GB966161A - Improvements in or relating to coating objects with a metal oxide layer - Google Patents
Improvements in or relating to coating objects with a metal oxide layerInfo
- Publication number
- GB966161A GB966161A GB2896362A GB2896362A GB966161A GB 966161 A GB966161 A GB 966161A GB 2896362 A GB2896362 A GB 2896362A GB 2896362 A GB2896362 A GB 2896362A GB 966161 A GB966161 A GB 966161A
- Authority
- GB
- United Kingdom
- Prior art keywords
- metal oxide
- substrate
- relating
- oxide layer
- tio2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
In a vapour deposition process of coating a substrate with a metal oxide such as TiO2, the metal such as Ti is melted in a graphite container in a stream of oxygen at a pressure of less than 10-2 mm. Hg. and the TiO2 formed is deposited on the substrate. As shown in the drawing a graphite container 6 heated via electrodes 5 and 8, and a substrate 13 supported <PICT:0966161/C6-C7/1> by arm 11 are located in vacuum chamber 2. Ti metal 7 is melted in the crucible 6 at a pressure of 10-5 mm. Hg. of oxygen which is introduced at 4. A layer of TiO2 of 0.1m thickness is formed on the substrate.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL267797 | 1961-08-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB966161A true GB966161A (en) | 1964-08-06 |
Family
ID=19753205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2896362A Expired GB966161A (en) | 1961-08-01 | 1962-07-27 | Improvements in or relating to coating objects with a metal oxide layer |
Country Status (5)
Country | Link |
---|---|
BE (1) | BE620842A (en) |
CH (1) | CH403437A (en) |
DE (1) | DE1253551B (en) |
GB (1) | GB966161A (en) |
NL (1) | NL267797A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096026A (en) * | 1976-07-27 | 1978-06-20 | Toppan Printing Co., Ltd. | Method of manufacturing a chromium oxide film |
US4395440A (en) * | 1980-10-09 | 1983-07-26 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for manufacturing ultrafine particle film |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL211422A (en) * | 1955-11-08 |
-
0
- BE BE620842D patent/BE620842A/xx unknown
- NL NL267797D patent/NL267797A/xx unknown
-
1962
- 1962-07-27 GB GB2896362A patent/GB966161A/en not_active Expired
- 1962-07-28 DE DE1962N0021907 patent/DE1253551B/en active Pending
- 1962-07-30 CH CH910262A patent/CH403437A/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096026A (en) * | 1976-07-27 | 1978-06-20 | Toppan Printing Co., Ltd. | Method of manufacturing a chromium oxide film |
US4395440A (en) * | 1980-10-09 | 1983-07-26 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for manufacturing ultrafine particle film |
Also Published As
Publication number | Publication date |
---|---|
CH403437A (en) | 1965-11-30 |
BE620842A (en) | |
NL267797A (en) | |
DE1253551B (en) | 1967-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US2920002A (en) | Process for the manufacture of thin films | |
GB1408193A (en) | Coated cemented carbide articles | |
ES391377A1 (en) | Metal oxide films | |
US3034924A (en) | Use of a rare earth metal in vaporizing metals and metal oxides | |
GB970635A (en) | Apparatus for growing whiskers | |
GB1031963A (en) | Improved method and apparatus for producing vapors | |
GB1117009A (en) | Improvements in and relating to depositing thin layers by vapour deposition or cathode sputtering | |
GB982324A (en) | Thin film superconductor devices | |
KR880011364A (en) | Sputtered films of bismuth / tin oxides and articles comprising such films | |
GB966161A (en) | Improvements in or relating to coating objects with a metal oxide layer | |
GB1115911A (en) | Method for depositing thin metal coatings | |
GB853852A (en) | Improvements in or relating to methods of manufacturing electrically conductive films | |
GB1073069A (en) | Process for producing a superconductor | |
GB1328298A (en) | Production of a highly refractive oxide layer permeable to lihgt | |
GB1349833A (en) | Production of thin films of tantalum | |
GB732891A (en) | Improvements in and relating to the production of thin layers of chemical compounds on surfaces | |
GB1442109A (en) | Thin layers of high melting point materials | |
USRE26857E (en) | Process for manufacture of thin films | |
ES335297A1 (en) | Process for obtaining thin layers of a product by evaporation in vacuo | |
GB1083522A (en) | Boron nitride thin film device and process for making same | |
GB856930A (en) | Improvements in or relating to information storage devices | |
GB787183A (en) | Improvements in or relating to electric roll-type capacitors | |
GB1344972A (en) | Vacuum deposition of chromium | |
GB1398976A (en) | Methods of forming evaporated layers | |
GB1285395A (en) | Improvements in or relating to vapour coating |