ES229528A1 - UN PROCEDIMIENTO Y APARATO PARA LA FABRICACIoN DE PELiCULAS DELGADAS - Google Patents

UN PROCEDIMIENTO Y APARATO PARA LA FABRICACIoN DE PELiCULAS DELGADAS

Info

Publication number
ES229528A1
ES229528A1 ES0229528A ES229528A ES229528A1 ES 229528 A1 ES229528 A1 ES 229528A1 ES 0229528 A ES0229528 A ES 0229528A ES 229528 A ES229528 A ES 229528A ES 229528 A1 ES229528 A1 ES 229528A1
Authority
ES
Spain
Prior art keywords
thin films
methods
manufacturing thin
vacuum
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES0229528A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
English Electric Valve Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by English Electric Valve Co Ltd filed Critical English Electric Valve Co Ltd
Publication of ES229528A1 publication Critical patent/ES229528A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Procedimiento para la fabricación de películas delgadas, caracterizado por comprender las etapas de bombardear una muestra del material de partida, en vacío, con un intenso haz electrónico, para evaporar material de la muestra y de condensar el evaporado, en forma de película delgada, sobre un soporte o apoyo colocado en el vacío.
ES0229528A 1955-07-06 1956-06-28 UN PROCEDIMIENTO Y APARATO PARA LA FABRICACIoN DE PELiCULAS DELGADAS Expired ES229528A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1958055A GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films

Publications (1)

Publication Number Publication Date
ES229528A1 true ES229528A1 (es) 1956-11-01

Family

ID=10131749

Family Applications (1)

Application Number Title Priority Date Filing Date
ES0229528A Expired ES229528A1 (es) 1955-07-06 1956-06-28 UN PROCEDIMIENTO Y APARATO PARA LA FABRICACIoN DE PELiCULAS DELGADAS

Country Status (5)

Country Link
DE (1) DE1072451B (es)
ES (1) ES229528A1 (es)
FR (1) FR1154386A (es)
GB (1) GB793635A (es)
NL (2) NL99895C (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1204048B (de) * 1961-03-11 1965-10-28 Heraeus Gmbh W C Verfahren zum Aufbringen von kratzfesten, transparenten oxydischen Schutzschichten auf optischen Gegenstaenden, z. B. Brillenglaesern, aus thermoplastischen Kunststoffen, insbesondere Acrylharzen, durch Vakuumaufdampfen
DE1266608B (de) * 1962-03-23 1968-04-18 Siemens Ag Verfahren zum Vakuumaufdampfen von Isolierstoffschichten mittels gebuendelter Elektronenstrahlen
NL291466A (es) * 1962-04-13
DE1199097B (de) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen
FR2504116A1 (fr) * 1981-04-15 1982-10-22 Commissariat Energie Atomique Procede d'obtention de couches de verres luminescents, application a la realisation de dispositifs munis de ces couches et a la realisation de photoscintillateurs.
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film

Also Published As

Publication number Publication date
DE1072451B (de) 1960-06-02
FR1154386A (fr) 1958-04-08
NL99895C (es)
NL208669A (es)
GB793635A (en) 1958-04-23

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