GB895879A - Improvements in and relating to the oxidation and/or transparency of thin partly oxidic layers - Google Patents

Improvements in and relating to the oxidation and/or transparency of thin partly oxidic layers

Info

Publication number
GB895879A
GB895879A GB31384/59A GB3138459A GB895879A GB 895879 A GB895879 A GB 895879A GB 31384/59 A GB31384/59 A GB 31384/59A GB 3138459 A GB3138459 A GB 3138459A GB 895879 A GB895879 A GB 895879A
Authority
GB
United Kingdom
Prior art keywords
transparency
oxidation
layer
relating
rare earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31384/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Geraetebau-Anstalt
Original Assignee
Geraetebau-Anstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Geraetebau-Anstalt filed Critical Geraetebau-Anstalt
Publication of GB895879A publication Critical patent/GB895879A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A method of improving the oxidation and/or transparency of a thin, partly oxidic, layer on a carrier comprises adding a rare earth element or compound to the layer by cathode sputtering or decomposition from the vapour phase in vacuo. The rare earth may be mixed with the layer forming material, e.g. titanium, tin or silicon, before vaporization or the materials may be vaporized separately but simultaneously. The oxygen necessary for oxidising the film may be present as free oxygen under low partial pressure, in the form of water vapour desorbed from the walls of the vessel under reduced pressure, or may be obtained from air entering the vessel when the coating operation is complete. Specification 851,880 is referred to.
GB31384/59A 1958-10-30 1959-09-15 Improvements in and relating to the oxidation and/or transparency of thin partly oxidic layers Expired GB895879A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH895879X 1958-10-30

Publications (1)

Publication Number Publication Date
GB895879A true GB895879A (en) 1962-05-09

Family

ID=4546209

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31384/59A Expired GB895879A (en) 1958-10-30 1959-09-15 Improvements in and relating to the oxidation and/or transparency of thin partly oxidic layers

Country Status (1)

Country Link
GB (1) GB895879A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418229A (en) * 1965-06-30 1968-12-24 Weston Instruments Inc Method of forming films of compounds having at least two anions by cathode sputtering
US3420763A (en) * 1966-05-06 1969-01-07 Bell Telephone Labor Inc Cathodic sputtering of films of stoichiometric zinc oxide
US3438885A (en) * 1967-08-02 1969-04-15 Northern Electric Co Method of making ferrimagnetic films by cathodic sputtering
US4096026A (en) * 1976-07-27 1978-06-20 Toppan Printing Co., Ltd. Method of manufacturing a chromium oxide film
WO1999029435A2 (en) * 1997-12-04 1999-06-17 Roche Diagnostics Gmbh Modification of surfaces in order to increase surface tension

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418229A (en) * 1965-06-30 1968-12-24 Weston Instruments Inc Method of forming films of compounds having at least two anions by cathode sputtering
US3420763A (en) * 1966-05-06 1969-01-07 Bell Telephone Labor Inc Cathodic sputtering of films of stoichiometric zinc oxide
US3438885A (en) * 1967-08-02 1969-04-15 Northern Electric Co Method of making ferrimagnetic films by cathodic sputtering
US4096026A (en) * 1976-07-27 1978-06-20 Toppan Printing Co., Ltd. Method of manufacturing a chromium oxide film
WO1999029435A2 (en) * 1997-12-04 1999-06-17 Roche Diagnostics Gmbh Modification of surfaces in order to increase surface tension
WO1999029435A3 (en) * 1997-12-04 1999-07-22 Roche Diagnostics Gmbh Modification of surfaces in order to increase surface tension
US7025836B1 (en) 1997-12-04 2006-04-11 Roche Diagnostics Gmbh Modification of surfaces in order to increase the surface tension
US8211245B2 (en) 1997-12-04 2012-07-03 Roche Diagnostics Operations, Inc. Modification of surfaces to increase the surface tension
US8580049B2 (en) 1997-12-04 2013-11-12 Roche Diagnostics Gmbh Modification of surfaces to increase the surface tension

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