GB979622A - Improvements in or relating to electron beam generating systems - Google Patents
Improvements in or relating to electron beam generating systemsInfo
- Publication number
- GB979622A GB979622A GB10002/61A GB1000261A GB979622A GB 979622 A GB979622 A GB 979622A GB 10002/61 A GB10002/61 A GB 10002/61A GB 1000261 A GB1000261 A GB 1000261A GB 979622 A GB979622 A GB 979622A
- Authority
- GB
- United Kingdom
- Prior art keywords
- diaphragm
- anode
- cathode
- aperture
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 4
- 241000258880 Gynoeryx meander Species 0.000 abstract 1
- 239000000835 fiber Substances 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0061—Tubes with discharge used as electron source
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEZ7940A DE1117781B (de) | 1960-04-16 | 1960-04-16 | Elektronenstrahlerzeugungssystem und Verfahren zur Herstellung der Blendenoeffnung des Elektronenstrahlerzeugungssystems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB979622A true GB979622A (en) | 1965-01-06 |
Family
ID=7620324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB10002/61A Expired GB979622A (en) | 1960-04-16 | 1961-03-20 | Improvements in or relating to electron beam generating systems |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3138736A (enrdf_load_stackoverflow) |
| CH (1) | CH400384A (enrdf_load_stackoverflow) |
| DE (1) | DE1117781B (enrdf_load_stackoverflow) |
| GB (1) | GB979622A (enrdf_load_stackoverflow) |
| NL (1) | NL263646A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3389240A (en) * | 1964-09-25 | 1968-06-18 | Welding Research Inc | Electron beam welding apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE438468A (enrdf_load_stackoverflow) * | 1939-05-08 | |||
| US2721972A (en) * | 1952-08-04 | 1955-10-25 | Rothstein Jerome | High sensitivity ionization gauge |
| US2847597A (en) * | 1955-11-25 | 1958-08-12 | Sylvania Electric Prod | Electron discharge device |
| US2887599A (en) * | 1957-06-17 | 1959-05-19 | High Voltage Engineering Corp | Electron acceleration tube |
| NL242517A (enrdf_load_stackoverflow) * | 1958-08-26 |
-
0
- NL NL263646D patent/NL263646A/xx unknown
-
1960
- 1960-04-16 DE DEZ7940A patent/DE1117781B/de active Pending
-
1961
- 1961-03-17 CH CH325461A patent/CH400384A/de unknown
- 1961-03-20 GB GB10002/61A patent/GB979622A/en not_active Expired
- 1961-03-20 US US96935A patent/US3138736A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3138736A (en) | 1964-06-23 |
| CH400384A (de) | 1965-10-15 |
| NL263646A (enrdf_load_stackoverflow) | |
| DE1117781B (de) | 1961-11-23 |
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