HK1246406A1 - 測量裝置及測量方法、曝光裝置及曝光方法、以及器件製造方法 - Google Patents

測量裝置及測量方法、曝光裝置及曝光方法、以及器件製造方法

Info

Publication number
HK1246406A1
HK1246406A1 HK18105556.5A HK18105556A HK1246406A1 HK 1246406 A1 HK1246406 A1 HK 1246406A1 HK 18105556 A HK18105556 A HK 18105556A HK 1246406 A1 HK1246406 A1 HK 1246406A1
Authority
HK
Hong Kong
Prior art keywords
exposure
measurement
production method
production
device production
Prior art date
Application number
HK18105556.5A
Other languages
English (en)
Inventor
上田哲寬
Original Assignee
株式會社尼康
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式會社尼康 filed Critical 株式會社尼康
Publication of HK1246406A1 publication Critical patent/HK1246406A1/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70158—Diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
HK18105556.5A 2014-12-24 2018-04-28 測量裝置及測量方法、曝光裝置及曝光方法、以及器件製造方法 HK1246406A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014259759 2014-12-24
PCT/JP2015/085848 WO2016104511A1 (ja) 2014-12-24 2015-12-22 計測装置及び計測方法、露光装置及び露光方法、並びにデバイス製造方法

Publications (1)

Publication Number Publication Date
HK1246406A1 true HK1246406A1 (zh) 2018-09-07

Family

ID=56150527

Family Applications (1)

Application Number Title Priority Date Filing Date
HK18105556.5A HK1246406A1 (zh) 2014-12-24 2018-04-28 測量裝置及測量方法、曝光裝置及曝光方法、以及器件製造方法

Country Status (8)

Country Link
US (4) US10372046B2 (zh)
EP (2) EP3926404A1 (zh)
JP (1) JP6459082B2 (zh)
KR (2) KR102022785B1 (zh)
CN (2) CN107407894B (zh)
HK (1) HK1246406A1 (zh)
TW (2) TWI690781B (zh)
WO (1) WO2016104511A1 (zh)

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US11275146B2 (en) 2018-11-08 2022-03-15 Infineon Technologies Ag LIDAR system with non-uniform sensitivity response
CN111752112B (zh) * 2019-03-27 2021-09-10 上海微电子装备（集团）股份有限公司 掩膜对准标记组合、掩膜对准系统、光刻装置及其方法
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CN112838018B (zh) * 2019-11-25 2023-09-15 致茂电子(苏州)有限公司 光学量测方法
WO2022115457A1 (en) * 2020-11-24 2022-06-02 Applied Materials, Inc. Illumination system for ar metrology tool
CN115881697B (zh) * 2023-02-01 2023-06-02 广州粤芯半导体技术有限公司 对准标记组件和晶圆对准标记检测装置

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Also Published As

Publication number Publication date
CN111045302A (zh) 2020-04-21
KR20170097185A (ko) 2017-08-25
EP3926404A1 (en) 2021-12-22
TW201635054A (zh) 2016-10-01
TWI690781B (zh) 2020-04-11
KR20190107187A (ko) 2019-09-18
US20200225592A1 (en) 2020-07-16
WO2016104511A1 (ja) 2016-06-30
US20220317581A1 (en) 2022-10-06
TW202028894A (zh) 2020-08-01
CN111045302B (zh) 2022-12-30
JPWO2016104511A1 (ja) 2017-09-28
EP3239776A4 (en) 2018-09-19
EP3239776B1 (en) 2021-07-07
US20190285995A1 (en) 2019-09-19
US10372046B2 (en) 2019-08-06
KR102284227B1 (ko) 2021-07-30
US20180129144A1 (en) 2018-05-10
US10642169B2 (en) 2020-05-05
JP6459082B2 (ja) 2019-01-30
EP3239776A1 (en) 2017-11-01
CN107407894B (zh) 2020-01-24
CN107407894A (zh) 2017-11-28
TWI748363B (zh) 2021-12-01
KR102022785B1 (ko) 2019-09-18

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