GB2338176A - Cleaning device - Google Patents
Cleaning device Download PDFInfo
- Publication number
- GB2338176A GB2338176A GB9918867A GB9918867A GB2338176A GB 2338176 A GB2338176 A GB 2338176A GB 9918867 A GB9918867 A GB 9918867A GB 9918867 A GB9918867 A GB 9918867A GB 2338176 A GB2338176 A GB 2338176A
- Authority
- GB
- United Kingdom
- Prior art keywords
- brush
- main unit
- recessed section
- section
- cleaning apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 24
- 239000007795 chemical reaction product Substances 0.000 abstract description 16
- 239000012530 fluid Substances 0.000 abstract description 14
- 238000010276 construction Methods 0.000 abstract 1
- 238000005498 polishing Methods 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 16
- 239000004744 fabric Substances 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 14
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A46—BRUSHWARE
- A46B—BRUSHES
- A46B17/00—Accessories for brushes
- A46B17/06—Devices for cleaning brushes after use
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
- B08B1/52—Cleaning by methods involving the use of tools involving cleaning of the cleaning members using fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5931298A JPH11254293A (ja) | 1998-03-11 | 1998-03-11 | 洗浄装置 |
PCT/JP1999/001070 WO1999046063A1 (fr) | 1998-03-11 | 1999-03-05 | Appareil de nettoyage |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9918867D0 GB9918867D0 (en) | 1999-10-13 |
GB2338176A true GB2338176A (en) | 1999-12-15 |
Family
ID=13109734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9918867A Withdrawn GB2338176A (en) | 1998-03-11 | 1999-03-05 | Cleaning device |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1029600A1 (ja) |
JP (1) | JPH11254293A (ja) |
DE (1) | DE19980139T1 (ja) |
GB (1) | GB2338176A (ja) |
WO (1) | WO1999046063A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274123A (ja) * | 2000-03-27 | 2001-10-05 | Matsushita Electric Ind Co Ltd | 基板研磨装置及び基板研磨方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2622069B2 (ja) * | 1993-06-30 | 1997-06-18 | 三菱マテリアル株式会社 | 研磨布のドレッシング装置 |
-
1998
- 1998-03-11 JP JP5931298A patent/JPH11254293A/ja not_active Withdrawn
-
1999
- 1999-03-05 DE DE19980139T patent/DE19980139T1/de not_active Ceased
- 1999-03-05 GB GB9918867A patent/GB2338176A/en not_active Withdrawn
- 1999-03-05 WO PCT/JP1999/001070 patent/WO1999046063A1/ja not_active Application Discontinuation
- 1999-03-05 EP EP99939173A patent/EP1029600A1/en not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2622069B2 (ja) * | 1993-06-30 | 1997-06-18 | 三菱マテリアル株式会社 | 研磨布のドレッシング装置 |
Also Published As
Publication number | Publication date |
---|---|
WO1999046063A1 (fr) | 1999-09-16 |
DE19980139T1 (de) | 2000-03-16 |
EP1029600A1 (en) | 2000-08-23 |
JPH11254293A (ja) | 1999-09-21 |
GB9918867D0 (en) | 1999-10-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |