GB1536978A - Positioning a semiconductor slice - Google Patents

Positioning a semiconductor slice

Info

Publication number
GB1536978A
GB1536978A GB161577A GB161577A GB1536978A GB 1536978 A GB1536978 A GB 1536978A GB 161577 A GB161577 A GB 161577A GB 161577 A GB161577 A GB 161577A GB 1536978 A GB1536978 A GB 1536978A
Authority
GB
United Kingdom
Prior art keywords
slice
template
rim
vacuum
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB161577A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of GB1536978A publication Critical patent/GB1536978A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

1536978 Positioning photo-sensitive material ELEKTROMAT VEB 14 Jan 1977 [19 Jan 1976] 01615/77 Heading G2A A circular semi-conductor slice having a photosensitive coating, which is exposed to a template in a contact or near contact printing process, is aligned with the template by upwardly flexing the rim of the slice concentrically about its centre and pressing the flexed rim into contact with the template. As shown, slice 3 is held by vacuum on a work-table 1, which is mounted on a vacuumlockable spherical bearing 7 in a vertically movable holder 9; and is upwardly flexed at its rim by upward movement of a stepped girth ring 10, as a result of the application of vacuum to a cavity 13. A rubber sealing ring 18 may be employed to enable application of vacuum between slice 3 and template 5 during contact printing.
GB161577A 1976-01-19 1977-01-14 Positioning a semiconductor slice Expired GB1536978A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (en) 1976-01-19 1976-01-19

Publications (1)

Publication Number Publication Date
GB1536978A true GB1536978A (en) 1978-12-29

Family

ID=5503310

Family Applications (1)

Application Number Title Priority Date Filing Date
GB161577A Expired GB1536978A (en) 1976-01-19 1977-01-14 Positioning a semiconductor slice

Country Status (6)

Country Link
CS (1) CS211450B1 (en)
DD (1) DD123848A1 (en)
DE (1) DE2701106A1 (en)
FR (1) FR2338509A1 (en)
GB (1) GB1536978A (en)
SU (1) SU750614A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109794427A (en) * 2019-02-03 2019-05-24 东莞市粤蒙电子科技有限公司 A kind of screening installation

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD151387A1 (en) 1980-06-02 1981-10-14 Erich Adler METHOD AND DEVICE FOR AUTOMATIC TRANSPORT AND LOCATION ORIENTATION OF DISK FORMULA OBJECTS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109794427A (en) * 2019-02-03 2019-05-24 东莞市粤蒙电子科技有限公司 A kind of screening installation
CN109794427B (en) * 2019-02-03 2024-06-04 东莞市粤蒙电子科技有限公司 Sorting equipment

Also Published As

Publication number Publication date
SU750614A1 (en) 1980-07-23
CS211450B1 (en) 1982-02-26
DD123848A1 (en) 1977-01-19
FR2338509A1 (en) 1977-08-12
DE2701106A1 (en) 1977-07-28
FR2338509B3 (en) 1980-12-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee