GB2046514A - Semiconductor device - Google Patents

Semiconductor device Download PDF

Info

Publication number
GB2046514A
GB2046514A GB8007113A GB8007113A GB2046514A GB 2046514 A GB2046514 A GB 2046514A GB 8007113 A GB8007113 A GB 8007113A GB 8007113 A GB8007113 A GB 8007113A GB 2046514 A GB2046514 A GB 2046514A
Authority
GB
United Kingdom
Prior art keywords
electrodes
substrate
semiconductor
semiconductor device
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB8007113A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of GB2046514A publication Critical patent/GB2046514A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/80Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/812Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/147Semiconductor insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/481Internal lead connections, e.g. via connections, feedthrough structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • H01L23/49844Geometry or layout for devices being provided for in H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5384Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725Source or drain electrodes for field effect devices
    • H01L29/4175Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/05005Structure
    • H01L2224/05009Bonding area integrally formed with a via connection of the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725Source or drain electrodes for field effect devices
    • H01L29/41758Source or drain electrodes for field effect devices for lateral devices with structured layout for source or drain region, i.e. the source or drain region having cellular, interdigitated or ring structure or being curved or angular
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01014Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01023Vanadium [V]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015Shape
    • H01L2924/10155Shape being other than a cuboid
    • H01L2924/10158Shape being other than a cuboid at the passive surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/1026Compound semiconductors
    • H01L2924/1032III-V
    • H01L2924/10329Gallium arsenide [GaAs]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1203Rectifying Diode
    • H01L2924/12032Schottky diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1203Rectifying Diode
    • H01L2924/12036PN diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12042LASER
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/157Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/15738Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
    • H01L2924/15747Copper [Cu] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Geometry (AREA)
  • Junction Field-Effect Transistors (AREA)
GB8007113A 1979-04-09 1980-03-03 Semiconductor device Withdrawn GB2046514A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2842179A 1979-04-09 1979-04-09

Publications (1)

Publication Number Publication Date
GB2046514A true GB2046514A (en) 1980-11-12

Family

ID=21843361

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8007113A Withdrawn GB2046514A (en) 1979-04-09 1980-03-03 Semiconductor device

Country Status (5)

Country Link
JP (1) JPS55140272A (de)
DE (1) DE3013196A1 (de)
FR (1) FR2454185A1 (de)
GB (1) GB2046514A (de)
IT (1) IT8048031A0 (de)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0063843A1 (de) * 1981-04-29 1982-11-03 Telecommunications Radioelectriques Et Telephoniques T.R.T. Hyperfrequenz-Schaltung
FR2507409A1 (fr) * 1981-06-03 1982-12-10 Radiotechnique Compelec Circuit hyperfrequence, notamment amplificateur a transistor a effet de champ
FR2516311A1 (fr) * 1981-11-06 1983-05-13 Thomson Csf Socle pour le montage d'une pastille semi-conductrice sur l'embase d'un boitier d'encapsulation, et procede de realisation de ce socle
FR2554275A1 (fr) * 1983-10-26 1985-05-03 Radiotechnique Compelec Dispositif de connexion pour un semi-conducteur de puissance
US4531145A (en) * 1980-08-04 1985-07-23 Fine Particle Technology Corporation Method of fabricating complex micro-circuit boards and substrates and substrate
FR2565030A1 (fr) * 1984-05-25 1985-11-29 Thomson Csf Structure de metallisations de reprise de contacts d'un dispositif semi-conducteur et dispositif dote d'une telle structure
WO1988009057A1 (en) * 1987-05-14 1988-11-17 Hughes Aircraft Company Two-terminal semiconductor diode arrangement
EP0293630A1 (de) * 1987-06-04 1988-12-07 Licentia Patent-Verwaltungs-GmbH Halbleiterkörper mit Wärmesenke
EP0362161A2 (de) * 1988-09-29 1990-04-04 Microwave Power, Inc. Verfahren zum Herstellen eines Substrates für integrierte Mikrowellen-Schaltungen
EP0376100A2 (de) * 1988-12-24 1990-07-04 Alcatel SEL Aktiengesellschaft Verfahren und Leiterplatte zum Montieren eines Halbleiter-Bauelements
US4970578A (en) * 1987-05-01 1990-11-13 Raytheon Company Selective backside plating of GaAs monolithic microwave integrated circuits
US5051811A (en) * 1987-08-31 1991-09-24 Texas Instruments Incorporated Solder or brazing barrier
GB2274200A (en) * 1991-10-29 1994-07-13 Gen Electric A High density interconnect structure including a spacer structure and a gap
US5449929A (en) * 1992-12-21 1995-09-12 Mitsubishi Denki Kabushiki Kaisha IPG transistor semiconductor integrated circuit device
WO1996013062A1 (en) * 1994-10-19 1996-05-02 Ceram Incorporated Apparatus and method of manufacturing stacked wafer array
US5703405A (en) * 1993-03-15 1997-12-30 Motorola, Inc. Integrated circuit chip formed from processing two opposing surfaces of a wafer
WO2000048248A1 (en) * 1999-02-10 2000-08-17 Telefonaktiebolaget Lm Ericsson (Publ) Semiconductor device with deep substrate contacts
US6515334B2 (en) * 1997-01-18 2003-02-04 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
EP1693891A2 (de) * 2005-01-31 2006-08-23 Interuniversitair Micro-Elektronica Centrum (IMEC) Verfahren zur Herstellung einer Halbleiteranordnung
US7442635B2 (en) 2005-01-31 2008-10-28 Interuniversitair Microelektronica Centrum (Imec) Method for producing a semiconductor device and resulting device
CN107980171A (zh) * 2016-12-23 2018-05-01 苏州能讯高能半导体有限公司 半导体芯片、半导体晶圆及半导体晶圆的制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778655U (de) * 1980-10-30 1982-05-15
IT1175541B (it) * 1984-06-22 1987-07-01 Telettra Lab Telefon Procedimento per la connessione a terra di dispositivi planari e circuiti integrati e prodotti cosi' ottenuti
JPH0821595B2 (ja) * 1987-07-28 1996-03-04 三菱電機株式会社 半導体装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1524053A (fr) * 1951-01-28 1968-05-10 Telefunken Patent Circuit à corps solides constitués par une masse semi-conductrice comprenant des composants actifs incorporés et par une couche isolante comprenant des composants passifs, ainsi que par des conducteurs rapportés
FR1486855A (de) * 1965-07-17 1967-10-05
DE1933731C3 (de) * 1968-07-05 1982-03-25 Honeywell Information Systems Italia S.p.A., Caluso, Torino Verfahren zum Herstellen einer integrierten Halbleiterschaltung
US3648131A (en) * 1969-11-07 1972-03-07 Ibm Hourglass-shaped conductive connection through semiconductor structures
US3986196A (en) * 1975-06-30 1976-10-12 Varian Associates Through-substrate source contact for microwave FET

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4531145A (en) * 1980-08-04 1985-07-23 Fine Particle Technology Corporation Method of fabricating complex micro-circuit boards and substrates and substrate
EP0063843A1 (de) * 1981-04-29 1982-11-03 Telecommunications Radioelectriques Et Telephoniques T.R.T. Hyperfrequenz-Schaltung
FR2505094A1 (fr) * 1981-04-29 1982-11-05 Trt Telecom Radio Electr Procede de realisation des circuits hyperfrequences
FR2507409A1 (fr) * 1981-06-03 1982-12-10 Radiotechnique Compelec Circuit hyperfrequence, notamment amplificateur a transistor a effet de champ
FR2516311A1 (fr) * 1981-11-06 1983-05-13 Thomson Csf Socle pour le montage d'une pastille semi-conductrice sur l'embase d'un boitier d'encapsulation, et procede de realisation de ce socle
EP0079265A1 (de) * 1981-11-06 1983-05-18 Thomson-Csf Verfahren zum Herstellen eines Sockels zum Montieren eines Halbleiterchips auf die Basis eines Verkapselungsgehäuses
FR2554275A1 (fr) * 1983-10-26 1985-05-03 Radiotechnique Compelec Dispositif de connexion pour un semi-conducteur de puissance
EP0166633A1 (de) * 1984-05-25 1986-01-02 Thomson-Csf Metallisierungsstruktur zur Kontaktherstellung für eine Halbleitervorrichtung und Vorrichtung mit einer solchen Struktur
FR2565030A1 (fr) * 1984-05-25 1985-11-29 Thomson Csf Structure de metallisations de reprise de contacts d'un dispositif semi-conducteur et dispositif dote d'une telle structure
US4970578A (en) * 1987-05-01 1990-11-13 Raytheon Company Selective backside plating of GaAs monolithic microwave integrated circuits
WO1988009057A1 (en) * 1987-05-14 1988-11-17 Hughes Aircraft Company Two-terminal semiconductor diode arrangement
EP0293630A1 (de) * 1987-06-04 1988-12-07 Licentia Patent-Verwaltungs-GmbH Halbleiterkörper mit Wärmesenke
US4910583A (en) * 1987-06-04 1990-03-20 Licentia Patent-Verwaltungs Gmbh Semiconductor body with heat sink
US5051811A (en) * 1987-08-31 1991-09-24 Texas Instruments Incorporated Solder or brazing barrier
EP0362161A2 (de) * 1988-09-29 1990-04-04 Microwave Power, Inc. Verfahren zum Herstellen eines Substrates für integrierte Mikrowellen-Schaltungen
EP0362161A3 (de) * 1988-09-29 1990-09-19 Microwave Power, Inc. Verfahren zum Herstellen eines Substrates für integrierte Mikrowellen-Schaltungen
EP0376100A3 (de) * 1988-12-24 1991-07-31 Alcatel SEL Aktiengesellschaft Verfahren und Leiterplatte zum Montieren eines Halbleiter-Bauelements
EP0376100A2 (de) * 1988-12-24 1990-07-04 Alcatel SEL Aktiengesellschaft Verfahren und Leiterplatte zum Montieren eines Halbleiter-Bauelements
GB2274200A (en) * 1991-10-29 1994-07-13 Gen Electric A High density interconnect structure including a spacer structure and a gap
GB2274200B (en) * 1991-10-29 1996-03-20 Gen Electric A high density interconnect structure including a spacer structure and a gap
US5449929A (en) * 1992-12-21 1995-09-12 Mitsubishi Denki Kabushiki Kaisha IPG transistor semiconductor integrated circuit device
US5703405A (en) * 1993-03-15 1997-12-30 Motorola, Inc. Integrated circuit chip formed from processing two opposing surfaces of a wafer
WO1996013062A1 (en) * 1994-10-19 1996-05-02 Ceram Incorporated Apparatus and method of manufacturing stacked wafer array
US6710410B2 (en) * 1997-01-18 2004-03-23 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
US6515334B2 (en) * 1997-01-18 2003-02-04 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
US7154148B2 (en) 1997-01-18 2006-12-26 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
US7619282B2 (en) 1997-01-18 2009-11-17 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
WO2000048248A1 (en) * 1999-02-10 2000-08-17 Telefonaktiebolaget Lm Ericsson (Publ) Semiconductor device with deep substrate contacts
US6953981B1 (en) 1999-02-10 2005-10-11 Telefonaktiebolaget Lm Ericsson (Publ) Semiconductor device with deep substrates contacts
EP1693891A2 (de) * 2005-01-31 2006-08-23 Interuniversitair Micro-Elektronica Centrum (IMEC) Verfahren zur Herstellung einer Halbleiteranordnung
EP1693891A3 (de) * 2005-01-31 2008-03-05 Interuniversitair Micro-Elektronica Centrum (IMEC) Verfahren zur Herstellung einer Halbleiteranordnung
US7442635B2 (en) 2005-01-31 2008-10-28 Interuniversitair Microelektronica Centrum (Imec) Method for producing a semiconductor device and resulting device
US7759701B2 (en) 2005-01-31 2010-07-20 Imec Semiconductor device having interconnected contact groups
CN107980171A (zh) * 2016-12-23 2018-05-01 苏州能讯高能半导体有限公司 半导体芯片、半导体晶圆及半导体晶圆的制造方法
CN107980171B (zh) * 2016-12-23 2022-06-24 苏州能讯高能半导体有限公司 半导体芯片、半导体晶圆及半导体晶圆的制造方法

Also Published As

Publication number Publication date
FR2454185A1 (fr) 1980-11-07
IT8048031A0 (it) 1980-02-28
JPS55140272A (en) 1980-11-01
DE3013196A1 (de) 1980-10-30

Similar Documents

Publication Publication Date Title
GB2046514A (en) Semiconductor device
US3986196A (en) Through-substrate source contact for microwave FET
US5025296A (en) Center tapped FET
US6653740B2 (en) Vertical conduction flip-chip device with bump contacts on single surface
CA1213079A (en) Microwave semiconductor device working together with another semiconductor device for reference potential
US4339870A (en) Series-connected two-terminal semiconductor devices and their fabrication
US5068700A (en) Lateral conductivity modulated mosfet
KR840008222A (ko) 연결패드에서 기저의 실리콘으로 직접 연결된 고전력 금속산화물 반도체 전계효과 트랜지스터
US4137543A (en) Light detector arrangement
US6657266B2 (en) Semiconductor switching device
US6580107B2 (en) Compound semiconductor device with depletion layer stop region
US3878553A (en) Interdigitated mesa beam lead diode and series array thereof
KR20020019413A (ko) 집적된 전자기 차폐 디바이스
JPH0716009B2 (ja) 横型絶縁ゲートバイポーラトランジスタ
EP1022785B1 (de) Elektronische Halbleiterleistungsanordnung mit integrierter Diode
US4000507A (en) Semiconductor device having two annular electrodes
KR880011914A (ko) 전기 도전 캐리어 플레이트를 포함하는 집적회로
EP0029481A1 (de) Feldeffekt-Halbleiterstruktur
KR860000971B1 (ko) 마이크로파 전계효과 트랜지스터
US6417558B1 (en) Semiconductor device having a reduced parasitic capacitance bonding pad structure
KR100582622B1 (ko) 화합물 반도체 스위치 회로 장치
JP2007115895A (ja) 化合物半導体スイッチ回路装置
US6002158A (en) High breakdown-voltage diode with electric-field relaxation region
CA1041674A (en) Semiconductor device
JP7156641B2 (ja) 半導体装置用のパッケージおよび半導体装置

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)