GB1597928A - Lap-cutting abrasive - Google Patents
Lap-cutting abrasive Download PDFInfo
- Publication number
- GB1597928A GB1597928A GB19263/78A GB1926378A GB1597928A GB 1597928 A GB1597928 A GB 1597928A GB 19263/78 A GB19263/78 A GB 19263/78A GB 1926378 A GB1926378 A GB 1926378A GB 1597928 A GB1597928 A GB 1597928A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cutting
- lap
- abrasive
- range
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005520 cutting process Methods 0.000 title claims description 72
- 238000000034 method Methods 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 26
- 239000007788 liquid Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 12
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 235000011187 glycerol Nutrition 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000010979 ruby Substances 0.000 claims description 3
- 229910001750 ruby Inorganic materials 0.000 claims description 3
- 229910052596 spinel Inorganic materials 0.000 claims description 3
- 239000011029 spinel Substances 0.000 claims description 3
- 229910052580 B4C Inorganic materials 0.000 claims description 2
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 229910052593 corundum Inorganic materials 0.000 claims description 2
- 239000010431 corundum Substances 0.000 claims description 2
- 239000011343 solid material Substances 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 239000002480 mineral oil Substances 0.000 description 4
- 235000010446 mineral oil Nutrition 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1472—Non-aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Lubricants (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19772722780 DE2722780A1 (de) | 1977-05-20 | 1977-05-20 | Laepptrennmittel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1597928A true GB1597928A (en) | 1981-09-16 |
Family
ID=6009443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB19263/78A Expired GB1597928A (en) | 1977-05-20 | 1978-05-12 | Lap-cutting abrasive |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4246003A (enExample) |
| JP (1) | JPS53145177A (enExample) |
| BE (1) | BE867201A (enExample) |
| DE (1) | DE2722780A1 (enExample) |
| DK (1) | DK222978A (enExample) |
| FR (1) | FR2391034A1 (enExample) |
| GB (1) | GB1597928A (enExample) |
| IT (1) | IT1103283B (enExample) |
| NL (1) | NL7804613A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS632291Y2 (enExample) * | 1979-03-20 | 1988-01-20 | ||
| JPH0741530B2 (ja) * | 1985-11-27 | 1995-05-10 | 株式会社日立製作所 | 磁気デイスクの製造方法 |
| US4773920B1 (en) * | 1985-12-16 | 1995-05-02 | Minnesota Mining & Mfg | Coated abrasive suitable for use as a lapping material. |
| US4770672A (en) * | 1986-10-24 | 1988-09-13 | Menard Alfred J | Lapping compound and method for using same |
| US4867757A (en) * | 1988-09-09 | 1989-09-19 | Nalco Chemical Company | Lapping slurry compositions with improved lap rate |
| EP0824055A1 (en) * | 1996-08-13 | 1998-02-18 | MEMC Electronic Materials, Inc. | Method and apparatus for cutting an ingot |
| JPH1052816A (ja) * | 1996-08-13 | 1998-02-24 | M Ii M C Kk | ワイヤ式切断方法 |
| DE19741617A1 (de) * | 1997-09-20 | 1999-04-01 | Overbeck Kampmann Claudia | Verfahren und Vorrichtung zum Schneiden oder Trennen von Werkstücken |
| DE10011513A1 (de) * | 2000-03-09 | 2001-09-20 | Fraunhofer Ges Forschung | Verfahren zum Aufbereiten einer gebrauchten Schneidsuspension |
| JP4022569B1 (ja) * | 2006-10-20 | 2007-12-19 | 三菱電機株式会社 | ウエハ製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2006162A (en) * | 1934-07-25 | 1935-06-25 | Permatex Company Inc | Grinding composition |
| US2270888A (en) * | 1940-08-03 | 1942-01-27 | Minnesota Mining & Mfg | Nondrying water-washable lapping and grinding composition |
| US2375825A (en) * | 1941-10-16 | 1945-05-15 | Interchem Corp | Polishing compositions |
| US2944879A (en) * | 1957-04-25 | 1960-07-12 | Kenmore Res Company | Lapping compound |
| CA685394A (en) * | 1960-06-27 | 1964-04-28 | J. Ganwisch William | Liquid abrasive cleanser |
| FR1284054A (fr) * | 1960-12-29 | 1962-02-09 | Perfectionnements aux produits liquides pour polissage, lustrage, avivage et analogues | |
| BE620088A (enExample) * | 1961-07-13 | |||
| US3272195A (en) * | 1964-03-23 | 1966-09-13 | Hughes Aircraft Co | Device for slicing crystalline material |
| DE1767920A1 (de) * | 1967-07-03 | 1971-10-07 | Allied Chem | Verfahren zur Herstellung einer stabilen Diamantdispersion |
| JPS49772A (enExample) * | 1972-04-21 | 1974-01-07 | ||
| JPS549287B2 (enExample) * | 1972-05-10 | 1979-04-23 | ||
| DD99599A1 (de) * | 1972-10-23 | 1973-08-12 | Komposition zum Polieren der Oberflächen von festen Körpern | |
| JPS536756B2 (enExample) * | 1974-05-13 | 1978-03-10 | ||
| US4038048A (en) * | 1975-02-14 | 1977-07-26 | Thrower Jr Herbert T | Lapping composition containing a carboxy vinyl polymer |
-
1977
- 1977-05-20 DE DE19772722780 patent/DE2722780A1/de active Granted
-
1978
- 1978-04-28 NL NL7804613A patent/NL7804613A/xx not_active Application Discontinuation
- 1978-05-12 GB GB19263/78A patent/GB1597928A/en not_active Expired
- 1978-05-18 IT IT49433/78A patent/IT1103283B/it active
- 1978-05-18 BE BE187799A patent/BE867201A/xx not_active IP Right Cessation
- 1978-05-19 DK DK222978A patent/DK222978A/da not_active Application Discontinuation
- 1978-05-19 FR FR7814873A patent/FR2391034A1/fr active Granted
- 1978-05-19 JP JP5899278A patent/JPS53145177A/ja active Pending
-
1979
- 1979-08-03 US US06/063,653 patent/US4246003A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2722780A1 (de) | 1978-11-23 |
| IT7849433A0 (it) | 1978-05-18 |
| NL7804613A (nl) | 1978-11-22 |
| BE867201A (fr) | 1978-11-20 |
| US4246003A (en) | 1981-01-20 |
| FR2391034B1 (enExample) | 1980-07-04 |
| IT1103283B (it) | 1985-10-14 |
| DK222978A (da) | 1978-11-21 |
| FR2391034A1 (fr) | 1978-12-15 |
| DE2722780C2 (enExample) | 1988-07-07 |
| JPS53145177A (en) | 1978-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |