GB8620346D0 - Chemical vapour deposition of films - Google Patents
Chemical vapour deposition of filmsInfo
- Publication number
- GB8620346D0 GB8620346D0 GB868620346A GB8620346A GB8620346D0 GB 8620346 D0 GB8620346 D0 GB 8620346D0 GB 868620346 A GB868620346 A GB 868620346A GB 8620346 A GB8620346 A GB 8620346A GB 8620346 D0 GB8620346 D0 GB 8620346D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- films
- vapour deposition
- chemical vapour
- chemical
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB868620346A GB8620346D0 (en) | 1986-08-21 | 1986-08-21 | Chemical vapour deposition of films |
GB8719391A GB2194556B (en) | 1986-08-21 | 1987-08-17 | Chemical vapour deposition of films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB868620346A GB8620346D0 (en) | 1986-08-21 | 1986-08-21 | Chemical vapour deposition of films |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8620346D0 true GB8620346D0 (en) | 1986-10-01 |
Family
ID=10603037
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB868620346A Pending GB8620346D0 (en) | 1986-08-21 | 1986-08-21 | Chemical vapour deposition of films |
GB8719391A Expired - Lifetime GB2194556B (en) | 1986-08-21 | 1987-08-17 | Chemical vapour deposition of films |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8719391A Expired - Lifetime GB2194556B (en) | 1986-08-21 | 1987-08-17 | Chemical vapour deposition of films |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB8620346D0 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4844945A (en) * | 1988-05-18 | 1989-07-04 | Hewlett-Packard Company | Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (PECVD) |
IT1227877B (en) * | 1988-11-25 | 1991-05-14 | Eniricerche S P A Agip S P A | PROCEDURE FOR PLASMA DEPOSITION OF MULTIPLE LAYERS SIZED AMORPHOUS VARIABLE COMPOSITION |
DE3841731C1 (en) * | 1988-12-10 | 1990-04-12 | Krupp Widia Gmbh, 4300 Essen, De | Process for coating a tool base, and tool produced by this process |
US5223337A (en) * | 1988-12-10 | 1993-06-29 | Fried. Krupp Gmbh | Tool produced by a plasma-activated CVD process |
GB2306510B (en) * | 1995-11-02 | 1999-06-23 | Univ Surrey | Modification of metal surfaces |
GB2312439A (en) * | 1996-04-24 | 1997-10-29 | Northern Telecom Ltd | Plasma enhanced chemical vapour deposition of a layer |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930130B2 (en) * | 1979-09-20 | 1984-07-25 | 富士通株式会社 | Vapor phase growth method |
-
1986
- 1986-08-21 GB GB868620346A patent/GB8620346D0/en active Pending
-
1987
- 1987-08-17 GB GB8719391A patent/GB2194556B/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2194556B (en) | 1990-08-22 |
GB8719391D0 (en) | 1987-09-23 |
GB2194556A (en) | 1988-03-09 |
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