GB903473A - Improvements in or relating to ionic bombardment cleaning apparatus - Google Patents
Improvements in or relating to ionic bombardment cleaning apparatusInfo
- Publication number
- GB903473A GB903473A GB3824557A GB3824557A GB903473A GB 903473 A GB903473 A GB 903473A GB 3824557 A GB3824557 A GB 3824557A GB 3824557 A GB3824557 A GB 3824557A GB 903473 A GB903473 A GB 903473A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- shield
- electrode
- arrangement
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Lasers (AREA)
- Cleaning In General (AREA)
Abstract
903,473. Discharge apparatus. EDWARDS HIGH VACUUM Ltd. Nov. 25, 1958 [Dec. 9, 1957], No. 38245/57. Class 39 (1). [Also in Group XX] In ionic bombardment cleaning apparatus, for use, e.g., in the cleaning of optical surfaces prior to coating with metal, a cathode electrode is so disposed or arranged that the work surface is not directly exposed to electrons emitted by the cathode. A shield may be provided between the cathode and the work surface and may be located in the cathode dark space, in which case an alternative discharge path of sufficient length for sustaining ionization must be present. In one arrangement, Fig. 2, a shield 4 is placed between a rod cathode 5 and a work-piece (not shown) carried by a rotary holder 1. Two such shielded rod cathodes may be employed connected across an alternating high-tension supply (Fig. 3, not shown). In the known arrangement shown in Fig. 5, two ring electrodes 7 and 8 are located between two earthed shields 9 and 10. Shield 10 prevents the discharge from reaching the wall of the glass vessel (not shown) and shield 9 prevents material from the vapour source 12 from forming a deposit on the electrode surfaces. In accordance with the invention the height of the shield 9 is increased, or alternatively the shield is provided with a flange, so as to intercept all straight line paths between the electrodes 7 and 8 and the spherical work-holder 11. The electrodes 7 and 8 are spaced-apart by a distance less than the length of the cathode dark space so the discharge follows paths such as those indicated by the dotted lines. The arrangement may be operated on D.C. by making one electrode, preferably electrode 8, a cathode and the other an anode. In a further arrangement (Fig. 6, not shown), the cathode is in the form of an annular plate which may be split into two elements for A.C. operation. Gases mentioned as being suitable for use in the apparatus are nitrogen, hydrogen, oxygen, and a mixture of air and oxygen.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3824557A GB903473A (en) | 1957-12-09 | 1957-12-09 | Improvements in or relating to ionic bombardment cleaning apparatus |
| DEE16839A DE1159571B (en) | 1957-12-09 | 1958-12-08 | Device for cleaning surfaces working in a vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3824557A GB903473A (en) | 1957-12-09 | 1957-12-09 | Improvements in or relating to ionic bombardment cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB903473A true GB903473A (en) | 1962-08-15 |
Family
ID=10402215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3824557A Expired GB903473A (en) | 1957-12-09 | 1957-12-09 | Improvements in or relating to ionic bombardment cleaning apparatus |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE1159571B (en) |
| GB (1) | GB903473A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1265345B (en) * | 1963-09-28 | 1968-04-04 | Leybold Hochvakuum Anlagen | Process for reducing the germ count of goods in a vacuum drying chamber and device for carrying out the process |
-
1957
- 1957-12-09 GB GB3824557A patent/GB903473A/en not_active Expired
-
1958
- 1958-12-08 DE DEE16839A patent/DE1159571B/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE1159571B (en) | 1963-12-19 |
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