GB9918867D0 - Early Entry PCT - Google Patents

Early Entry PCT

Info

Publication number
GB9918867D0
GB9918867D0 GBGB9918867.4A GB9918867A GB9918867D0 GB 9918867 D0 GB9918867 D0 GB 9918867D0 GB 9918867 A GB9918867 A GB 9918867A GB 9918867 D0 GB9918867 D0 GB 9918867D0
Authority
GB
United Kingdom
Prior art keywords
early entry
pct
entry pct
early
entry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9918867.4A
Other versions
GB2338176A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Publication of GB9918867D0 publication Critical patent/GB9918867D0/en
Publication of GB2338176A publication Critical patent/GB2338176A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B17/00—Accessories for brushes
    • A46B17/06—Devices for cleaning brushes after use
    • B08B1/52—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
GB9918867A 1998-03-11 1999-03-05 Cleaning device Withdrawn GB2338176A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5931298A JPH11254293A (en) 1998-03-11 1998-03-11 Cleaning device
PCT/JP1999/001070 WO1999046063A1 (en) 1998-03-11 1999-03-05 Cleaning device

Publications (2)

Publication Number Publication Date
GB9918867D0 true GB9918867D0 (en) 1999-10-13
GB2338176A GB2338176A (en) 1999-12-15

Family

ID=13109734

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9918867A Withdrawn GB2338176A (en) 1998-03-11 1999-03-05 Cleaning device

Country Status (5)

Country Link
EP (1) EP1029600A1 (en)
JP (1) JPH11254293A (en)
DE (1) DE19980139T1 (en)
GB (1) GB2338176A (en)
WO (1) WO1999046063A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274123A (en) * 2000-03-27 2001-10-05 Matsushita Electric Ind Co Ltd Substrate polishing apparatus and substrate-polishing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2622069B2 (en) * 1993-06-30 1997-06-18 三菱マテリアル株式会社 Dressing equipment for polishing cloth

Also Published As

Publication number Publication date
JPH11254293A (en) 1999-09-21
WO1999046063A1 (en) 1999-09-16
DE19980139T1 (en) 2000-03-16
EP1029600A1 (en) 2000-08-23
GB2338176A (en) 1999-12-15

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)