DE19980139T1 - Reinigungsvorrichtung - Google Patents

Reinigungsvorrichtung

Info

Publication number
DE19980139T1
DE19980139T1 DE19980139T DE19980139T DE19980139T1 DE 19980139 T1 DE19980139 T1 DE 19980139T1 DE 19980139 T DE19980139 T DE 19980139T DE 19980139 T DE19980139 T DE 19980139T DE 19980139 T1 DE19980139 T1 DE 19980139T1
Authority
DE
Germany
Prior art keywords
cleaning device
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19980139T
Other languages
German (de)
English (en)
Inventor
Motoi Nezu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Publication of DE19980139T1 publication Critical patent/DE19980139T1/de
Ceased legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B17/00—Accessories for brushes
    • A46B17/06—Devices for cleaning brushes after use
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B08B1/52—Cleaning by methods involving the use of tools involving cleaning of the cleaning members using fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE19980139T 1998-03-11 1999-03-05 Reinigungsvorrichtung Ceased DE19980139T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5931298A JPH11254293A (ja) 1998-03-11 1998-03-11 洗浄装置
PCT/JP1999/001070 WO1999046063A1 (fr) 1998-03-11 1999-03-05 Appareil de nettoyage

Publications (1)

Publication Number Publication Date
DE19980139T1 true DE19980139T1 (de) 2000-03-16

Family

ID=13109734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19980139T Ceased DE19980139T1 (de) 1998-03-11 1999-03-05 Reinigungsvorrichtung

Country Status (5)

Country Link
EP (1) EP1029600A1 (ja)
JP (1) JPH11254293A (ja)
DE (1) DE19980139T1 (ja)
GB (1) GB2338176A (ja)
WO (1) WO1999046063A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274123A (ja) * 2000-03-27 2001-10-05 Matsushita Electric Ind Co Ltd 基板研磨装置及び基板研磨方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2622069B2 (ja) * 1993-06-30 1997-06-18 三菱マテリアル株式会社 研磨布のドレッシング装置

Also Published As

Publication number Publication date
WO1999046063A1 (fr) 1999-09-16
GB2338176A (en) 1999-12-15
EP1029600A1 (en) 2000-08-23
JPH11254293A (ja) 1999-09-21
GB9918867D0 (en) 1999-10-13

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
8131 Rejection