GB9811563D0 - Improvements in and relating to photomasks - Google Patents

Improvements in and relating to photomasks

Info

Publication number
GB9811563D0
GB9811563D0 GB9811563A GB9811563A GB9811563D0 GB 9811563 D0 GB9811563 D0 GB 9811563D0 GB 9811563 A GB9811563 A GB 9811563A GB 9811563 A GB9811563 A GB 9811563A GB 9811563 D0 GB9811563 D0 GB 9811563D0
Authority
GB
United Kingdom
Prior art keywords
photomasks
photomask
need
silver halide
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB9811563A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Dundee
Original Assignee
University of Dundee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Dundee filed Critical University of Dundee
Priority to GB9811563A priority Critical patent/GB9811563D0/en
Publication of GB9811563D0 publication Critical patent/GB9811563D0/en
Priority to PCT/GB1999/001484 priority patent/WO1999063406A1/fr
Priority to EP99923736A priority patent/EP1092173A1/fr
Priority to AU40501/99A priority patent/AU4050199A/en
Priority to JP2000552555A priority patent/JP2002517785A/ja
Ceased legal-status Critical Current

Links

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
GB9811563A 1998-05-30 1998-05-30 Improvements in and relating to photomasks Ceased GB9811563D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB9811563A GB9811563D0 (en) 1998-05-30 1998-05-30 Improvements in and relating to photomasks
PCT/GB1999/001484 WO1999063406A1 (fr) 1998-05-30 1999-05-28 Photomasques a base d'argent
EP99923736A EP1092173A1 (fr) 1998-05-30 1999-05-28 Photomasques a base d'argent
AU40501/99A AU4050199A (en) 1998-05-30 1999-05-28 Silver based photomasks
JP2000552555A JP2002517785A (ja) 1998-05-30 1999-05-28 銀系フォトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9811563A GB9811563D0 (en) 1998-05-30 1998-05-30 Improvements in and relating to photomasks

Publications (1)

Publication Number Publication Date
GB9811563D0 true GB9811563D0 (en) 1998-07-29

Family

ID=10832905

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9811563A Ceased GB9811563D0 (en) 1998-05-30 1998-05-30 Improvements in and relating to photomasks

Country Status (5)

Country Link
EP (1) EP1092173A1 (fr)
JP (1) JP2002517785A (fr)
AU (1) AU4050199A (fr)
GB (1) GB9811563D0 (fr)
WO (1) WO1999063406A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2562599B1 (fr) 2009-01-29 2014-12-10 Digiflex Ltd. Procédé de production d'un photomasque sur une surface photopolymérique
EP3893055B1 (fr) * 2021-01-18 2022-12-14 Longserving Technology Co., Ltd Procédé de fabrication d'un modèle de circuit à échelle picoscopique/nanoscopique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1447607A1 (de) * 1963-02-27 1969-01-02 Noc Chemical Arts Inc Di Photographischer Film
NL162215C (fr) * 1967-07-03 Ibm
US3716363A (en) * 1971-02-05 1973-02-13 Gte Laboratories Inc Method of making photomasks of the type used in the fabrication of microelectronic circuits
JPS5129877A (fr) * 1974-09-06 1976-03-13 Fuji Photo Film Co Ltd
JPS57139923A (en) * 1981-02-21 1982-08-30 Toshiba Corp Forming method for pattern by electron beam

Also Published As

Publication number Publication date
EP1092173A1 (fr) 2001-04-18
WO1999063406A1 (fr) 1999-12-09
AU4050199A (en) 1999-12-20
JP2002517785A (ja) 2002-06-18

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)