HK1245903A1 - 曝光方法及裝置、平板顯示器的製造方法和元件製造方法 - Google Patents
曝光方法及裝置、平板顯示器的製造方法和元件製造方法Info
- Publication number
- HK1245903A1 HK1245903A1 HK18105325.5A HK18105325A HK1245903A1 HK 1245903 A1 HK1245903 A1 HK 1245903A1 HK 18105325 A HK18105325 A HK 18105325A HK 1245903 A1 HK1245903 A1 HK 1245903A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- manufacturing
- flat panel
- panel display
- light exposure
- exposure method
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011186922 | 2011-08-30 | ||
JP2011186871 | 2011-08-30 | ||
JP2011186949 | 2011-08-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1245903A1 true HK1245903A1 (zh) | 2018-08-31 |
Family
ID=47755751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK18105325.5A HK1245903A1 (zh) | 2011-08-30 | 2018-04-24 | 曝光方法及裝置、平板顯示器的製造方法和元件製造方法 |
Country Status (6)
Country | Link |
---|---|
JP (4) | JP6071068B2 (fr) |
KR (2) | KR102105809B1 (fr) |
CN (4) | CN109324485A (fr) |
HK (1) | HK1245903A1 (fr) |
TW (2) | TW201921166A (fr) |
WO (1) | WO2013031223A1 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101907864B1 (ko) * | 2014-03-28 | 2018-10-15 | 가부시키가이샤 니콘 | 이동체 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 이동체 구동 방법 |
JP6691488B2 (ja) * | 2014-06-17 | 2020-04-28 | カティーバ, インコーポレイテッド | 印刷システムアセンブリおよび方法 |
US20230290667A1 (en) * | 2014-06-17 | 2023-09-14 | Kateeva, Inc. | Printing system assemblies and methods |
KR101715785B1 (ko) * | 2014-12-05 | 2017-03-13 | 프로미스 주식회사 | Fpd용 노광장치 |
WO2016159176A1 (fr) * | 2015-03-31 | 2016-10-06 | 株式会社ニコン | Dispositif d'exposition, procédé de fabrication d'écran plat, procédé de fabrication de dispositif, et procédé d'exposition |
CN104820346B (zh) * | 2015-04-24 | 2017-04-12 | 深圳市大川光电设备有限公司 | 平板工件的对位方法 |
JP6855011B2 (ja) * | 2016-09-30 | 2021-04-07 | 株式会社ニコン | 露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、及び露光方法 |
KR102441111B1 (ko) * | 2017-03-31 | 2022-09-06 | 가부시키가이샤 니콘 | 이동체 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 이동체의 구동 방법 |
KR102653016B1 (ko) | 2018-09-18 | 2024-03-29 | 삼성전자주식회사 | 척 구동 장치 및 기판 처리 장치 |
CN109870881B (zh) * | 2019-03-20 | 2021-06-15 | 哈尔滨工业大学 | 宏微组合式长行程精密运动平台 |
KR102125677B1 (ko) * | 2019-06-27 | 2020-06-24 | 세메스 주식회사 | 기판 처리 방법 |
CN111082596B (zh) * | 2019-12-23 | 2022-04-15 | 安徽机电职业技术学院 | 一种包括二自由度执行机构的自由度多方位微动台 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0890136B9 (fr) * | 1996-12-24 | 2003-12-10 | ASML Netherlands B.V. | Dispositif de positionnement bidimensionnellement equilibre a deux porte-objets, et dispositif lithographique comportant ledit dispositif |
JP2000040662A (ja) * | 1999-08-05 | 2000-02-08 | Nikon Corp | 露光装置 |
JP2001313246A (ja) * | 2000-04-28 | 2001-11-09 | Nikon Corp | 露光方法及び露光装置並びにデバイスの製造方法及びデバイス |
KR20010034990A (ko) * | 2000-06-29 | 2001-05-07 | 박용석 | 반도체 및 평판디스플레이용 멀티기능을 갖춘 집적제조장치 |
JP2002251017A (ja) * | 2001-02-23 | 2002-09-06 | Adtec Engineeng Co Ltd | 露光装置 |
TWI226303B (en) * | 2002-04-18 | 2005-01-11 | Olympus Corp | Substrate carrying device |
KR101181684B1 (ko) * | 2003-08-07 | 2012-09-19 | 가부시키가이샤 니콘 | 노광 방법 및 노광 장치, 스테이지 장치, 그리고 디바이스제조 방법 |
JP2005317916A (ja) * | 2004-03-30 | 2005-11-10 | Canon Inc | 露光装置及びデバイス製造方法 |
JP2006049384A (ja) * | 2004-07-30 | 2006-02-16 | Laserfront Technologies Inc | ガントリー型xyステージ |
KR101116630B1 (ko) * | 2005-03-28 | 2012-03-07 | 엘지디스플레이 주식회사 | 평판표시장치용 노광장비 및 이를 이용한 기판의포토리소그라피 방법 |
JP2008182002A (ja) * | 2007-01-24 | 2008-08-07 | Dainippon Printing Co Ltd | 基板加工装置、基板加工方法、表示装置構成部材の製造方法 |
JP4652351B2 (ja) * | 2007-02-02 | 2011-03-16 | 大日本印刷株式会社 | 基板支持装置、基板支持方法 |
CN101611470B (zh) | 2007-03-05 | 2012-04-18 | 株式会社尼康 | 移动体装置、图案形成装置及图案形成方法、设备制造方法、移动体装置的制造方法以及移动体驱动方法 |
US8896809B2 (en) * | 2007-08-15 | 2014-11-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2009088297A (ja) * | 2007-09-29 | 2009-04-23 | Dainippon Printing Co Ltd | 載置装置、載置方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法 |
JP2009147240A (ja) * | 2007-12-18 | 2009-07-02 | Dainippon Printing Co Ltd | 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法 |
JP2009200122A (ja) * | 2008-02-19 | 2009-09-03 | Canon Inc | 露光装置およびデバイス製造方法 |
JP2010067867A (ja) | 2008-09-11 | 2010-03-25 | Nikon Corp | 露光方法及び装置、並びにデバイス製造方法 |
US8599359B2 (en) | 2008-12-19 | 2013-12-03 | Nikon Corporation | Exposure apparatus, exposure method, device manufacturing method, and carrier method |
CN201364460Y (zh) * | 2009-01-20 | 2009-12-16 | 清华大学 | 一种光刻机硅片台双台交换装置 |
TWI623819B (zh) * | 2009-05-15 | 2018-05-11 | Nikon Corp | 移動體裝置、動力傳達裝置、及曝光裝置、以及元件製造方法 |
US20110053092A1 (en) * | 2009-08-20 | 2011-03-03 | Nikon Corporation | Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method |
US20110042874A1 (en) * | 2009-08-20 | 2011-02-24 | Nikon Corporation | Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method |
US8699001B2 (en) * | 2009-08-20 | 2014-04-15 | Nikon Corporation | Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method |
US8598538B2 (en) * | 2010-09-07 | 2013-12-03 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
-
2012
- 2012-08-30 CN CN201811339478.1A patent/CN109324485A/zh active Pending
- 2012-08-30 TW TW107147782A patent/TW201921166A/zh unknown
- 2012-08-30 CN CN201280042608.XA patent/CN103782239B/zh active Active
- 2012-08-30 CN CN201710695999.XA patent/CN107357137A/zh active Pending
- 2012-08-30 CN CN201710696016.4A patent/CN107479332B/zh active Active
- 2012-08-30 TW TW101131504A patent/TWI650612B/zh active
- 2012-08-30 JP JP2013531102A patent/JP6071068B2/ja active Active
- 2012-08-30 KR KR1020147008312A patent/KR102105809B1/ko active IP Right Grant
- 2012-08-30 WO PCT/JP2012/005466 patent/WO2013031223A1/fr active Application Filing
- 2012-08-30 KR KR1020207011723A patent/KR102226989B1/ko active IP Right Grant
-
2017
- 2017-01-10 JP JP2017001562A patent/JP6380564B2/ja active Active
-
2018
- 2018-04-24 HK HK18105325.5A patent/HK1245903A1/zh unknown
- 2018-07-30 JP JP2018141981A patent/JP6638774B2/ja active Active
-
2019
- 2019-12-26 JP JP2019236526A patent/JP2020074009A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CN107357137A (zh) | 2017-11-17 |
JP2017102468A (ja) | 2017-06-08 |
JP2019049694A (ja) | 2019-03-28 |
KR102226989B1 (ko) | 2021-03-11 |
KR20140084007A (ko) | 2014-07-04 |
CN107479332A (zh) | 2017-12-15 |
KR102105809B1 (ko) | 2020-05-28 |
CN103782239A (zh) | 2014-05-07 |
JPWO2013031223A1 (ja) | 2015-03-23 |
CN109324485A (zh) | 2019-02-12 |
CN107479332B (zh) | 2020-04-03 |
JP6638774B2 (ja) | 2020-01-29 |
JP2020074009A (ja) | 2020-05-14 |
TW201921166A (zh) | 2019-06-01 |
KR20200046127A (ko) | 2020-05-06 |
JP6380564B2 (ja) | 2018-08-29 |
WO2013031223A1 (fr) | 2013-03-07 |
TW201319758A (zh) | 2013-05-16 |
CN103782239B (zh) | 2017-09-05 |
TWI650612B (zh) | 2019-02-11 |
JP6071068B2 (ja) | 2017-02-01 |
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