GB909228A - Etching of semiconductive elements - Google Patents

Etching of semiconductive elements

Info

Publication number
GB909228A
GB909228A GB1251361A GB1251361A GB909228A GB 909228 A GB909228 A GB 909228A GB 1251361 A GB1251361 A GB 1251361A GB 1251361 A GB1251361 A GB 1251361A GB 909228 A GB909228 A GB 909228A
Authority
GB
United Kingdom
Prior art keywords
etching
active portion
elements
acetic acid
passive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1251361A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB909228A publication Critical patent/GB909228A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/40—Alkaline compositions for etching other metallic material

Abstract

A method of etching semi-conductive elements such as germanium wafers to a desired size comprises agitating the elements in a passive portion of an etching solution, and gradually adding an active portion at a rate such as to control the temperature of the solution within desired limits. The active portion is an oxidant, such as hydrogen peroxide, and the passive portion is an alkaline hydroxide, carbonate, borate or phosphate, or a salt of acetic acid. In another form, the active portion is nitric acid and the passive portion is hydrofluoric acid mixed with acetic acid.
GB1251361A 1960-07-06 1961-04-07 Etching of semiconductive elements Expired GB909228A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4104260A 1960-07-06 1960-07-06

Publications (1)

Publication Number Publication Date
GB909228A true GB909228A (en) 1962-10-31

Family

ID=21914413

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1251361A Expired GB909228A (en) 1960-07-06 1961-04-07 Etching of semiconductive elements

Country Status (5)

Country Link
BE (1) BE605794A (en)
CH (1) CH429364A (en)
DE (1) DE1214511B (en)
GB (1) GB909228A (en)
NL (2) NL266770A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356500A (en) * 1964-09-28 1967-12-05 Santa Barbara Res Ct Production of infrared detector patterns
US3480474A (en) * 1966-03-04 1969-11-25 Siemens Ag Method for preparing semiconductor crystals
CN114316990A (en) * 2021-12-09 2022-04-12 湖北兴福电子材料有限公司 Germanium etching solution with high etching cone angle

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1058333B (en) * 1954-12-01 1959-05-27 Philips Nv Process for etching the surface of a semiconducting body made of a telluride of a divalent metal
NL192840A (en) * 1954-12-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356500A (en) * 1964-09-28 1967-12-05 Santa Barbara Res Ct Production of infrared detector patterns
US3480474A (en) * 1966-03-04 1969-11-25 Siemens Ag Method for preparing semiconductor crystals
CN114316990A (en) * 2021-12-09 2022-04-12 湖北兴福电子材料有限公司 Germanium etching solution with high etching cone angle

Also Published As

Publication number Publication date
BE605794A (en) 1961-11-03
NL132314C (en)
DE1214511B (en) 1966-04-14
NL266770A (en)
CH429364A (en) 1967-01-31

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