GB8620346D0 - Chemical vapour deposition of films - Google Patents

Chemical vapour deposition of films

Info

Publication number
GB8620346D0
GB8620346D0 GB868620346A GB8620346A GB8620346D0 GB 8620346 D0 GB8620346 D0 GB 8620346D0 GB 868620346 A GB868620346 A GB 868620346A GB 8620346 A GB8620346 A GB 8620346A GB 8620346 D0 GB8620346 D0 GB 8620346D0
Authority
GB
United Kingdom
Prior art keywords
films
vapour deposition
chemical vapour
chemical
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB868620346A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPECIAL RESEARCH SYSTEMS Ltd
Original Assignee
SPECIAL RESEARCH SYSTEMS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPECIAL RESEARCH SYSTEMS Ltd filed Critical SPECIAL RESEARCH SYSTEMS Ltd
Priority to GB868620346A priority Critical patent/GB8620346D0/en
Publication of GB8620346D0 publication Critical patent/GB8620346D0/en
Priority to GB8719391A priority patent/GB2194556B/en
Pending legal-status Critical Current

Links

GB868620346A 1986-08-21 1986-08-21 Chemical vapour deposition of films Pending GB8620346D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB868620346A GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films
GB8719391A GB2194556B (en) 1986-08-21 1987-08-17 Chemical vapour deposition of films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868620346A GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films

Publications (1)

Publication Number Publication Date
GB8620346D0 true GB8620346D0 (en) 1986-10-01

Family

ID=10603037

Family Applications (2)

Application Number Title Priority Date Filing Date
GB868620346A Pending GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films
GB8719391A Expired - Lifetime GB2194556B (en) 1986-08-21 1987-08-17 Chemical vapour deposition of films

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB8719391A Expired - Lifetime GB2194556B (en) 1986-08-21 1987-08-17 Chemical vapour deposition of films

Country Status (1)

Country Link
GB (2) GB8620346D0 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4844945A (en) * 1988-05-18 1989-07-04 Hewlett-Packard Company Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (PECVD)
IT1227877B (en) * 1988-11-25 1991-05-14 Eniricerche S P A Agip S P A PROCEDURE FOR PLASMA DEPOSITION OF MULTIPLE LAYERS SIZED AMORPHOUS VARIABLE COMPOSITION
DE3841731C1 (en) * 1988-12-10 1990-04-12 Krupp Widia Gmbh, 4300 Essen, De Process for coating a tool base, and tool produced by this process
US5223337A (en) * 1988-12-10 1993-06-29 Fried. Krupp Gmbh Tool produced by a plasma-activated CVD process
GB2306510B (en) * 1995-11-02 1999-06-23 Univ Surrey Modification of metal surfaces
GB2312439A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Plasma enhanced chemical vapour deposition of a layer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930130B2 (en) * 1979-09-20 1984-07-25 富士通株式会社 Vapor phase growth method

Also Published As

Publication number Publication date
GB2194556B (en) 1990-08-22
GB8719391D0 (en) 1987-09-23
GB2194556A (en) 1988-03-09

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