HK1245421B - 器件製造系統及圖案形成裝置 - Google Patents
器件製造系統及圖案形成裝置Info
- Publication number
- HK1245421B HK1245421B HK18104878.9A HK18104878A HK1245421B HK 1245421 B HK1245421 B HK 1245421B HK 18104878 A HK18104878 A HK 18104878A HK 1245421 B HK1245421 B HK 1245421B
- Authority
- HK
- Hong Kong
- Prior art keywords
- device manufacturing
- manufacturing system
- pattern formation
- formation apparatus
- pattern
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000007261 regionalization Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/24—Curved surfaces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013142922A JP2015018006A (ja) | 2013-07-08 | 2013-07-08 | 基板処理装置、デバイス製造システム及びデバイス製造方法 |
JP2014123088A JP6459234B2 (ja) | 2014-06-16 | 2014-06-16 | 基板処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1245421B true HK1245421B (zh) | 2020-05-15 |
Family
ID=52279804
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK16108788.1A HK1220776A1 (zh) | 2013-07-08 | 2016-07-21 | 基板處理裝置、器件製造系統、器件製造方法及圖案形成裝置 |
HK18116748.1A HK1257621A1 (zh) | 2013-07-08 | 2016-07-21 | 基板處理裝置 |
HK18104878.9A HK1245421B (zh) | 2013-07-08 | 2016-07-21 | 器件製造系統及圖案形成裝置 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK16108788.1A HK1220776A1 (zh) | 2013-07-08 | 2016-07-21 | 基板處理裝置、器件製造系統、器件製造方法及圖案形成裝置 |
HK18116748.1A HK1257621A1 (zh) | 2013-07-08 | 2016-07-21 | 基板處理裝置 |
Country Status (5)
Country | Link |
---|---|
KR (5) | KR102007627B1 (zh) |
CN (3) | CN108919607B (zh) |
HK (3) | HK1220776A1 (zh) |
TW (4) | TWI757817B (zh) |
WO (1) | WO2015005118A1 (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6561474B2 (ja) * | 2015-01-20 | 2019-08-21 | 大日本印刷株式会社 | フレキシブルな表示装置の製造方法 |
WO2016204202A1 (ja) * | 2015-06-15 | 2016-12-22 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の製造方法 |
CN110869855A (zh) * | 2017-07-14 | 2020-03-06 | Asml荷兰有限公司 | 量测设备和衬底平台输送装置系统 |
KR102267473B1 (ko) * | 2019-06-26 | 2021-06-22 | 한국기계연구원 | 실시간 장력제어를 이용한 미세패턴 롤 제작시스템, 및 이를 이용한 미세패턴 롤 제작방법 |
JP2019200433A (ja) * | 2019-08-01 | 2019-11-21 | 株式会社ニコン | パターン描画方法 |
KR20210059549A (ko) * | 2019-11-15 | 2021-05-25 | 캐논 톡키 가부시키가이샤 | 성막장치 |
CN111580473B (zh) * | 2020-04-10 | 2021-05-28 | 彩虹集团有限公司 | 一种液晶基板玻璃引出量自动控制的方法 |
US12063633B2 (en) | 2020-08-24 | 2024-08-13 | Qualcomm Incorporated | SPS and ULCG enhancements |
KR20230073216A (ko) * | 2020-09-28 | 2023-05-25 | 에이에스엠엘 네델란즈 비.브이. | 투영 시스템의 위치 제어를 갖는 계측 툴 |
JP2023130748A (ja) * | 2022-03-08 | 2023-09-21 | 株式会社Screenホールディングス | 露光装置および露光方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6019037U (ja) * | 1983-07-18 | 1985-02-08 | 株式会社リコー | 露光装置 |
JP2880314B2 (ja) * | 1991-03-26 | 1999-04-05 | ウシオ電機株式会社 | フィルム搬送機構およびこのフィルム搬送機構を具えた露光装置 |
JP3741013B2 (ja) * | 2001-09-17 | 2006-02-01 | ウシオ電機株式会社 | 蛇行修正機構を備えた帯状ワークの露光装置 |
JP4296741B2 (ja) | 2002-01-28 | 2009-07-15 | パナソニック電工株式会社 | コージェネレーションシステム |
JP2006098718A (ja) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | 描画装置 |
JP2006102991A (ja) * | 2004-09-30 | 2006-04-20 | Fuji Photo Film Co Ltd | 画像記録装置及び画像記録方法 |
CN100517080C (zh) * | 2006-04-27 | 2009-07-22 | 株式会社Orc制作所 | 搬运装置 |
JP5181451B2 (ja) * | 2006-09-20 | 2013-04-10 | 株式会社ニコン | マスク、露光装置及び露光方法、並びにデバイス製造方法 |
JP2009220945A (ja) * | 2008-03-17 | 2009-10-01 | Orc Mfg Co Ltd | 搬送装置 |
CN101364052B (zh) * | 2008-10-08 | 2010-10-27 | 上海微电子装备有限公司 | 主动减振系统及其预见控制方法 |
JP2010207961A (ja) * | 2009-03-10 | 2010-09-24 | Fuji Electric Systems Co Ltd | 長尺フィルムの型抜き加工方法および装置 |
US8541163B2 (en) * | 2009-06-05 | 2013-09-24 | Nikon Corporation | Transporting method, transporting apparatus, exposure method, and exposure apparatus |
KR101070734B1 (ko) * | 2009-06-30 | 2011-10-07 | 건국대학교 산학협력단 | 전자소자 연속공정 롤투롤 인쇄를 위한 초정밀 횡방향 레지스터 제어 시스템 및 방법 |
US8379186B2 (en) * | 2009-07-17 | 2013-02-19 | Nikon Corporation | Pattern formation apparatus, pattern formation method, and device manufacturing method |
KR101948467B1 (ko) * | 2010-02-12 | 2019-02-14 | 가부시키가이샤 니콘 | 기판 처리 장치 및 기판 처리 방법 |
US9696633B2 (en) * | 2010-04-12 | 2017-07-04 | Asml Netherlands B.V. | Substrate handling apparatus and lithographic apparatus |
JP5929761B2 (ja) * | 2010-12-15 | 2016-06-08 | 株式会社ニコン | 基板処理システム及び表示素子の製造方法 |
-
2014
- 2014-06-25 KR KR1020197014816A patent/KR102007627B1/ko active IP Right Grant
- 2014-06-25 KR KR1020207009396A patent/KR102219169B1/ko active IP Right Grant
- 2014-06-25 CN CN201810608818.XA patent/CN108919607B/zh active Active
- 2014-06-25 CN CN201710545966.7A patent/CN107255908B/zh active Active
- 2014-06-25 WO PCT/JP2014/066885 patent/WO2015005118A1/ja active Application Filing
- 2014-06-25 KR KR1020197037109A patent/KR102097769B1/ko active IP Right Grant
- 2014-06-25 KR KR1020197022344A patent/KR102058830B1/ko active IP Right Grant
- 2014-06-25 CN CN201480049332.7A patent/CN105556391B/zh active Active
- 2014-06-25 KR KR1020167002859A patent/KR101984360B1/ko active IP Right Grant
- 2014-07-07 TW TW109126679A patent/TWI757817B/zh active
- 2014-07-07 TW TW103123245A patent/TWI627510B/zh active
- 2014-07-07 TW TW108146949A patent/TWI706234B/zh active
- 2014-07-07 TW TW107115588A patent/TWI681261B/zh active
-
2016
- 2016-07-21 HK HK16108788.1A patent/HK1220776A1/zh not_active IP Right Cessation
- 2016-07-21 HK HK18116748.1A patent/HK1257621A1/zh unknown
- 2016-07-21 HK HK18104878.9A patent/HK1245421B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK1220776A1 (zh) | 2017-05-12 |
CN105556391B (zh) | 2018-06-29 |
TW201832017A (zh) | 2018-09-01 |
KR20190091575A (ko) | 2019-08-06 |
CN105556391A (zh) | 2016-05-04 |
CN108919607A (zh) | 2018-11-30 |
HK1257621A1 (zh) | 2019-10-25 |
KR20200037452A (ko) | 2020-04-08 |
WO2015005118A1 (ja) | 2015-01-15 |
KR102007627B1 (ko) | 2019-08-05 |
KR20190060003A (ko) | 2019-05-31 |
TWI757817B (zh) | 2022-03-11 |
TW202013096A (zh) | 2020-04-01 |
TW201514631A (zh) | 2015-04-16 |
KR20160029099A (ko) | 2016-03-14 |
TWI627510B (zh) | 2018-06-21 |
TWI681261B (zh) | 2020-01-01 |
KR102219169B1 (ko) | 2021-02-23 |
KR102097769B1 (ko) | 2020-04-07 |
KR101984360B1 (ko) | 2019-05-30 |
CN108919607B (zh) | 2020-10-30 |
CN107255908B (zh) | 2019-08-06 |
TW202041981A (zh) | 2020-11-16 |
KR20190141793A (ko) | 2019-12-24 |
KR102058830B1 (ko) | 2019-12-23 |
CN107255908A (zh) | 2017-10-17 |
TWI706234B (zh) | 2020-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20230624 |