GB964461A - Vacuum metalizing - Google Patents
Vacuum metalizingInfo
- Publication number
- GB964461A GB964461A GB39611/62A GB3961162A GB964461A GB 964461 A GB964461 A GB 964461A GB 39611/62 A GB39611/62 A GB 39611/62A GB 3961162 A GB3961162 A GB 3961162A GB 964461 A GB964461 A GB 964461A
- Authority
- GB
- United Kingdom
- Prior art keywords
- resistor
- strip
- coating metal
- coating
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 abstract 7
- 238000000576 coating method Methods 0.000 abstract 7
- 229910052751 metal Inorganic materials 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 6
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 abstract 1
- 229910052582 BN Inorganic materials 0.000 abstract 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 229910033181 TiB2 Inorganic materials 0.000 abstract 1
- 229910007948 ZrB2 Inorganic materials 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052793 cadmium Inorganic materials 0.000 abstract 1
- 238000010924 continuous production Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
<PICT:0964461/C6-C7/1> In a continuous process of vapour depositing metals such as Al, Au, Ag, Cd and Sn on a substrate such as ferrous strip, the strip is continuously fed into a vacuum chamber and the coating metal in solid form, e.g. as a wire. is fed to the upper portion of the vertical face of an upright electrical resistance through which current is passed to melt and vaporize the coating metal. As shown in Fig. 1, strip 10 is continuously fed via roller 11 into a vacuum chamber which contains a vapour source assembly 14. This assembly comprises an elongated resistor 20, preferably made of boron nitride and titanium diboride or zirconium diboride; the ends of the resistor engaging water cooled copper connectors 23 and 24. The resistor, connectors and insulators 40, 41 are held in position by a spring clamp comprising steel strips 36 and 37 and a screw rod 42. The coating metal, e.g. Al wires 46, 47, diameter 0.062-0.375 inch, is fed by rollers so that the leading end of the wires continually about the vertical faces of the resistor. The rate of feed of the wire depends on the current supply which is adjusted to give the required balance. The coating metal melts, flows down the resistor, vaporizes and forms a coating on the strip which moves past the resistor parallel to the vertical face on which the coating metal is applied. The strip is turned through 180 degrees by a roller 12 and a further coating is applied from the other vertical face of the resistor. The other face of the strip may also be similarly coated by locating another resistor 50 in the chamber and arranging another roll 13 to change the direction of the strip.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US151661A US3117887A (en) | 1961-11-13 | 1961-11-13 | Apparatus and procedure for evaporating metal in vacuum metalizing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB964461A true GB964461A (en) | 1964-07-22 |
Family
ID=22539724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB39611/62A Expired GB964461A (en) | 1961-11-13 | 1962-10-19 | Vacuum metalizing |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3117887A (en) |
| BE (1) | BE624470A (en) |
| DE (1) | DE1293516B (en) |
| FR (1) | FR1337659A (en) |
| GB (1) | GB964461A (en) |
| LU (1) | LU42655A1 (en) |
| NL (2) | NL125589C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2020454B1 (en) * | 2007-07-27 | 2012-09-05 | Applied Materials, Inc. | Evaporation apparatus with inclined crucible |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3438754A (en) * | 1965-02-18 | 1969-04-15 | Republic Steel Corp | Zinc-coated steel with vapor-deposited aluminum overlay and method of producing same |
| US3350219A (en) * | 1966-07-07 | 1967-10-31 | Stackpole Carbon Co | Evaporating metal employing porous member |
| DE2916080C2 (en) * | 1979-04-20 | 1984-12-06 | Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev | Process for molecular vapor deposition of semiconductor layers and device for carrying out this process |
| GB2056500B (en) * | 1979-08-09 | 1983-05-25 | Standard Telephones Cables Ltd | Coating powder with valve-metal |
| DE4015385A1 (en) * | 1990-05-14 | 1991-11-21 | Leybold Ag | SERIES EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS |
| DE4016225C2 (en) * | 1990-05-19 | 1997-08-14 | Leybold Ag | Series evaporator for vacuum deposition systems |
| DE4123342C2 (en) * | 1991-07-15 | 1999-08-19 | Leybold Ag | Series evaporator for vacuum deposition systems |
| DE4128382C1 (en) * | 1991-08-27 | 1992-07-02 | Leybold Ag, 6450 Hanau, De | |
| US5410631A (en) * | 1993-09-10 | 1995-04-25 | Advanced Ceramics Corporation | Clamp assembly for a vaporization boat |
| DE19545914C1 (en) * | 1995-12-08 | 1996-11-07 | Sintec Keramik Gmbh | Ceramic boat for use in vaporising metals, esp. aluminium@, in coating processes |
| US6120286A (en) * | 1996-12-05 | 2000-09-19 | Sintec Keramik Gmbh & Co. Kg | Vaporizer boat for metal vaporizing |
| DE19735352A1 (en) * | 1997-03-06 | 1998-09-10 | Kempten Elektroschmelz Gmbh | Ceramic evaporator with a rejuvenation of the evaporator ends |
| TWI264473B (en) * | 2001-10-26 | 2006-10-21 | Matsushita Electric Works Ltd | Vacuum deposition device and vacuum deposition method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT155465B (en) * | 1936-07-17 | 1939-01-25 | Paul Alexander | Method and device for the deposition of a coating on a support. |
| US2378476A (en) * | 1943-02-11 | 1945-06-19 | American Optical Corp | Coating apparatus |
| US2622041A (en) * | 1948-08-03 | 1952-12-16 | Nat Res Corp | Deposition of metal on a nonmetallic support |
| DE953677C (en) * | 1951-10-19 | 1956-12-06 | Siemens Ag | Evaporator for continuous steaming of strip-shaped material |
| DE1084100B (en) * | 1957-02-25 | 1960-06-23 | Edwards High Vacuum Ltd | Evaporation device for vacuum evaporation, especially with aluminum |
| US2909149A (en) * | 1957-11-15 | 1959-10-20 | Cons Electrodynamics Corp | Apparatus for evaporating metal |
| US2969448A (en) * | 1959-03-03 | 1961-01-24 | Continental Can Co | Heater vaporizer element support |
| US3020177A (en) * | 1959-05-13 | 1962-02-06 | Continental Can Co | Art of vaporizing materials |
-
1961
- 1961-11-13 US US151661A patent/US3117887A/en not_active Expired - Lifetime
-
1962
- 1962-10-19 GB GB39611/62A patent/GB964461A/en not_active Expired
- 1962-10-25 FR FR913397A patent/FR1337659A/en not_active Expired
- 1962-11-06 BE BE624470D patent/BE624470A/xx unknown
- 1962-11-08 DE DER33848A patent/DE1293516B/en active Pending
- 1962-11-08 LU LU42655D patent/LU42655A1/xx unknown
- 1962-11-09 NL NL285351A patent/NL125589C/xx active
- 1962-11-09 NL NL285351D patent/NL285351A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2020454B1 (en) * | 2007-07-27 | 2012-09-05 | Applied Materials, Inc. | Evaporation apparatus with inclined crucible |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1293516B (en) | 1969-04-24 |
| BE624470A (en) | 1963-05-06 |
| LU42655A1 (en) | 1963-01-08 |
| NL285351A (en) | 1968-07-15 |
| NL125589C (en) | 1968-07-15 |
| US3117887A (en) | 1964-01-14 |
| FR1337659A (en) | 1963-09-13 |
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