GB793635A - Improvements in methods of manufacturing thin films - Google Patents

Improvements in methods of manufacturing thin films

Info

Publication number
GB793635A
GB793635A GB1958055A GB1958055A GB793635A GB 793635 A GB793635 A GB 793635A GB 1958055 A GB1958055 A GB 1958055A GB 1958055 A GB1958055 A GB 1958055A GB 793635 A GB793635 A GB 793635A
Authority
GB
United Kingdom
Prior art keywords
pole
piece
gun
evaporate
follow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1958055A
Other languages
English (en)
Inventor
Kurt Josef Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
English Electric Valve Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DENDAT1072451D priority Critical patent/DE1072451B/de
Priority to NL99895D priority patent/NL99895C/xx
Priority to NL208669D priority patent/NL208669A/xx
Application filed by English Electric Valve Co Ltd filed Critical English Electric Valve Co Ltd
Priority to GB1958055A priority patent/GB793635A/en
Priority to ES0229528A priority patent/ES229528A1/es
Priority to FR1154386D priority patent/FR1154386A/fr
Publication of GB793635A publication Critical patent/GB793635A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
GB1958055A 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films Expired GB793635A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DENDAT1072451D DE1072451B (de) 1955-07-06 Vorrichtung zur Herstellung von Überzügen durch Vakuumaufdampfen
NL99895D NL99895C (enrdf_load_stackoverflow) 1955-07-06
NL208669D NL208669A (enrdf_load_stackoverflow) 1955-07-06
GB1958055A GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films
ES0229528A ES229528A1 (es) 1955-07-06 1956-06-28 UN PROCEDIMIENTO Y APARATO PARA LA FABRICACIoN DE PELiCULAS DELGADAS
FR1154386D FR1154386A (fr) 1955-07-06 1956-07-05 Procédé de fabrication de pellicules minces de matériaux réfractaires diélectriques et appareil pour la mise en oeuvre de ce procédé

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1958055A GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films

Publications (1)

Publication Number Publication Date
GB793635A true GB793635A (en) 1958-04-23

Family

ID=10131749

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1958055A Expired GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films

Country Status (5)

Country Link
DE (1) DE1072451B (enrdf_load_stackoverflow)
ES (1) ES229528A1 (enrdf_load_stackoverflow)
FR (1) FR1154386A (enrdf_load_stackoverflow)
GB (1) GB793635A (enrdf_load_stackoverflow)
NL (2) NL99895C (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504116A1 (fr) * 1981-04-15 1982-10-22 Commissariat Energie Atomique Procede d'obtention de couches de verres luminescents, application a la realisation de dispositifs munis de ces couches et a la realisation de photoscintillateurs.
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1204048B (de) * 1961-03-11 1965-10-28 Heraeus Gmbh W C Verfahren zum Aufbringen von kratzfesten, transparenten oxydischen Schutzschichten auf optischen Gegenstaenden, z. B. Brillenglaesern, aus thermoplastischen Kunststoffen, insbesondere Acrylharzen, durch Vakuumaufdampfen
DE1266608B (de) * 1962-03-23 1968-04-18 Siemens Ag Verfahren zum Vakuumaufdampfen von Isolierstoffschichten mittels gebuendelter Elektronenstrahlen
NL291466A (enrdf_load_stackoverflow) * 1962-04-13
DE1199097B (de) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504116A1 (fr) * 1981-04-15 1982-10-22 Commissariat Energie Atomique Procede d'obtention de couches de verres luminescents, application a la realisation de dispositifs munis de ces couches et a la realisation de photoscintillateurs.
US4447305A (en) * 1981-04-15 1984-05-08 Commissariat A L'energie Atomique Process for obtaining luminescent glass layers
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film

Also Published As

Publication number Publication date
ES229528A1 (es) 1956-11-01
NL208669A (enrdf_load_stackoverflow)
DE1072451B (de) 1960-06-02
NL99895C (enrdf_load_stackoverflow)
FR1154386A (fr) 1958-04-08

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