GB2194341B - Capacitive acceleration sensors - Google Patents

Capacitive acceleration sensors

Info

Publication number
GB2194341B
GB2194341B GB8716443A GB8716443A GB2194341B GB 2194341 B GB2194341 B GB 2194341B GB 8716443 A GB8716443 A GB 8716443A GB 8716443 A GB8716443 A GB 8716443A GB 2194341 B GB2194341 B GB 2194341B
Authority
GB
United Kingdom
Prior art keywords
acceleration sensors
capacitive acceleration
capacitive
sensors
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8716443A
Other languages
English (en)
Other versions
GB2194341A (en
GB8716443D0 (en
Inventor
R Helmut Seidel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
Messerschmitt Bolkow Blohm AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messerschmitt Bolkow Blohm AG filed Critical Messerschmitt Bolkow Blohm AG
Publication of GB8716443D0 publication Critical patent/GB8716443D0/en
Publication of GB2194341A publication Critical patent/GB2194341A/en
Application granted granted Critical
Publication of GB2194341B publication Critical patent/GB2194341B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
GB8716443A 1986-07-26 1987-07-13 Capacitive acceleration sensors Expired - Lifetime GB2194341B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863625411 DE3625411A1 (de) 1986-07-26 1986-07-26 Kapazitiver beschleunigungssensor

Publications (3)

Publication Number Publication Date
GB8716443D0 GB8716443D0 (en) 1987-08-19
GB2194341A GB2194341A (en) 1988-03-02
GB2194341B true GB2194341B (en) 1990-05-23

Family

ID=6306096

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8716443A Expired - Lifetime GB2194341B (en) 1986-07-26 1987-07-13 Capacitive acceleration sensors

Country Status (4)

Country Link
CH (1) CH673897A5 (enrdf_load_stackoverflow)
DE (1) DE3625411A1 (enrdf_load_stackoverflow)
FR (1) FR2602055B1 (enrdf_load_stackoverflow)
GB (1) GB2194341B (enrdf_load_stackoverflow)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
DE3742385A1 (de) * 1987-12-14 1989-06-22 Siemens Ag Beschleunigungsempfindliches elektronisches bauelement
US4825335A (en) * 1988-03-14 1989-04-25 Endevco Corporation Differential capacitive transducer and method of making
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US4930042A (en) * 1989-02-28 1990-05-29 United Technologies Capacitive accelerometer with separable damping and sensitivity
US4928203A (en) * 1989-02-28 1990-05-22 United Technologies Capacitive accelerometer with hinges on top and bottom surface
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
DD282530A5 (de) * 1989-04-24 1990-09-12 Karl Marx Stadt Tech Hochschul Kapazitiver mikromechanischer beschleunigungssensor
DE4015464A1 (de) * 1989-06-05 1990-12-06 Motorola Inc Doppelt-integrierende silicium-beschleunigungserfassungseinrichtung
DE3922476A1 (de) * 1989-07-06 1991-01-17 Siemens Ag Kapazitiver beschleunigungssensor in mikromechanischer ausfuehrung
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
US5115291A (en) * 1989-07-27 1992-05-19 Honeywell Inc. Electrostatic silicon accelerometer
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
US5295386A (en) 1989-12-28 1994-03-22 Kazuhiro Okada Apparatus for detecting acceleration and method for testing this apparatus
DE4016471A1 (de) * 1990-05-22 1991-11-28 Bosch Gmbh Robert Mikromechanischer neigungssensor
US5253526A (en) * 1990-05-30 1993-10-19 Copal Company Limited Capacitive acceleration sensor with free diaphragm
DE4022495A1 (de) 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
DE4102805A1 (de) * 1991-01-31 1992-08-13 Bosch Gmbh Robert Kapazitiver beschleunigungssensor
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
DE4226430C2 (de) * 1992-08-10 1996-02-22 Karlsruhe Forschzent Kapazitiver Beschleunigungssensor
DE4326666C1 (de) * 1993-08-09 1995-02-23 Wild Heerbrugg Ag Kapazitiver Sensor
US5824901A (en) * 1993-08-09 1998-10-20 Leica Geosystems Ag Capacitive sensor for measuring accelerations and inclinations
DE4406342C1 (de) * 1994-02-26 1995-03-09 Kernforschungsz Karlsruhe Sensor und Verfahren zu dessen Herstellung
US6602216B1 (en) * 1998-05-18 2003-08-05 William E. Nordt, III Plantar fascia tension device
RU2246735C1 (ru) * 2003-07-29 2005-02-20 Открытое акционерное общество "Раменское приборостроительное конструкторское бюро" (ОАО "РПКБ") Компенсационный акселерометр
EP2053413B1 (en) * 2006-11-14 2013-05-22 Panasonic Corporation Sensor
WO2010101023A1 (ja) * 2009-03-04 2010-09-10 コニカミノルタホールディングス株式会社 平行移動機構および平行移動機構の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1163209A (en) * 1966-09-09 1969-09-04 Litton Industries Inc Accelerometer
EP0059488A1 (en) * 1978-07-21 1982-09-08 Hitachi, Ltd. Capacitive pressure sensor
GB2102579A (en) * 1981-07-14 1983-02-02 Sundstrand Data Control Force transducer flexure reed bearing electrical connections
GB2156523A (en) * 1984-03-19 1985-10-09 Draper Lab Charles S Planar inertial sensor
GB2158945A (en) * 1984-05-18 1985-11-20 Becton Dickinson Co Capacitive transducer
GB2178856A (en) * 1985-07-25 1987-02-18 Litton Systems Inc Integrated, force balanced accelerometer
GB2186085A (en) * 1986-02-04 1987-08-05 Draper Lab Charles S Vibratory digital integrating accelerometer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3709042A (en) * 1969-05-14 1973-01-09 S Lee Capacitance accelerometer
US4244225A (en) * 1979-06-08 1981-01-13 Itt Industries, Inc. Mechanical resonator arrangements
SE436936B (sv) * 1981-01-29 1985-01-28 Asea Ab Integrerad kapacitiv givare
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1163209A (en) * 1966-09-09 1969-09-04 Litton Industries Inc Accelerometer
EP0059488A1 (en) * 1978-07-21 1982-09-08 Hitachi, Ltd. Capacitive pressure sensor
GB2102579A (en) * 1981-07-14 1983-02-02 Sundstrand Data Control Force transducer flexure reed bearing electrical connections
GB2156523A (en) * 1984-03-19 1985-10-09 Draper Lab Charles S Planar inertial sensor
GB2158945A (en) * 1984-05-18 1985-11-20 Becton Dickinson Co Capacitive transducer
GB2178856A (en) * 1985-07-25 1987-02-18 Litton Systems Inc Integrated, force balanced accelerometer
GB2186085A (en) * 1986-02-04 1987-08-05 Draper Lab Charles S Vibratory digital integrating accelerometer

Also Published As

Publication number Publication date
CH673897A5 (enrdf_load_stackoverflow) 1990-04-12
GB2194341A (en) 1988-03-02
GB8716443D0 (en) 1987-08-19
FR2602055A1 (fr) 1988-01-29
DE3625411C2 (enrdf_load_stackoverflow) 1988-05-11
FR2602055B1 (fr) 1989-12-22
DE3625411A1 (de) 1988-02-04

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20070712