JPS5178692A - - Google Patents

Info

Publication number
JPS5178692A
JPS5178692A JP50002140A JP214075A JPS5178692A JP S5178692 A JPS5178692 A JP S5178692A JP 50002140 A JP50002140 A JP 50002140A JP 214075 A JP214075 A JP 214075A JP S5178692 A JPS5178692 A JP S5178692A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50002140A
Other languages
Japanese (ja)
Inventor
Kazuhiro Sugita
Chohide Kon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP50002140A priority Critical patent/JPS5178692A/ja
Priority to CA242,588A priority patent/CA1044379A/en
Priority to DE19752558963 priority patent/DE2558963A1/de
Priority to GB53002/75A priority patent/GB1531429A/en
Priority to US05/645,020 priority patent/US4103232A/en
Priority to NL7515149A priority patent/NL7515149A/xx
Publication of JPS5178692A publication Critical patent/JPS5178692A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP50002140A 1974-12-28 1974-12-29 Pending JPS5178692A (enrdf_load_stackoverflow)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP50002140A JPS5178692A (enrdf_load_stackoverflow) 1974-12-29 1974-12-29
CA242,588A CA1044379A (en) 1974-12-28 1975-12-24 Wafer transfer device
DE19752558963 DE2558963A1 (de) 1974-12-28 1975-12-29 Vorrichtung zur anbringung von halbleiterplaettchen
GB53002/75A GB1531429A (en) 1974-12-28 1975-12-29 Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method
US05/645,020 US4103232A (en) 1974-12-28 1975-12-29 Wafer transfer device
NL7515149A NL7515149A (nl) 1974-12-28 1975-12-29 Inrichting voor het hanteren van wafels van halfgeleidend materiaal.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50002140A JPS5178692A (enrdf_load_stackoverflow) 1974-12-29 1974-12-29

Publications (1)

Publication Number Publication Date
JPS5178692A true JPS5178692A (enrdf_load_stackoverflow) 1976-07-08

Family

ID=11521022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50002140A Pending JPS5178692A (enrdf_load_stackoverflow) 1974-12-28 1974-12-29

Country Status (1)

Country Link
JP (1) JPS5178692A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448486A (en) * 1977-09-26 1979-04-17 Matsushita Electric Ind Co Ltd Automatic measuring unit
JPS54145482A (en) * 1978-01-30 1979-11-13 Texas Instruments Inc Ic test probe
JPS617479A (ja) * 1978-01-30 1986-01-14 テキサス　インスツルメンツ　インコ−ポレイテツド 集積回路の検査方法
JPS63244854A (ja) * 1987-03-31 1988-10-12 Tokyo Electron Ltd プロ−ブ装置
JPS63318745A (ja) * 1987-06-22 1988-12-27 Tokyo Electron Ltd プロ−ブ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927981A (enrdf_load_stackoverflow) * 1972-07-12 1974-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927981A (enrdf_load_stackoverflow) * 1972-07-12 1974-03-12

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448486A (en) * 1977-09-26 1979-04-17 Matsushita Electric Ind Co Ltd Automatic measuring unit
JPS54145482A (en) * 1978-01-30 1979-11-13 Texas Instruments Inc Ic test probe
JPS617479A (ja) * 1978-01-30 1986-01-14 テキサス　インスツルメンツ　インコ−ポレイテツド 集積回路の検査方法
JPS63244854A (ja) * 1987-03-31 1988-10-12 Tokyo Electron Ltd プロ−ブ装置
JPS63318745A (ja) * 1987-06-22 1988-12-27 Tokyo Electron Ltd プロ−ブ装置

Similar Documents

Publication Publication Date Title
DK32175A (enrdf_load_stackoverflow)
FR2261980B1 (enrdf_load_stackoverflow)
FI750999A7 (enrdf_load_stackoverflow)
FR2258470A1 (enrdf_load_stackoverflow)
FR2262195B1 (enrdf_load_stackoverflow)
FR2259851A1 (enrdf_load_stackoverflow)
DK153675A (enrdf_load_stackoverflow)
FR2261465B1 (enrdf_load_stackoverflow)
FR2257412B3 (enrdf_load_stackoverflow)
FI50094B (enrdf_load_stackoverflow)
FR2262639B1 (enrdf_load_stackoverflow)
AU479230B2 (enrdf_load_stackoverflow)
AU495821B2 (enrdf_load_stackoverflow)
AU495844B2 (enrdf_load_stackoverflow)
DE2427865A1 (enrdf_load_stackoverflow)
DE2400622A1 (enrdf_load_stackoverflow)
CS170619B1 (enrdf_load_stackoverflow)
CS169476B1 (enrdf_load_stackoverflow)
AU6599874A (enrdf_load_stackoverflow)
AR201233Q (enrdf_load_stackoverflow)
AU7253374A (enrdf_load_stackoverflow)
CS165762B3 (enrdf_load_stackoverflow)
AU480145A (enrdf_load_stackoverflow)
AU482244A (enrdf_load_stackoverflow)
BG20147A1 (enrdf_load_stackoverflow)