GB1579701A - Sensor for selectively detecting a constituent of a gaseous medium - Google Patents
Sensor for selectively detecting a constituent of a gaseous medium Download PDFInfo
- Publication number
- GB1579701A GB1579701A GB6186/77A GB618677A GB1579701A GB 1579701 A GB1579701 A GB 1579701A GB 6186/77 A GB6186/77 A GB 6186/77A GB 618677 A GB618677 A GB 618677A GB 1579701 A GB1579701 A GB 1579701A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- sensor
- electrode
- semiconductor
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000470 constituent Substances 0.000 title claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 21
- 239000003989 dielectric material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 14
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 239000004411 aluminium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 238000010276 construction Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- WNEODWDFDXWOLU-QHCPKHFHSA-N 3-[3-(hydroxymethyl)-4-[1-methyl-5-[[5-[(2s)-2-methyl-4-(oxetan-3-yl)piperazin-1-yl]pyridin-2-yl]amino]-6-oxopyridin-3-yl]pyridin-2-yl]-7,7-dimethyl-1,2,6,8-tetrahydrocyclopenta[3,4]pyrrolo[3,5-b]pyrazin-4-one Chemical compound C([C@@H](N(CC1)C=2C=NC(NC=3C(N(C)C=C(C=3)C=3C(=C(N4C(C5=CC=6CC(C)(C)CC=6N5CC4)=O)N=CC=3)CO)=O)=CC=2)C)N1C1COC1 WNEODWDFDXWOLU-QHCPKHFHSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241001269524 Dura Species 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7604428A FR2341859A1 (fr) | 1976-02-18 | 1976-02-18 | Sonde pour la detection selective de vapeurs, notamment pour la detection de la vapeur d'eau |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1579701A true GB1579701A (en) | 1980-11-19 |
Family
ID=9169261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB6186/77A Expired GB1579701A (en) | 1976-02-18 | 1977-02-15 | Sensor for selectively detecting a constituent of a gaseous medium |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4140990A (enExample) |
| JP (1) | JPS52100296A (enExample) |
| DE (1) | DE2706070C2 (enExample) |
| FR (1) | FR2341859A1 (enExample) |
| GB (1) | GB1579701A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2138946A (en) * | 1983-04-12 | 1984-10-31 | Endress Hauser Gmbh Co | Thin-film humidity sensor and method for the production therefor |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4302530A (en) * | 1977-12-08 | 1981-11-24 | University Of Pennsylvania | Method for making substance-sensitive electrical structures by processing substance-sensitive photoresist material |
| DE2908916C2 (de) * | 1979-03-07 | 1986-09-04 | Robert Bosch Gmbh, 7000 Stuttgart | Widerstandsmeßfühler zur Erfassung des Sauerstoffgehaltes in Gasen, insbesondere in Abgasen von Verbrennungsmotoren und Verfahren zur Herstellung derselben |
| SE434438B (sv) * | 1980-02-21 | 1984-07-23 | Gambro Engstrom Ab | Anordning for detektering av forekomsten av en given gaskomponent i en gasblandning |
| US4455530A (en) * | 1982-03-30 | 1984-06-19 | Westinghouse Electric Corp. | Conductivity sensor for use in steam turbines |
| JPS6050446A (ja) * | 1983-08-31 | 1985-03-20 | Nohmi Bosai Kogyo Co Ltd | ガス検出素子とその製造方法 |
| JPS6082954A (ja) * | 1983-10-14 | 1985-05-11 | Nohmi Bosai Kogyo Co Ltd | ガス検出素子とその製造方法 |
| US4795968A (en) * | 1986-06-30 | 1989-01-03 | Sri International | Gas detection method and apparatus using chemisorption and/or physisorption |
| US4780664A (en) * | 1986-10-10 | 1988-10-25 | Frank Asuini | Corrosion sensor for measuring the corrosion loss and the instantaneous corrosion rate |
| GB8708201D0 (en) * | 1987-04-06 | 1987-05-13 | Cogent Ltd | Gas sensor |
| US4900405A (en) * | 1987-07-15 | 1990-02-13 | Sri International | Surface type microelectronic gas and vapor sensor |
| US4858063A (en) * | 1987-12-31 | 1989-08-15 | California Institute Of Technology | Spiral configuration of electrodes and dielectric material for sensing an environmental property |
| WO1990015323A1 (en) * | 1989-06-02 | 1990-12-13 | Sri International | Surface type microelectronic gas and vapor sensor |
| US5748002A (en) * | 1996-01-26 | 1998-05-05 | Phase Dynamics Inc. | RF probe for montoring composition of substances |
| AU7552194A (en) * | 1993-07-26 | 1995-02-20 | Phase Dynamics, Inc. | System and method for monitoring substances and reactions |
| US6630833B2 (en) * | 1994-07-26 | 2003-10-07 | Phase Dynamics, Inc. | Measurement by concentration of a material within a structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3223609A (en) * | 1961-10-30 | 1965-12-14 | Beckman Instruments Inc | Hygrometer |
| US3954590A (en) * | 1972-08-18 | 1976-05-04 | E. I. Du Pont De Nemours And Company | Iridium thin ribbon electrodes for electrochemical cells |
| DE2407110C3 (de) * | 1974-02-14 | 1981-04-23 | Siemens AG, 1000 Berlin und 8000 München | Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz |
| FR2273275B1 (enExample) * | 1974-05-27 | 1977-03-11 | Radiotechnique Compelec |
-
1976
- 1976-02-18 FR FR7604428A patent/FR2341859A1/fr active Granted
-
1977
- 1977-02-10 US US05/767,565 patent/US4140990A/en not_active Expired - Lifetime
- 1977-02-12 DE DE2706070A patent/DE2706070C2/de not_active Expired
- 1977-02-15 JP JP1467577A patent/JPS52100296A/ja active Pending
- 1977-02-15 GB GB6186/77A patent/GB1579701A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2138946A (en) * | 1983-04-12 | 1984-10-31 | Endress Hauser Gmbh Co | Thin-film humidity sensor and method for the production therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| US4140990A (en) | 1979-02-20 |
| DE2706070A1 (de) | 1977-08-25 |
| JPS52100296A (en) | 1977-08-23 |
| DE2706070C2 (de) | 1985-02-21 |
| FR2341859B1 (enExample) | 1978-10-13 |
| FR2341859A1 (fr) | 1977-09-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |