GB2094479B - Determining probe contact in testing integrated circuits - Google Patents

Determining probe contact in testing integrated circuits

Info

Publication number
GB2094479B
GB2094479B GB8127051A GB8127051A GB2094479B GB 2094479 B GB2094479 B GB 2094479B GB 8127051 A GB8127051 A GB 8127051A GB 8127051 A GB8127051 A GB 8127051A GB 2094479 B GB2094479 B GB 2094479B
Authority
GB
United Kingdom
Prior art keywords
integrated circuits
probe contact
testing integrated
determining probe
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8127051A
Other languages
English (en)
Other versions
GB2094479A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/893,118 external-priority patent/US4195259A/en
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB2094479A publication Critical patent/GB2094479A/en
Application granted granted Critical
Publication of GB2094479B publication Critical patent/GB2094479B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
GB8127051A 1978-01-30 1979-01-29 Determining probe contact in testing integrated circuits Expired GB2094479B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87356478A 1978-01-30 1978-01-30
US05/893,118 US4195259A (en) 1978-04-04 1978-04-04 Multiprobe test system and method of using same

Publications (2)

Publication Number Publication Date
GB2094479A GB2094479A (en) 1982-09-15
GB2094479B true GB2094479B (en) 1983-03-16

Family

ID=27128303

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8127051A Expired GB2094479B (en) 1978-01-30 1979-01-29 Determining probe contact in testing integrated circuits
GB7903073A Expired GB2014315B (en) 1978-01-30 1979-01-29 Determining probe contact

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB7903073A Expired GB2014315B (en) 1978-01-30 1979-01-29 Determining probe contact

Country Status (5)

Country Link
JP (1) JPS54145482A (enrdf_load_stackoverflow)
DE (1) DE2903517A1 (enrdf_load_stackoverflow)
FR (1) FR2425148B1 (enrdf_load_stackoverflow)
GB (2) GB2094479B (enrdf_load_stackoverflow)
IT (1) IT1113297B (enrdf_load_stackoverflow)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0028719B1 (en) * 1979-11-05 1984-05-30 Texas Instruments Incorporated Probe assembly for testing integrated circuits
JPS58164236U (ja) * 1982-04-27 1983-11-01 日本電気ホームエレクトロニクス株式会社 半導体ウエ−ハ特性測定装置
IL79820A0 (en) * 1985-09-26 1986-11-30 Tektronix Inc Wafer probe head,and method of assembling same
US4758785A (en) * 1986-09-03 1988-07-19 Tektronix, Inc. Pressure control apparatus for use in an integrated circuit testing station
US4673839A (en) * 1986-09-08 1987-06-16 Tektronix, Inc. Piezoelectric pressure sensing apparatus for integrated circuit testing stations
US5012186A (en) * 1990-06-08 1991-04-30 Cascade Microtech, Inc. Electrical probe with contact force protection
EP0547251A1 (en) * 1991-12-14 1993-06-23 International Business Machines Corporation A method for testing a micro circuit
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
DE19952943C2 (de) * 1999-11-03 2003-07-03 Infineon Technologies Ag Nadelkarten-Justageeinrichtung zur Planarisierung von Nadelsätzen einer Nadelkarte
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
WO2003100445A2 (en) 2002-05-23 2003-12-04 Cascade Microtech, Inc. Probe for testing a device under test
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7633306B2 (en) 2003-03-14 2009-12-15 Rudolph Technologies, Inc. System and method of measuring probe float
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
KR20060126700A (ko) 2003-12-24 2006-12-08 캐스케이드 마이크로테크 인코포레이티드 능동 웨이퍼 프로브
EP1789812A2 (en) 2004-09-13 2007-05-30 Cascade Microtech, Inc. Double sided probing structures
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
WO2007146285A2 (en) 2006-06-09 2007-12-21 Cascade Microtech, Inc. Differential signal probe with integral balun
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
CN107015137B (zh) * 2017-05-26 2023-12-08 深圳市赛伦北斗科技有限责任公司 一种电路板检测装置、系统及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1063381A (en) * 1963-01-18 1967-03-30 Wilmot Breeden Ltd Improvements in or relating to surface testing apparatus
US3446065A (en) * 1965-08-11 1969-05-27 Transistor Automation Corp Automatic probing apparatus
US3810017A (en) * 1972-05-15 1974-05-07 Teledyne Inc Precision probe for testing micro-electronic units
US3849728A (en) * 1973-08-21 1974-11-19 Wentworth Labor Inc Fixed point probe card and an assembly and repair fixture therefor
JPS5178692A (enrdf_load_stackoverflow) * 1974-12-29 1976-07-08 Sony Corp

Also Published As

Publication number Publication date
IT7947813A0 (it) 1979-01-29
GB2014315B (en) 1983-02-02
DE2903517A1 (de) 1979-08-02
IT1113297B (it) 1986-01-20
GB2014315A (en) 1979-08-22
JPH039425B2 (enrdf_load_stackoverflow) 1991-02-08
GB2094479A (en) 1982-09-15
JPS54145482A (en) 1979-11-13
FR2425148A1 (enrdf_load_stackoverflow) 1979-11-30
FR2425148B1 (enrdf_load_stackoverflow) 1985-06-28

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 19990128