GB2130655B - Rotor assembly for a turbo molecular pump - Google Patents

Rotor assembly for a turbo molecular pump

Info

Publication number
GB2130655B
GB2130655B GB08330794A GB8330794A GB2130655B GB 2130655 B GB2130655 B GB 2130655B GB 08330794 A GB08330794 A GB 08330794A GB 8330794 A GB8330794 A GB 8330794A GB 2130655 B GB2130655 B GB 2130655B
Authority
GB
United Kingdom
Prior art keywords
rotor assembly
molecular pump
turbo molecular
turbo
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08330794A
Other languages
English (en)
Other versions
GB2130655A (en
GB8330794D0 (en
Inventor
Masaharu Miki
Chiaki Urano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments and Electronics Ltd filed Critical Seiko Instruments and Electronics Ltd
Publication of GB8330794D0 publication Critical patent/GB8330794D0/en
Publication of GB2130655A publication Critical patent/GB2130655A/en
Application granted granted Critical
Publication of GB2130655B publication Critical patent/GB2130655B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C25/00—Bearings for exclusively rotary movement adjustable for wear or play
    • F16C25/02—Sliding-contact bearings
    • F16C25/04—Sliding-contact bearings self-adjusting
    • F16C25/045—Sliding-contact bearings self-adjusting with magnetic means to preload the bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0485—Active magnetic bearings for rotary movement with active support of three degrees of freedom
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
GB08330794A 1982-11-19 1983-11-18 Rotor assembly for a turbo molecular pump Expired GB2130655B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57203263A JPH0646036B2 (ja) 1982-11-19 1982-11-19 軸流分子ポンプ

Publications (3)

Publication Number Publication Date
GB8330794D0 GB8330794D0 (en) 1983-12-29
GB2130655A GB2130655A (en) 1984-06-06
GB2130655B true GB2130655B (en) 1987-05-07

Family

ID=16471133

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08330794A Expired GB2130655B (en) 1982-11-19 1983-11-18 Rotor assembly for a turbo molecular pump

Country Status (5)

Country Link
US (1) US4609332A (cg-RX-API-DMAC10.html)
JP (1) JPH0646036B2 (cg-RX-API-DMAC10.html)
DE (1) DE3341716A1 (cg-RX-API-DMAC10.html)
FR (1) FR2536473B1 (cg-RX-API-DMAC10.html)
GB (1) GB2130655B (cg-RX-API-DMAC10.html)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
WO1987000360A1 (fr) * 1985-06-29 1987-01-15 Hartmut Griepentrog Machine comportant un rotor a paliers magnetiques et une machine electrique a champ radial
DE3600124A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
JP2556320B2 (ja) * 1987-03-18 1996-11-20 セイコ−精機株式会社 真空ポンプ
FR2613791B1 (fr) * 1987-04-09 1992-03-13 Europ Propulsion Palier magnetique radial a atterrisseur de secours et application a une turbomachine a suspension magnetique active
JPH01269722A (ja) * 1988-04-22 1989-10-27 Toshiro Higuchi 磁気制御軸受ユニット
US4880362A (en) * 1988-05-24 1989-11-14 Laing Karsten A Rotor with stabilizing magnets
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
JPH0676798B2 (ja) * 1988-08-22 1994-09-28 株式会社荏原製作所 磁気軸受を備えた遠心ポンプ
DE69011391T2 (de) * 1989-05-08 1995-01-26 Nippon Ferrofluidics Kk Magnetische Lagervorrichtung.
US5314868A (en) * 1991-08-06 1994-05-24 Koyo Seiko Co., Ltd. Bearing device
DE4129673A1 (de) * 1991-09-06 1993-03-11 Leybold Ag Reibungsvakuumpumpe
US5248239A (en) * 1992-03-19 1993-09-28 Acd, Inc. Thrust control system for fluid handling rotary apparatus
US5445494A (en) * 1993-11-08 1995-08-29 Bw/Ip International, Inc. Multi-stage centrifugal pump with canned magnetic bearing
US5584544A (en) * 1994-10-28 1996-12-17 Elf Technologies Corporation Electronic librarian and filing system
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
US5658125A (en) * 1995-02-28 1997-08-19 Allison Engine Company, Inc. Magnetic bearings as actuation for active compressor stability control
GB2298901A (en) * 1995-03-17 1996-09-18 Aisin Seiki Gas turbine engine axial thrust balancing
US5836739A (en) * 1995-03-17 1998-11-17 Rolls-Royce Plc Gas turbine engine
DE19529038A1 (de) * 1995-08-08 1997-02-13 Pfeiffer Vacuum Gmbh Magnetlager für einen Rotor
JP3114085B2 (ja) * 1996-01-31 2000-12-04 セイコー精機株式会社 半径方向位置修正電磁石付磁気軸受装置
DE19637270A1 (de) * 1996-09-13 1998-03-19 Schlafhorst & Co W Topfspinnvorrichtung
SE508445C2 (sv) * 1997-01-28 1998-10-05 Magnetal Ab Vakuumpump av höghastighetstyp
US6213737B1 (en) * 1997-04-18 2001-04-10 Ebara Corporation Damper device and turbomolecular pump with damper device
FI103296B (fi) * 1997-12-03 1999-05-31 Sundyne Corp Menetelmä ylipaineisen kaasun tuottamiseksi
US6078120A (en) * 1998-03-10 2000-06-20 Varian, Inc. Vacuum pump with magnetic bearing system, backup bearings and sensors
JP3215842B2 (ja) 1999-03-29 2001-10-09 セイコーインスツルメンツ株式会社 磁気軸受保護装置及びターボ分子ポンプ
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2001041237A (ja) * 1999-07-26 2001-02-13 Seiko Seiki Co Ltd 磁気軸受装置
DE10022062A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
DE10043235A1 (de) 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
DE10119075A1 (de) * 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung
US6770995B1 (en) * 2001-09-22 2004-08-03 Gerald K. Foshage Passive radial magnetic bearing
FR2831621B1 (fr) * 2001-10-25 2004-02-13 Cit Alcatel Utilisation des billes en zircone pour les roulements d'atterrissage des pompes turbomoleculaires sur palier magnetique
JP2003289642A (ja) * 2002-03-28 2003-10-10 Mitsumi Electric Co Ltd モータの取付ベースへの取付構造
DE20211510U1 (de) * 2002-07-13 2003-11-27 Leybold Vakuum Gmbh Magnetlager
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
US6914361B2 (en) 2003-03-07 2005-07-05 Leybold Vakuum Gmbh Magnetic bearing
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
EP1679492A1 (en) * 2005-01-11 2006-07-12 Mecos Traxler AG Eddy-current sensor and magnetic bearing device
US8267636B2 (en) * 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
US8283813B2 (en) * 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
WO2009003186A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Multiple dimension position sensor
US8823294B2 (en) * 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US7834618B2 (en) 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
CN101855811B (zh) * 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
KR20180014247A (ko) 2007-07-17 2018-02-07 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
FR2936287B1 (fr) * 2008-09-22 2018-06-22 Soc De Mecanique Magnetique Pompe turbomoleculaire a montage souple
KR101166854B1 (ko) * 2010-03-11 2012-07-19 한국기계연구원 자기베어링 구조 및 이를 구비한 터보기기
KR101643109B1 (ko) * 2013-03-05 2016-07-26 유겐가이샤 나카노세이사쿠쇼 회전 구동 장치
JP7003418B2 (ja) * 2017-02-17 2022-01-20 株式会社島津製作所 磁気軸受装置および真空ポンプ
JP6927735B2 (ja) * 2017-04-20 2021-09-01 エドワーズ株式会社 真空ポンプ、磁気軸受装置及びロータ
JP7331356B2 (ja) * 2018-12-14 2023-08-23 Tdk株式会社 永久磁石および回転電機
EP3633204B1 (de) * 2019-09-05 2021-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2621344B (en) * 2022-08-09 2024-07-24 Leybold Gmbh Magnetic bearing and vacuum pump

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1525245A1 (de) * 1965-07-15 1969-09-11 Siemens Ag Magnetische Traglagerentlastungsvorrichtung
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse
US3565495A (en) * 1969-08-05 1971-02-23 Cambridge Thermionic Corp Magnetic suspension apparatus
FR2086525A5 (cg-RX-API-DMAC10.html) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
US3860300A (en) * 1971-07-07 1975-01-14 Cambridge Thermionic Corp Virtually zero powered magnetic suspension
IT942651B (it) * 1971-09-30 1973-04-02 Elettrorava Spa Cuscinetto magnetico radiale
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2420825C3 (de) * 1974-04-30 1980-04-17 Padana Ag, Zug (Schweiz) Magnetische Lagerung eines Rotors
US4088379A (en) * 1974-09-18 1978-05-09 Perper Lloyd J Variable permanent magnet suspension system
CH583856A5 (cg-RX-API-DMAC10.html) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
JPS5226292A (en) * 1975-08-23 1977-02-26 Res Dev Corp Of Japan Ion sensor
FR2326270A1 (fr) * 1975-10-02 1977-04-29 Europ Propulsion Montage de broche porte-outil, notamment pour rectifieuse
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
FR2336550A1 (fr) * 1975-12-24 1977-07-22 Europ Propulsion Montage d'arbre long, notamment pour turbomachine
FR2377549A1 (fr) * 1977-01-12 1978-08-11 Europ Propulsion Montage de rotor court de grand diametre
DE2818255A1 (de) * 1978-04-26 1979-11-08 Teldix Gmbh Magnetische lageranordnung
US4268095A (en) * 1978-12-01 1981-05-19 Massachusetts Institute Of Technology Magnetic bearing
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
US4376070A (en) 1980-06-25 1983-03-08 Westinghouse Electric Corp. Containment of nuclear waste
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
JPH01209581A (ja) * 1988-02-17 1989-08-23 Ascii Corp メモリ装置
JPH0399882A (ja) * 1989-09-14 1991-04-25 Hodogaya Chem Co Ltd 感熱記録材料

Also Published As

Publication number Publication date
DE3341716A1 (de) 1984-05-24
FR2536473B1 (fr) 1989-07-28
JPS5993992A (ja) 1984-05-30
FR2536473A1 (fr) 1984-05-25
JPH0646036B2 (ja) 1994-06-15
GB2130655A (en) 1984-06-06
DE3341716C2 (cg-RX-API-DMAC10.html) 1993-07-01
GB8330794D0 (en) 1983-12-29
US4609332A (en) 1986-09-02

Similar Documents

Publication Publication Date Title
AU558372B2 (en) Elliptical stator sliding vane pump
GB2069064B (en) Turbomachine stator vane mounting
GB2115499B (en) Rotor blade assembly
EP0286227A3 (en) Turbo machine rotor assembly
GB2121110B (en) Turbomolecular pump
GB2210935B (en) Variable stator vane assembly
GB8317919D0 (en) Rotor assembly
AU544432B2 (en) Scroll pump
DE3561348D1 (en) Molecular vacuum pump
DE3464514D1 (en) Turbine stator assembly
GB2123092B (en) Bladed rotor
DE3276442D1 (en) A stator vane assembly for a turbine machine
GB2114234B (en) Stator vane structure
GB2119863B (en) Turbine rotor
GB2117844B (en) Turbomachinery rotor
DE3461397D1 (en) Centrifugal lubrication pump for a turbo charger
AU564835B2 (en) Centrifugal pump impeller
GB2072272B (en) Rotor for a centrifugal pump
DE3461398D1 (en) Self-priming centrifugal lubrication pump for a turbo charger
EP0120993A3 (en) Vane pump
GB2069608B (en) Mounting arrangement for a centrifugal pump
GB2129494B (en) Casings for multi-stage centrifugal pumps
ZA831613B (en) Rotor for a centrifugal pump
GB2150221B (en) Multistage centrifugal pumps
GB2122259B (en) Casings for centrifugal pumps