HK1098193A1 - Z-axis angular rate sensor - Google Patents

Z-axis angular rate sensor

Info

Publication number
HK1098193A1
HK1098193A1 HK07104400.9A HK07104400A HK1098193A1 HK 1098193 A1 HK1098193 A1 HK 1098193A1 HK 07104400 A HK07104400 A HK 07104400A HK 1098193 A1 HK1098193 A1 HK 1098193A1
Authority
HK
Hong Kong
Prior art keywords
rate sensor
angular rate
axis angular
axis
sensor
Prior art date
Application number
HK07104400.9A
Other languages
English (en)
Inventor
Eric P Chojnacki
June P J Shen-Epstein
Nenad Nenadic
Nathan L Stirling
Vasile Nistor
Original Assignee
Kionix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kionix Inc filed Critical Kionix Inc
Publication of HK1098193A1 publication Critical patent/HK1098193A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
HK07104400.9A 2003-09-25 2007-04-25 Z-axis angular rate sensor HK1098193A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US50599003P 2003-09-25 2003-09-25
US10/847,750 US7036372B2 (en) 2003-09-25 2004-05-18 Z-axis angular rate sensor
PCT/US2004/030614 WO2005031257A2 (en) 2003-09-25 2004-09-20 Z-axis angular rate sensor

Publications (1)

Publication Number Publication Date
HK1098193A1 true HK1098193A1 (en) 2007-07-13

Family

ID=34396283

Family Applications (1)

Application Number Title Priority Date Filing Date
HK07104400.9A HK1098193A1 (en) 2003-09-25 2007-04-25 Z-axis angular rate sensor

Country Status (9)

Country Link
US (1) US7036372B2 (xx)
EP (1) EP1671135A4 (xx)
JP (1) JP4643578B2 (xx)
KR (1) KR101100021B1 (xx)
CN (1) CN100585406C (xx)
CA (1) CA2540273C (xx)
HK (1) HK1098193A1 (xx)
TW (1) TWI345059B (xx)
WO (1) WO2005031257A2 (xx)

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US9714842B2 (en) * 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US8833162B2 (en) * 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
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Also Published As

Publication number Publication date
CN100585406C (zh) 2010-01-27
US20050072231A1 (en) 2005-04-07
EP1671135A2 (en) 2006-06-21
WO2005031257A3 (en) 2006-03-02
CA2540273A1 (en) 2005-04-07
TWI345059B (en) 2011-07-11
KR20060096060A (ko) 2006-09-05
KR101100021B1 (ko) 2011-12-29
EP1671135A4 (en) 2011-11-09
US7036372B2 (en) 2006-05-02
JP4643578B2 (ja) 2011-03-02
WO2005031257A2 (en) 2005-04-07
CA2540273C (en) 2012-07-03
TW200521439A (en) 2005-07-01
JP2007519891A (ja) 2007-07-19
CN1867832A (zh) 2006-11-22

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20140920