HK1097229A1 - Print head with thin membrane - Google Patents

Print head with thin membrane

Info

Publication number
HK1097229A1
HK1097229A1 HK07104236.9A HK07104236A HK1097229A1 HK 1097229 A1 HK1097229 A1 HK 1097229A1 HK 07104236 A HK07104236 A HK 07104236A HK 1097229 A1 HK1097229 A1 HK 1097229A1
Authority
HK
Hong Kong
Prior art keywords
print head
thin membrane
membrane
thin
print
Prior art date
Application number
HK07104236.9A
Other languages
English (en)
Inventor
Zhenfang Chen
Andreas Bibl
Jeffrey Birkmeyer
Original Assignee
Fujifilm Dimatix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Dimatix Inc filed Critical Fujifilm Dimatix Inc
Publication of HK1097229A1 publication Critical patent/HK1097229A1/xx

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/145Arrangement thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/145Arrangement thereof
    • B41J2/155Arrangement thereof for line printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/1609Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1635Manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14403Structure thereof only for on-demand ink jet heads including a filter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/20Modules

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
HK07104236.9A 2003-10-10 2007-04-23 Print head with thin membrane HK1097229A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US51045903P 2003-10-10 2003-10-10
PCT/US2004/033128 WO2005037558A2 (fr) 2003-10-10 2004-10-07 Tete d'imprimante avec membrane mince

Publications (1)

Publication Number Publication Date
HK1097229A1 true HK1097229A1 (en) 2007-06-22

Family

ID=34465135

Family Applications (1)

Application Number Title Priority Date Filing Date
HK07104236.9A HK1097229A1 (en) 2003-10-10 2007-04-23 Print head with thin membrane

Country Status (8)

Country Link
US (2) US7566118B2 (fr)
EP (2) EP2269826A3 (fr)
JP (1) JP4550062B2 (fr)
KR (1) KR101137643B1 (fr)
CN (1) CN100548692C (fr)
HK (1) HK1097229A1 (fr)
TW (1) TWI343324B (fr)
WO (1) WO2005037558A2 (fr)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7052122B2 (en) * 2004-02-19 2006-05-30 Dimatix, Inc. Printhead
JP2007535433A (ja) * 2004-04-30 2007-12-06 ディマティックス インコーポレイテッド 液滴射出装置の位置決め
US7344230B2 (en) * 2004-09-07 2008-03-18 Fujifilm Dimatix, Inc. Fluid drop ejection system capable of removing dissolved gas from fluid
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US20060152558A1 (en) * 2005-01-07 2006-07-13 Hoisington Paul A Fluid drop ejection
US7681994B2 (en) * 2005-03-21 2010-03-23 Fujifilm Dimatix, Inc. Drop ejection device
TWI379771B (en) 2005-07-01 2012-12-21 Fujifilm Dimatix Inc Non-wetting coating on a fluid ejector
EP1907212B1 (fr) * 2005-07-13 2012-10-24 Fujifilm Dimatix, Inc. Procede et appareil de fabrication extensible par ejection de gouttelettes
US20070257580A1 (en) * 2006-05-05 2007-11-08 Fujifilm Dimatix, Inc. Polishing Piezoelectric Material
US7779522B2 (en) * 2006-05-05 2010-08-24 Fujifilm Dimatix, Inc. Method for forming a MEMS
JP4600836B2 (ja) * 2006-08-09 2010-12-22 エルピーダメモリ株式会社 半導体記憶装置の製造方法
US8128201B2 (en) 2006-12-01 2012-03-06 Fujifilm Dimatix, Inc. Non-wetting coating on a fluid ejector
EP2097263B1 (fr) 2006-12-22 2012-02-08 Telecom Italia S.p.A. Processus de fabrication de tête d'impression à jet d'encre
US8455271B2 (en) * 2007-03-29 2013-06-04 Xerox Corporation Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
KR100906804B1 (ko) * 2007-09-27 2009-07-09 삼성전기주식회사 노즐 플레이트, 잉크젯 헤드 및 그들의 제조방법
WO2009142960A1 (fr) * 2008-05-22 2009-11-26 Fujifilm Corporation Gravure d'un matériau piézoélectrique
EP2332169B1 (fr) * 2008-09-18 2016-02-24 Fujifilm Dimatix, Inc. Liaison sur un substrat de silicium comportant un sillon
EP2342083B1 (fr) * 2008-09-30 2019-05-22 Fujifilm Dimatix, Inc. Commande de la vitesse dans une buse
JP2012507418A (ja) 2008-10-30 2012-03-29 富士フイルム株式会社 流体吐出装置上の非湿潤性被膜
US8573750B2 (en) * 2008-10-30 2013-11-05 Fujifilm Corporation Short circuit protection for inkjet printhead
US20100134568A1 (en) * 2008-10-30 2010-06-03 Christoph Menzel MEMS Device with Uniform Membrane
WO2010051247A2 (fr) * 2008-10-31 2010-05-06 Fujifilm Dimatix, Inc. Façonnage d'un orifice de sortie de buse
US8053951B2 (en) * 2008-11-04 2011-11-08 Fujifilm Corporation Thin film piezoelectric actuators
US8197029B2 (en) * 2008-12-30 2012-06-12 Fujifilm Corporation Forming nozzles
US20100187667A1 (en) 2009-01-28 2010-07-29 Fujifilm Dimatix, Inc. Bonded Microelectromechanical Assemblies
US8262192B2 (en) * 2009-02-17 2012-09-11 Fujifilm Corporation Ink jet printer for printing electromagnetic wave curing ink
US8164234B2 (en) 2009-02-26 2012-04-24 Fujifilm Corporation Sputtered piezoelectric material
US8389084B2 (en) * 2009-02-27 2013-03-05 Fujifilm Corporation Device with protective layer
US8061810B2 (en) 2009-02-27 2011-11-22 Fujifilm Corporation Mitigation of fluid leaks
EP2230207A1 (fr) * 2009-03-13 2010-09-22 Nivarox-FAR S.A. Moule pour galvanoplastie et son procédé de fabrication
USD653284S1 (en) 2009-07-02 2012-01-31 Fujifilm Dimatix, Inc. Printhead frame
USD652446S1 (en) 2009-07-02 2012-01-17 Fujifilm Dimatix, Inc. Printhead assembly
US8517508B2 (en) * 2009-07-02 2013-08-27 Fujifilm Dimatix, Inc. Positioning jetting assemblies
US8262200B2 (en) 2009-09-15 2012-09-11 Fujifilm Corporation Non-wetting coating on a fluid ejector
US8556364B2 (en) 2010-07-01 2013-10-15 Fujifilm Dimatix, Inc. Determining whether a flow path is ready for ejecting a drop
US8395798B2 (en) 2010-07-15 2013-03-12 Fujifilm Dimatix, Inc. Printing objects using a rolling buffer
WO2012036682A1 (fr) 2010-09-15 2012-03-22 Hewlett-Packard Development Company, L.P. Alignement de buses à fluide
US8348396B2 (en) 2011-06-09 2013-01-08 Hewlett-Packard Development Company, L.P. Fluid ejection device
US8939556B2 (en) 2011-06-09 2015-01-27 Hewlett-Packard Development Company, L.P. Fluid ejection device
WO2013079369A1 (fr) * 2011-11-30 2013-06-06 Oce-Technologies B.V. Tête d'impression à jet d'encre et procédé de fabrication d'une telle tête d'impression
CN102601009A (zh) * 2012-03-21 2012-07-25 西北工业大学 一种硅基微型侧喷口合成射流器及其制作方法
US20140313257A1 (en) * 2013-03-15 2014-10-23 Illinois Tool Works Inc. System and method for single pass printing
US9070745B1 (en) * 2013-12-13 2015-06-30 Lam Research Corporation Methods and systems for forming semiconductor laminate structures
US9421772B2 (en) 2014-12-05 2016-08-23 Xerox Corporation Method of manufacturing ink jet printheads including electrostatic actuators
US10022957B2 (en) 2015-04-24 2018-07-17 Fujifilm Dimatrix, Inc. Fluid ejection devices with reduced crosstalk
US10315421B2 (en) 2015-12-31 2019-06-11 Fujifilm Dimatix, Inc. Fluid ejection devices
US10406811B2 (en) 2016-12-19 2019-09-10 Fujifilm Dimatix, Inc. Actuators for fluid delivery systems
CN107244145A (zh) * 2017-06-08 2017-10-13 翁焕榕 喷墨打印头及其喷嘴板、喷墨打印机
JP7064516B2 (ja) 2017-06-09 2022-05-10 フジフィルム ディマティックス, インコーポレイテッド クロストークを減少させた流体吐出装置
CN108099409B (zh) * 2018-01-03 2023-12-22 京东方科技集团股份有限公司 打印喷头和喷墨打印设备
EP3820705B1 (fr) * 2018-11-14 2024-05-22 Hewlett-Packard Development Company, L.P. Ensembles puces fluidiques avec des substrats coudés rigides

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538241A (en) * 1983-07-14 1985-08-27 Burroughs Corporation Address translation buffer
EP0465229B1 (fr) * 1990-07-02 1994-12-28 Seiko Epson Corporation Micropompe et son procédé de fabrication
JP2580373B2 (ja) * 1990-08-10 1997-02-12 大日本スクリーン製造株式会社 基板の表面処理方法
US6164759A (en) * 1990-09-21 2000-12-26 Seiko Epson Corporation Method for producing an electrostatic actuator and an inkjet head using it
US5265315A (en) 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
JPH06134995A (ja) * 1992-08-27 1994-05-17 Rohm Co Ltd インクジェットヘッドの製造方法
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
JP3366146B2 (ja) * 1995-03-06 2003-01-14 セイコーエプソン株式会社 インク噴射ヘッド
US6494566B1 (en) * 1997-01-31 2002-12-17 Kyocera Corporation Head member having ultrafine grooves and a method of manufacture thereof
JP2001205806A (ja) * 2000-01-25 2001-07-31 Ricoh Co Ltd 静電アクチュエータ、液滴吐出ヘッド及びその製造方法並びにインクジェット記録装置
JP2002248756A (ja) * 2001-02-27 2002-09-03 Ricoh Co Ltd インクジェットヘッド
JP2002248764A (ja) * 2001-02-27 2002-09-03 Ricoh Co Ltd インクジェットヘッド及びその製造方法
JP3846552B2 (ja) * 2001-03-05 2006-11-15 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP2003191477A (ja) * 2001-10-19 2003-07-08 Hitachi Koki Co Ltd インクジェットプリントヘッド及びその製造方法
US6679587B2 (en) * 2001-10-31 2004-01-20 Hewlett-Packard Development Company, L.P. Fluid ejection device with a composite substrate
KR100438836B1 (ko) * 2001-12-18 2004-07-05 삼성전자주식회사 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법
US20030143492A1 (en) 2002-01-31 2003-07-31 Scitex Digital Printing, Inc. Mandrel with controlled release layer for multi-layer electroformed ink jet orifice plates
JP2004209724A (ja) * 2002-12-27 2004-07-29 Canon Inc 二重陽極接合による接合方法

Also Published As

Publication number Publication date
US20090230088A1 (en) 2009-09-17
EP2269826A2 (fr) 2011-01-05
TW200528293A (en) 2005-09-01
WO2005037558A2 (fr) 2005-04-28
EP1680279A2 (fr) 2006-07-19
CN100548692C (zh) 2009-10-14
US20050099467A1 (en) 2005-05-12
CN1890104A (zh) 2007-01-03
WO2005037558A3 (fr) 2005-07-21
KR20060115386A (ko) 2006-11-08
JP4550062B2 (ja) 2010-09-22
EP1680279B1 (fr) 2014-04-23
TWI343324B (en) 2011-06-11
US7566118B2 (en) 2009-07-28
WO2005037558A8 (fr) 2005-09-09
JP2007508163A (ja) 2007-04-05
EP2269826A3 (fr) 2012-09-26
KR101137643B1 (ko) 2012-04-19

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