GB1532862A - Scanning electron microscope system for investigation of specimen structures - Google Patents

Scanning electron microscope system for investigation of specimen structures

Info

Publication number
GB1532862A
GB1532862A GB3538476A GB3538476A GB1532862A GB 1532862 A GB1532862 A GB 1532862A GB 3538476 A GB3538476 A GB 3538476A GB 3538476 A GB3538476 A GB 3538476A GB 1532862 A GB1532862 A GB 1532862A
Authority
GB
United Kingdom
Prior art keywords
specimen
measured
measuring
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3538476A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH, Carl Zeiss Jena GmbH filed Critical Jenoptik Jena GmbH
Publication of GB1532862A publication Critical patent/GB1532862A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB3538476A 1975-09-24 1976-08-25 Scanning electron microscope system for investigation of specimen structures Expired GB1532862A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (ja) 1975-09-24 1975-09-24

Publications (1)

Publication Number Publication Date
GB1532862A true GB1532862A (en) 1978-11-22

Family

ID=5501778

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3538476A Expired GB1532862A (en) 1975-09-24 1976-08-25 Scanning electron microscope system for investigation of specimen structures

Country Status (5)

Country Link
DD (1) DD124091A1 (ja)
DE (1) DE2635356C2 (ja)
FR (1) FR2326030A1 (ja)
GB (1) GB1532862A (ja)
SU (1) SU1191980A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
KR850700273A (ko) * 1984-03-20 1985-12-26 닉슨, 래리 셀돈 정밀 주사형 전자 현미경 측정을 위한 방법 및 장치
US4677296A (en) * 1984-09-24 1987-06-30 Siemens Aktiengesellschaft Apparatus and method for measuring lengths in a scanning particle microscope
DE3802598C1 (ja) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope

Also Published As

Publication number Publication date
SU1191980A1 (ru) 1985-11-15
FR2326030B1 (ja) 1982-03-19
FR2326030A1 (fr) 1977-04-22
DE2635356A1 (de) 1977-04-07
DE2635356C2 (de) 1984-08-16
DD124091A1 (ja) 1977-02-02

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee