP0430737A3 (en) A superconducting thin film
HK87496A (en) Method for preparing a superconducting thin film
GB2215126B (en) Process for manufacturing a thin film transistor
GB2208390B (en) Thin film deposition process
GB2193976B (en) Process for depositing a polysilicon film on a substrate
GB8707322D0 (en) Thin film deposition process
EP0408753A4 (en) Process for forming superconducting thin film
GB8906628D0 (en) Process for manufacturing poly-epsilon-caproamide film
HK87196A (en) Process for depositing a superconducting thin film
GB8802942D0 (en) Methods &amp; apparatus for depositing thin films
HK164495A (en) Process for preparing a superconducting thin film
AU4086189A (en) Process for preparing a bismuth-type superconducting thin film
EP0358545A3 (en) Improvement in a process for producing thallium type superconducting thin film
EP0490776A3 (en) A thin film of superconductor and a process for preparing the same
HK34197A (en) Process for producing a device using a thin layer film structure
EP0486054A3 (en) Process for preparing a superconducting thin oxide film
EP0466607A3 (en) Process for depositing a different thin film on an oxide superconductor
AU7023791A (en) Method for forming a deposited film
EP0470784A3 (en) Method for selectively depositing a thin film
EP0486055A3 (en) Process for preparing a superconducting thin oxide film
EP0412007A3 (en) Process for preparing superconducting thin films

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)