GB1537100A - Activated gas reaction apparatus - Google Patents

Activated gas reaction apparatus

Info

Publication number
GB1537100A
GB1537100A GB28102/76A GB2810276A GB1537100A GB 1537100 A GB1537100 A GB 1537100A GB 28102/76 A GB28102/76 A GB 28102/76A GB 2810276 A GB2810276 A GB 2810276A GB 1537100 A GB1537100 A GB 1537100A
Authority
GB
United Kingdom
Prior art keywords
chamber
activation
gas
activation chamber
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB28102/76A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of GB1537100A publication Critical patent/GB1537100A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/80—Apparatus for specific applications
    • H05B6/802—Apparatus for specific applications for heating fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1212—Arrangements of the reactor or the reactors
    • B01J2219/1215—Single reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1221—Features relating to the reactor or vessel the reactor per se
    • B01J2219/1224—Form of the reactor
    • B01J2219/1227—Reactors comprising tubes with open ends

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB28102/76A 1975-07-18 1976-07-06 Activated gas reaction apparatus Expired GB1537100A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50087235A JPS5211175A (en) 1975-07-18 1975-07-18 Activated gas reacting apparatus

Publications (1)

Publication Number Publication Date
GB1537100A true GB1537100A (en) 1978-12-29

Family

ID=13909163

Family Applications (1)

Application Number Title Priority Date Filing Date
GB28102/76A Expired GB1537100A (en) 1975-07-18 1976-07-06 Activated gas reaction apparatus

Country Status (4)

Country Link
US (1) US4065369A (enExample)
JP (1) JPS5211175A (enExample)
DE (1) DE2632194C2 (enExample)
GB (1) GB1537100A (enExample)

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JPS54184070U (enExample) * 1978-06-19 1979-12-27
DE2965333D1 (en) * 1978-12-29 1983-06-09 Ncr Co Process and apparatus for cleaning wall deposits from a film deposition furnace tube
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JPS59155440A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置
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JPS59231817A (ja) * 1983-06-13 1984-12-26 Fujitsu Ltd マイクロ波プラズマ処理装置
AU544534B2 (en) * 1983-06-14 1985-06-06 Toyota Jidosha Kabushiki Kaisha Plasma coating
US4690097A (en) * 1984-02-04 1987-09-01 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
US4851295A (en) * 1984-03-16 1989-07-25 Genus, Inc. Low resistivity tungsten silicon composite film
US4629635A (en) * 1984-03-16 1986-12-16 Genus, Inc. Process for depositing a low resistivity tungsten silicon composite film on a substrate
US4559099A (en) * 1984-08-24 1985-12-17 Technics Gmbh Europa Etching device
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US4673456A (en) * 1985-09-17 1987-06-16 Machine Technology, Inc. Microwave apparatus for generating plasma afterglows
US4796562A (en) * 1985-12-03 1989-01-10 Varian Associates, Inc. Rapid thermal cvd apparatus
US4709655A (en) * 1985-12-03 1987-12-01 Varian Associates, Inc. Chemical vapor deposition apparatus
JPS62213126A (ja) * 1986-03-13 1987-09-19 Fujitsu Ltd マイクロ波プラズマ処理装置
DE3786364T2 (de) * 1986-04-14 1993-11-18 Canon Kk Verfahren zur Herstellung einer niedergeschlagenen Schicht.
US4776923A (en) * 1987-01-20 1988-10-11 Machine Technology, Inc. Plasma product treatment apparatus and methods and gas transport systems for use therein
US4883570A (en) * 1987-06-08 1989-11-28 Research-Cottrell, Inc. Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves
FR2616614B1 (fr) * 1987-06-10 1989-10-20 Air Liquide Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre
US4778561A (en) * 1987-10-30 1988-10-18 Veeco Instruments, Inc. Electron cyclotron resonance plasma source
DE3803355A1 (de) * 1988-02-05 1989-08-17 Leybold Ag Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage
US5015330A (en) * 1989-02-28 1991-05-14 Kabushiki Kaisha Toshiba Film forming method and film forming device
US5413760A (en) * 1989-03-08 1995-05-09 Abtox, Inc. Plasma sterilizer and method
JPH02279160A (ja) * 1989-03-08 1990-11-15 Abtox Inc プラズマ滅菌方法及び滅菌装置
US5650693A (en) * 1989-03-08 1997-07-22 Abtox, Inc. Plasma sterilizer apparatus using a non-flammable mixture of hydrogen and oxygen
US5472664A (en) * 1989-03-08 1995-12-05 Abtox, Inc. Plasma gas mixture for sterilizer and method
US5288460A (en) * 1989-03-08 1994-02-22 Abtox, Inc. Plasma cycling sterilizing process
US5593649A (en) * 1989-03-08 1997-01-14 Abtox, Inc. Canister with plasma gas mixture for sterilizer
US5413759A (en) * 1989-03-08 1995-05-09 Abtox, Inc. Plasma sterilizer and method
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US5141806A (en) * 1989-10-31 1992-08-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Microporous structure with layered interstitial surface treatment, and method and apparatus for preparation thereof
US5244629A (en) * 1990-08-31 1993-09-14 Caputo Ross A Plasma sterilizing process with pulsed antimicrobial agent pretreatment
US5645796A (en) 1990-08-31 1997-07-08 Abtox, Inc. Process for plasma sterilizing with pulsed antimicrobial agent treatment
US5325020A (en) * 1990-09-28 1994-06-28 Abtox, Inc. Circular waveguide plasma microwave sterilizer apparatus
US5376332A (en) * 1991-02-06 1994-12-27 Abtox, Inc. Plasma sterilizing with downstream oxygen addition
EP0526657A4 (en) * 1991-02-26 1995-12-13 Idemitsu Petrochemical Co Microwave plasma cvd device, and method for synthesizing diamond by device thereof
US5336366A (en) * 1993-04-05 1994-08-09 Vlsi Technology, Inc. New dry etch technique
US5470541A (en) * 1993-12-28 1995-11-28 E. I. Du Pont De Nemours And Company Apparatus and process for the preparation of hydrogen cyanide
US6124211A (en) * 1994-06-14 2000-09-26 Fsi International, Inc. Cleaning method
JPH0864559A (ja) * 1994-06-14 1996-03-08 Fsi Internatl Inc 基板面から不要な物質を除去する方法
US5534107A (en) * 1994-06-14 1996-07-09 Fsi International UV-enhanced dry stripping of silicon nitride films
US5635102A (en) 1994-09-28 1997-06-03 Fsi International Highly selective silicon oxide etching method
US5844195A (en) * 1996-11-18 1998-12-01 Applied Materials, Inc. Remote plasma source
US6152070A (en) 1996-11-18 2000-11-28 Applied Materials, Inc. Tandem process chamber
US5958348A (en) * 1997-02-28 1999-09-28 Nanogram Corporation Efficient production of particles by chemical reaction
US6026896A (en) * 1997-04-10 2000-02-22 Applied Materials, Inc. Temperature control system for semiconductor processing facilities
US6388226B1 (en) 1997-06-26 2002-05-14 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6815633B1 (en) 1997-06-26 2004-11-09 Applied Science & Technology, Inc. Inductively-coupled toroidal plasma source
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases
US7166816B1 (en) 1997-06-26 2007-01-23 Mks Instruments, Inc. Inductively-coupled torodial plasma source
US6150628A (en) 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US7569790B2 (en) 1997-06-26 2009-08-04 Mks Instruments, Inc. Method and apparatus for processing metal bearing gases
US6919054B2 (en) * 2002-04-10 2005-07-19 Neophotonics Corporation Reactant nozzles within flowing reactors
US20010051118A1 (en) * 1999-07-21 2001-12-13 Ronald J. Mosso Particle production apparatus
EP1166286A4 (en) 1999-03-10 2005-08-10 Neophotonics Corp ZINC OXIDE PARTICLES
JP2001244249A (ja) * 2000-03-01 2001-09-07 Speedfam Co Ltd 局部エッチング装置の放電管及びテーパ型放電管を用いた局部エッチング装置
DE10143375C1 (de) * 2001-09-05 2002-11-07 Deutsch Zentr Luft & Raumfahrt Pyrolysevorrichtung und Pyrolyseverfahren
US20040159335A1 (en) * 2002-05-17 2004-08-19 P.C.T. Systems, Inc. Method and apparatus for removing organic layers
US20060027539A1 (en) * 2003-05-02 2006-02-09 Czeslaw Golkowski Non-thermal plasma generator device
CN101954266B (zh) * 2009-07-20 2013-03-20 北京思践通科技发展有限公司 一种化学反应设备及该设备在化学反应中的应用
GB2553752A (en) * 2016-07-01 2018-03-21 Arcs Energy Ltd Fluid treatment apparatus and method
CN108878248B (zh) * 2017-05-16 2020-03-17 东京毅力科创株式会社 等离子体处理装置
JP7058485B2 (ja) * 2017-05-16 2022-04-22 東京エレクトロン株式会社 プラズマ処理装置
JP7572702B2 (ja) * 2018-09-06 2024-10-24 国立研究開発法人産業技術総合研究所 マイクロ波処理装置、マイクロ波処理方法及び化学反応方法

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US3428548A (en) * 1966-09-27 1969-02-18 Lab For Electronics Inc Plasma reaction system for reacting a gas with a non-gaseous material
US3837856A (en) * 1967-04-04 1974-09-24 Signetics Corp Method for removing photoresist in manufacture of semiconductor devices
US3577207A (en) * 1969-05-07 1971-05-04 Vladimir Pavlovich Kirjushin Microwave plasmatron
US3775621A (en) * 1972-12-29 1973-11-27 Lfe Corp Gas reaction apparatus

Also Published As

Publication number Publication date
US4065369A (en) 1977-12-27
JPS5324779B2 (enExample) 1978-07-22
DE2632194C2 (de) 1987-03-12
JPS5211175A (en) 1977-01-27
DE2632194A1 (de) 1977-01-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
746 Register noted 'licences of right' (sect. 46/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19960705