GB2073901A - Developing process for x-ray lithography - Google Patents

Developing process for x-ray lithography Download PDF

Info

Publication number
GB2073901A
GB2073901A GB8100063A GB8100063A GB2073901A GB 2073901 A GB2073901 A GB 2073901A GB 8100063 A GB8100063 A GB 8100063A GB 8100063 A GB8100063 A GB 8100063A GB 2073901 A GB2073901 A GB 2073901A
Authority
GB
United Kingdom
Prior art keywords
developing
resist
concentration
developed
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB8100063A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of GB2073901A publication Critical patent/GB2073901A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/167—X-ray
    • Y10S430/168—X-ray exposure process

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Radiography Using Non-Light Waves (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • X-Ray Techniques (AREA)
GB8100063A 1978-01-16 1979-01-12 Developing process for x-ray lithography Withdrawn GB2073901A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,541 US4215192A (en) 1978-01-16 1978-01-16 X-ray lithography apparatus and method of use

Publications (1)

Publication Number Publication Date
GB2073901A true GB2073901A (en) 1981-10-21

Family

ID=25353753

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8100063A Withdrawn GB2073901A (en) 1978-01-16 1979-01-12 Developing process for x-ray lithography
GB791199A Expired GB2012452B (en) 1978-01-16 1979-01-12 Lithography

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB791199A Expired GB2012452B (en) 1978-01-16 1979-01-12 Lithography

Country Status (8)

Country Link
US (1) US4215192A (OSRAM)
JP (1) JPS54103346A (OSRAM)
CA (1) CA1118914A (OSRAM)
CH (1) CH652236A5 (OSRAM)
DE (1) DE2854693A1 (OSRAM)
FR (1) FR2414791A1 (OSRAM)
GB (2) GB2073901A (OSRAM)
IT (1) IT1114336B (OSRAM)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342917A (en) * 1978-01-16 1982-08-03 The Perkin-Elmer Corporation X-ray lithography apparatus and method of use
US4388728A (en) * 1978-11-20 1983-06-14 The Machlett Laboratories, Incorporated Soft X-ray lithography system
US4357364A (en) * 1981-04-27 1982-11-02 Rockwell International Corporation High rate resist polymerization method
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
JPS58111318A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 現像方法
US4439870A (en) * 1981-12-28 1984-03-27 Bell Telephone Laboratories, Incorporated X-Ray source and method of making same
US4493097A (en) * 1982-08-30 1985-01-08 The Perkin-Elmer Corporation Electron gun assembly
US4665541A (en) * 1983-06-06 1987-05-12 The University Of Rochester X-ray lithography
DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
ATE49322T1 (de) * 1983-08-26 1990-01-15 Feinfocus Verwaltung Roentgenlithographiegeraet.
US4534047A (en) * 1984-01-06 1985-08-06 The Perkin-Elmer Corporation Mask ring assembly for X-ray lithography
US4539695A (en) * 1984-01-06 1985-09-03 The Perkin-Elmer Corporation X-Ray lithography system
US4610020A (en) * 1984-01-06 1986-09-02 The Perkin-Elmer Corporation X-ray mask ring and apparatus for making same
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
US5821035A (en) * 1996-03-06 1998-10-13 Sony Corporation Resist developing apparatus and resist developing method
JP3702108B2 (ja) * 1998-10-07 2005-10-05 株式会社東芝 レジストパターン形成方法
EP3696845A1 (en) * 2019-02-12 2020-08-19 Malvern Panalytical B.V. X-ray tube and x-ray analysis system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743842A (en) * 1972-01-14 1973-07-03 Massachusetts Inst Technology Soft x-ray lithographic apparatus and process
US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
CA984887A (en) * 1973-01-03 1976-03-02 Machlett Laboratories X-ray tube anode target
DE2346719C3 (de) * 1973-09-17 1980-01-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Mehrschichtige Bestrahlungsmaske für die Röntgenstrahl-Fotolithografie
US4035522A (en) * 1974-07-19 1977-07-12 International Business Machines Corporation X-ray lithography mask
US4061829A (en) * 1976-04-26 1977-12-06 Bell Telephone Laboratories, Incorporated Negative resist for X-ray and electron beam lithography and method of using same

Also Published As

Publication number Publication date
GB2012452B (en) 1983-01-06
FR2414791A1 (fr) 1979-08-10
IT7947655A0 (it) 1979-01-16
DE2854693A1 (de) 1979-07-19
CH652236A5 (de) 1985-10-31
FR2414791B1 (OSRAM) 1984-11-09
IT1114336B (it) 1986-01-27
CA1118914A (en) 1982-02-23
JPS54103346A (en) 1979-08-14
US4215192A (en) 1980-07-29
GB2012452A (en) 1979-07-25

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)