GB1522925A - High intensity glow discharge treatment - Google Patents

High intensity glow discharge treatment

Info

Publication number
GB1522925A
GB1522925A GB17067/77A GB1706777A GB1522925A GB 1522925 A GB1522925 A GB 1522925A GB 17067/77 A GB17067/77 A GB 17067/77A GB 1706777 A GB1706777 A GB 1706777A GB 1522925 A GB1522925 A GB 1522925A
Authority
GB
United Kingdom
Prior art keywords
glow discharge
fault signal
high intensity
discharge
discharge treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB17067/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Publication of GB1522925A publication Critical patent/GB1522925A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
GB17067/77A 1976-05-07 1977-04-25 High intensity glow discharge treatment Expired GB1522925A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (de) 1976-05-07 1976-05-07 Verfahren und Vorrichtung zur Überwachung von stromstarken Glimmentladungen

Publications (1)

Publication Number Publication Date
GB1522925A true GB1522925A (en) 1978-08-31

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
GB17067/77A Expired GB1522925A (en) 1976-05-07 1977-04-25 High intensity glow discharge treatment

Country Status (9)

Country Link
JP (1) JPS5340644A (enExample)
BR (1) BR7702855A (enExample)
DD (1) DD129846A5 (enExample)
DE (1) DE2620164C2 (enExample)
FR (1) FR2350761A1 (enExample)
GB (1) GB1522925A (enExample)
IT (1) IT1084635B (enExample)
PL (1) PL197863A1 (enExample)
ZA (1) ZA772644B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1122981A3 (de) * 2000-02-02 2005-11-16 ALD Vacuum Technologies AG Anordnung zum Erkennen von Störungen in elektrischen Heizungen für Öfen, insbesondere Schmelz- und Sinteröfen

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (enExample) * 1978-07-26 1980-02-13

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
BE543129A (enExample) * 1953-12-09
FR1127831A (fr) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit avec relais de protection
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
CH389797A (de) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Vorrichtung zur Vermeidung von plötzlichen Änderungen des Entladungszustandes für mit stromstarken Glimmentladungen betriebene Entladungsgefässe
DE1565364B2 (de) * 1966-04-02 1971-09-02 AEG Elotherm GmbH, 5630 Remscheid Hasten Schaltung zum schutz fuer die heizleiter von induktoren
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (fr) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Procédé et dispositif de contrôle du comportement électrique d'une décharge luminescente à forte intensité, pour des opérations métallurgiques
US3809955A (en) * 1973-03-26 1974-05-07 Graco Inc Safety circuit for electrostatic spray gun
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
DE2606395C3 (de) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1122981A3 (de) * 2000-02-02 2005-11-16 ALD Vacuum Technologies AG Anordnung zum Erkennen von Störungen in elektrischen Heizungen für Öfen, insbesondere Schmelz- und Sinteröfen

Also Published As

Publication number Publication date
BR7702855A (pt) 1978-04-04
DE2620164C2 (de) 1978-07-06
FR2350761A1 (fr) 1977-12-02
IT1084635B (it) 1985-05-25
DE2620164B1 (de) 1977-11-10
JPS5340644A (en) 1978-04-13
DD129846A5 (de) 1978-02-08
ZA772644B (en) 1978-04-26
PL197863A1 (pl) 1978-01-02
JPS5526181B2 (enExample) 1980-07-11

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee