HK1117131A1 - Mems devices having support structures and methods of fabricating the same - Google Patents

Mems devices having support structures and methods of fabricating the same

Info

Publication number
HK1117131A1
HK1117131A1 HK08112170.9A HK08112170A HK1117131A1 HK 1117131 A1 HK1117131 A1 HK 1117131A1 HK 08112170 A HK08112170 A HK 08112170A HK 1117131 A1 HK1117131 A1 HK 1117131A1
Authority
HK
Hong Kong
Prior art keywords
fabricating
methods
same
support structures
mems devices
Prior art date
Application number
HK08112170.9A
Other languages
English (en)
Inventor
Clarence Chui
Wonsuk Chung
Surya Prakash Ganti
Manish Kothari
Mark W Miles
Jeffrey B Sampsell
Teruo Sasagawa
Original Assignee
Qualcomm Mems Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc filed Critical Qualcomm Mems Technologies Inc
Publication of HK1117131A1 publication Critical patent/HK1117131A1/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
HK08112170.9A 2005-07-22 2008-11-06 Mems devices having support structures and methods of fabricating the same HK1117131A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US70165505P 2005-07-22 2005-07-22
US71001905P 2005-08-19 2005-08-19
PCT/US2006/028342 WO2007014022A1 (fr) 2005-07-22 2006-07-20 Dispositifs de microsysteme electromecanique comportant des structures de support et leurs procedes de fabrication

Publications (1)

Publication Number Publication Date
HK1117131A1 true HK1117131A1 (en) 2009-01-09

Family

ID=37387229

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08112170.9A HK1117131A1 (en) 2005-07-22 2008-11-06 Mems devices having support structures and methods of fabricating the same

Country Status (11)

Country Link
US (5) US7936031B2 (fr)
EP (1) EP1910218A1 (fr)
JP (2) JP5149175B2 (fr)
KR (2) KR101423321B1 (fr)
CN (1) CN101228093B (fr)
BR (1) BRPI0612997A2 (fr)
CA (1) CA2616268A1 (fr)
HK (1) HK1117131A1 (fr)
RU (1) RU2468988C2 (fr)
TW (1) TWI497562B (fr)
WO (1) WO2007014022A1 (fr)

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US20070047900A1 (en) 2007-03-01
US20110205197A1 (en) 2011-08-25
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US20110115762A1 (en) 2011-05-19
KR20130018986A (ko) 2013-02-25
KR101375337B1 (ko) 2014-03-18
RU2008101689A (ru) 2009-08-27
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US20100019336A1 (en) 2010-01-28
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US7875485B2 (en) 2011-01-25
CN101228093B (zh) 2012-11-28
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US20070019280A1 (en) 2007-01-25
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US7566940B2 (en) 2009-07-28
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US7936031B2 (en) 2011-05-03
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JP2012030362A (ja) 2012-02-16
US8120125B2 (en) 2012-02-21

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