JPS5340644A - Method of monitoring glow discharge of large current density and apparatus therefor - Google Patents

Method of monitoring glow discharge of large current density and apparatus therefor

Info

Publication number
JPS5340644A
JPS5340644A JP5253677A JP5253677A JPS5340644A JP S5340644 A JPS5340644 A JP S5340644A JP 5253677 A JP5253677 A JP 5253677A JP 5253677 A JP5253677 A JP 5253677A JP S5340644 A JPS5340644 A JP S5340644A
Authority
JP
Japan
Prior art keywords
current density
large current
glow discharge
apparatus therefor
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5253677A
Other languages
Japanese (ja)
Other versions
JPS5526181B2 (en
Inventor
Ooperu Buerunaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON IONON KK
Original Assignee
NIPPON IONON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON IONON KK filed Critical NIPPON IONON KK
Publication of JPS5340644A publication Critical patent/JPS5340644A/en
Publication of JPS5526181B2 publication Critical patent/JPS5526181B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
JP5253677A 1976-05-07 1977-05-07 Method of monitoring glow discharge of large current density and apparatus therefor Granted JPS5340644A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (en) 1976-05-07 1976-05-07 Method and device for monitoring high-current glow discharges

Publications (2)

Publication Number Publication Date
JPS5340644A true JPS5340644A (en) 1978-04-13
JPS5526181B2 JPS5526181B2 (en) 1980-07-11

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5253677A Granted JPS5340644A (en) 1976-05-07 1977-05-07 Method of monitoring glow discharge of large current density and apparatus therefor

Country Status (9)

Country Link
JP (1) JPS5340644A (en)
BR (1) BR7702855A (en)
DD (1) DD129846A5 (en)
DE (1) DE2620164C2 (en)
FR (1) FR2350761A1 (en)
GB (1) GB1522925A (en)
IT (1) IT1084635B (en)
PL (1) PL197863A1 (en)
ZA (1) ZA772644B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (en) * 1978-07-26 1980-02-13

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10004556C2 (en) * 2000-02-02 2003-11-27 Ald Vacuum Techn Ag Arrangement for detecting faults in an electrical heater

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
NL232778A (en) * 1953-12-09
FR1127831A (en) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit with protection relay
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
CH389797A (en) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Device to avoid sudden changes in the state of discharge for discharge vessels operated with high-current glow discharges
DE1565364B2 (en) * 1966-04-02 1971-09-02 AEG Elotherm GmbH, 5630 Remscheid Hasten CIRCUIT FOR PROTECTION FOR THE HEATING DUCTS OF INDUCTORS
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
US3809955A (en) * 1973-03-26 1974-05-07 Graco Inc Safety circuit for electrostatic spray gun
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
DE2606395C3 (en) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Method and device for monitoring the electrical behavior of a high-current glow discharge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (en) * 1978-07-26 1980-02-13

Also Published As

Publication number Publication date
DE2620164C2 (en) 1978-07-06
ZA772644B (en) 1978-04-26
PL197863A1 (en) 1978-01-02
DE2620164B1 (en) 1977-11-10
BR7702855A (en) 1978-04-04
IT1084635B (en) 1985-05-25
JPS5526181B2 (en) 1980-07-11
DD129846A5 (en) 1978-02-08
GB1522925A (en) 1978-08-31
FR2350761A1 (en) 1977-12-02

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