GB2436600A - Air bearing arrangement - Google Patents

Air bearing arrangement Download PDF

Info

Publication number
GB2436600A
GB2436600A GB0702861A GB0702861A GB2436600A GB 2436600 A GB2436600 A GB 2436600A GB 0702861 A GB0702861 A GB 0702861A GB 0702861 A GB0702861 A GB 0702861A GB 2436600 A GB2436600 A GB 2436600A
Authority
GB
United Kingdom
Prior art keywords
rotor shaft
bearing
gap
piezo
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0702861A
Other languages
English (en)
Other versions
GB0702861D0 (en
Inventor
Toshiyuki Iwata
Shinji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Via Mechanics Ltd
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of GB0702861D0 publication Critical patent/GB0702861D0/en
Publication of GB2436600A publication Critical patent/GB2436600A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Support Of The Bearing (AREA)
GB0702861A 2006-03-29 2007-02-14 Air bearing arrangement Withdrawn GB2436600A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006092478A JP2007263327A (ja) 2006-03-29 2006-03-29 エアーベアリング機構

Publications (2)

Publication Number Publication Date
GB0702861D0 GB0702861D0 (en) 2007-03-28
GB2436600A true GB2436600A (en) 2007-10-03

Family

ID=37908621

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0702861A Withdrawn GB2436600A (en) 2006-03-29 2007-02-14 Air bearing arrangement

Country Status (2)

Country Link
JP (1) JP2007263327A (ja)
GB (1) GB2436600A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9920790B2 (en) * 2014-03-18 2018-03-20 Huazhong University Of Science And Technology Active airbearing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009255239A (ja) * 2008-04-18 2009-11-05 Disco Abrasive Syst Ltd 回転工具を装着するスピンドルユニット機構

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0696516A (ja) * 1992-09-11 1994-04-08 Toshiba Corp スピンドルモータ
JPH06235422A (ja) * 1993-02-08 1994-08-23 Hitachi Zosen Corp 回転軸振れ補正制御装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07293553A (ja) * 1994-04-21 1995-11-07 Ebara Corp 傾斜パッド軸受
JPH0885005A (ja) * 1994-09-15 1996-04-02 Teijin Seiki Co Ltd 可変型空気軸受装置
JP3604900B2 (ja) * 1998-04-17 2004-12-22 Ｎｔｎ株式会社 静圧磁気複合軸受およびスピンドル装置
JP2000263377A (ja) * 1999-03-17 2000-09-26 Ntn Corp 金型加工装置
JP3996759B2 (ja) * 2001-11-13 2007-10-24 京セラ株式会社 真空対応型静圧気体軸受
JP2005180600A (ja) * 2003-12-19 2005-07-07 Daikin Ind Ltd ジャーナル軸受

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0696516A (ja) * 1992-09-11 1994-04-08 Toshiba Corp スピンドルモータ
JPH06235422A (ja) * 1993-02-08 1994-08-23 Hitachi Zosen Corp 回転軸振れ補正制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9920790B2 (en) * 2014-03-18 2018-03-20 Huazhong University Of Science And Technology Active airbearing device

Also Published As

Publication number Publication date
JP2007263327A (ja) 2007-10-11
GB0702861D0 (en) 2007-03-28

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)