GB832570A - Improvements in or relating to the purification of silane used in production of silicon - Google Patents
Improvements in or relating to the purification of silane used in production of siliconInfo
- Publication number
- GB832570A GB832570A GB2891557A GB2891557A GB832570A GB 832570 A GB832570 A GB 832570A GB 2891557 A GB2891557 A GB 2891557A GB 2891557 A GB2891557 A GB 2891557A GB 832570 A GB832570 A GB 832570A
- Authority
- GB
- United Kingdom
- Prior art keywords
- silane
- silicon
- purification
- relating
- passed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title abstract 4
- 229910000077 silane Inorganic materials 0.000 title abstract 4
- 229910052710 silicon Inorganic materials 0.000 title abstract 2
- 239000010703 silicon Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000746 purification Methods 0.000 title 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 abstract 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 abstract 1
- 150000001639 boron compounds Chemical class 0.000 abstract 1
- 239000003610 charcoal Substances 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 230000007062 hydrolysis Effects 0.000 abstract 1
- 238000006460 hydrolysis reaction Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/043—Monosilane
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Treating Waste Gases (AREA)
- Silicon Compounds (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2891557A GB832570A (en) | 1957-09-13 | 1957-09-13 | Improvements in or relating to the purification of silane used in production of silicon |
| FR1182797D FR1182797A (fr) | 1957-09-13 | 1957-09-16 | Production du silane à partir de l'hydrure de calcium et d'aluminium ou de l'hydrure de magnésium et d'aluminium |
| CH6362058A CH380706A (de) | 1957-09-13 | 1958-09-05 | Verfahren zum Reinigen von gasförmigen Siliziumverbindungen |
| DE1958I0015377 DE1075574B (de) | 1957-09-13 | 1958-09-09 | Verfahren zum Reinigen von Silan |
| FR774092A FR74159E (fr) | 1957-09-13 | 1958-09-09 | Production du silane à partir de l'hydrure de calcium et d'aluminium ou de l'hydrure de magnésium et d'aluminium |
| BE571148D BE571148A (forum.php) | 1957-09-13 | 1958-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2891557A GB832570A (en) | 1957-09-13 | 1957-09-13 | Improvements in or relating to the purification of silane used in production of silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB832570A true GB832570A (en) | 1960-04-13 |
Family
ID=10283247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2891557A Expired GB832570A (en) | 1957-09-13 | 1957-09-13 | Improvements in or relating to the purification of silane used in production of silicon |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE571148A (forum.php) |
| CH (1) | CH380706A (forum.php) |
| DE (1) | DE1075574B (forum.php) |
| FR (2) | FR1182797A (forum.php) |
| GB (1) | GB832570A (forum.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3050366A (en) * | 1959-07-15 | 1962-08-21 | Du Pont | Production of silane by the use of a zinc catalyst |
| CN110950382B (zh) * | 2018-09-26 | 2022-03-15 | 紫石能源有限公司 | 砷烷的制备方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1028543B (de) | 1954-12-17 | 1958-04-24 | Siemens Ag | Verfahren zum Reinigen von mit Wasser Gel bildenden Halogeniden, insbesondere des Germaniums oder Siliciums, vorzugsweise fuer die Herstellung von Halbleiterstoffen |
-
1957
- 1957-09-13 GB GB2891557A patent/GB832570A/en not_active Expired
- 1957-09-16 FR FR1182797D patent/FR1182797A/fr not_active Expired
-
1958
- 1958-09-05 CH CH6362058A patent/CH380706A/de unknown
- 1958-09-09 DE DE1958I0015377 patent/DE1075574B/de active Pending
- 1958-09-09 FR FR774092A patent/FR74159E/fr not_active Expired
- 1958-09-12 BE BE571148D patent/BE571148A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1075574B (de) | 1960-02-18 |
| CH380706A (de) | 1964-08-15 |
| FR74159E (fr) | 1960-11-07 |
| FR1182797A (fr) | 1959-06-29 |
| BE571148A (forum.php) | 1959-03-12 |
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