GB2368973A - Integrated circuit with conductive region at periphery of substrate and bond pads for measuring to detect failure - Google Patents

Integrated circuit with conductive region at periphery of substrate and bond pads for measuring to detect failure Download PDF

Info

Publication number
GB2368973A
GB2368973A GB0115078A GB0115078A GB2368973A GB 2368973 A GB2368973 A GB 2368973A GB 0115078 A GB0115078 A GB 0115078A GB 0115078 A GB0115078 A GB 0115078A GB 2368973 A GB2368973 A GB 2368973A
Authority
GB
United Kingdom
Prior art keywords
conductive
integrated circuit
bond pads
substrate
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0115078A
Other languages
English (en)
Other versions
GB0115078D0 (en
Inventor
Vivian Wanda Ryan
Thomas Herbert Shilling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Original Assignee
Agere Systems Guardian Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agere Systems Guardian Corp filed Critical Agere Systems Guardian Corp
Publication of GB0115078D0 publication Critical patent/GB0115078D0/en
Publication of GB2368973A publication Critical patent/GB2368973A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2884Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB0115078A 2000-06-27 2001-06-20 Integrated circuit with conductive region at periphery of substrate and bond pads for measuring to detect failure Withdrawn GB2368973A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/604,519 US6833557B1 (en) 2000-06-27 2000-06-27 Integrated circuit and a method of manufacturing an integrated circuit

Publications (2)

Publication Number Publication Date
GB0115078D0 GB0115078D0 (en) 2001-08-15
GB2368973A true GB2368973A (en) 2002-05-15

Family

ID=24419923

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0115078A Withdrawn GB2368973A (en) 2000-06-27 2001-06-20 Integrated circuit with conductive region at periphery of substrate and bond pads for measuring to detect failure

Country Status (5)

Country Link
US (1) US6833557B1 (enExample)
JP (1) JP3944764B2 (enExample)
KR (1) KR100823043B1 (enExample)
GB (1) GB2368973A (enExample)
TW (1) TW512511B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10254756A1 (de) * 2002-11-23 2004-06-09 Infineon Technologies Ag Vorrichtung und Verfahren zur Erfassung von Stressmigrations-Eigenschaften
US7888672B2 (en) 2002-11-23 2011-02-15 Infineon Technologies Ag Device for detecting stress migration properties

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4949733B2 (ja) * 2006-05-11 2012-06-13 ルネサスエレクトロニクス株式会社 半導体装置
KR100764660B1 (ko) * 2006-11-01 2007-10-08 삼성전기주식회사 주파수 종속 특성을 가지는 다중 배선의 신호 천이시뮬레이션 방법
DE102014222203B3 (de) 2014-10-30 2016-03-10 Infineon Technologies Ag Überprüfung von Randschäden
US20190250208A1 (en) * 2018-02-09 2019-08-15 Qualcomm Incorporated Apparatus and method for detecting damage to an integrated circuit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387736A (ja) * 1986-09-30 1988-04-19 Nec Corp 半導体装置
JPH02151048A (ja) * 1988-12-01 1990-06-11 Nec Corp 半導体集積回路
JPH04199651A (ja) * 1990-11-29 1992-07-20 Fujitsu Ltd 半導体装置およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177221A (ja) * 1992-12-07 1994-06-24 Fujitsu Ltd 信頼性評価用半導体装置及び信頼性評価用の評価パターンを内蔵した製品lsi、ウエハー
JP3269171B2 (ja) * 1993-04-08 2002-03-25 セイコーエプソン株式会社 半導体装置およびそれを有した時計
JPH07201855A (ja) * 1993-12-28 1995-08-04 Fujitsu Ltd 半導体装置
JP3270807B2 (ja) * 1995-06-29 2002-04-02 シャープ株式会社 テープキャリアパッケージ
KR100190927B1 (ko) * 1996-07-18 1999-06-01 윤종용 슬릿이 형성된 금속막을 구비한 반도체 칩 장치
JP3111938B2 (ja) * 1997-09-16 2000-11-27 日本電気株式会社 半導体装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387736A (ja) * 1986-09-30 1988-04-19 Nec Corp 半導体装置
JPH02151048A (ja) * 1988-12-01 1990-06-11 Nec Corp 半導体集積回路
JPH04199651A (ja) * 1990-11-29 1992-07-20 Fujitsu Ltd 半導体装置およびその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10254756A1 (de) * 2002-11-23 2004-06-09 Infineon Technologies Ag Vorrichtung und Verfahren zur Erfassung von Stressmigrations-Eigenschaften
WO2004048985A1 (de) * 2002-11-23 2004-06-10 Infineon Technologies Ag Vorrichtung und verfahren zur erfassung von stressmigrations-eigenschaften
CN100554988C (zh) * 2002-11-23 2009-10-28 因芬尼昂技术股份公司 检测应力迁移性质的装置及方法
US7888672B2 (en) 2002-11-23 2011-02-15 Infineon Technologies Ag Device for detecting stress migration properties
DE10254756B4 (de) * 2002-11-23 2011-07-07 Infineon Technologies AG, 81669 Vorrichtung und Verfahren zur Erfassung von Stressmigrations-Eigenschaften
US8323991B2 (en) 2002-11-23 2012-12-04 Infineon Technologies Ag Method for detecting stress migration properties

Also Published As

Publication number Publication date
KR20020001632A (ko) 2002-01-09
US6833557B1 (en) 2004-12-21
JP2002093918A (ja) 2002-03-29
GB0115078D0 (en) 2001-08-15
KR100823043B1 (ko) 2008-04-17
JP3944764B2 (ja) 2007-07-18
TW512511B (en) 2002-12-01

Similar Documents

Publication Publication Date Title
JP5011459B2 (ja) 集積回路の試験方法
US6747445B2 (en) Stress migration test structure and method therefor
US8323990B2 (en) Reliability test structure for multilevel interconnect
US9443776B2 (en) Method and structure for determining thermal cycle reliability
US8550707B2 (en) Device for detecting temperature variations in a chip
US6066561A (en) Apparatus and method for electrical determination of delamination at one or more interfaces within a semiconductor wafer
US6897475B2 (en) Test structure and related methods for evaluating stress-induced voiding
US6683465B2 (en) Integrated circuit having stress migration test structure and method therefor
US8648592B2 (en) Semiconductor device components and methods
US6833557B1 (en) Integrated circuit and a method of manufacturing an integrated circuit
US20050211980A1 (en) Device and method for detecting stress migration properties
KR20170086382A (ko) 켈빈 저항 테스트 구조 및 그 제조 방법
US6218726B1 (en) Built-in stress pattern on IC dies and method of forming
US6989282B2 (en) Control of liner thickness for improving thermal cycle reliability
CN113471173B (zh) 测试结构及测试方法
JP2007173610A (ja) 膜特性測定方法および膜特性測定用試料
US20040175923A1 (en) Semiconductor device and fabrication thereof
Fiori et al. Thermo‐Mechanical Modeling of Process Induced Stress: Layout Effect on Stress Voiding Phenomena
JP2000243800A (ja) 配線のエレクトロマイグレーション耐性評価方法

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)