FR2350761A1 - METHOD AND DEVICE FOR THE MONITORING OF LUMINESCENT DISCHARGES OF HIGH INTENSITY - Google Patents

METHOD AND DEVICE FOR THE MONITORING OF LUMINESCENT DISCHARGES OF HIGH INTENSITY

Info

Publication number
FR2350761A1
FR2350761A1 FR7713850A FR7713850A FR2350761A1 FR 2350761 A1 FR2350761 A1 FR 2350761A1 FR 7713850 A FR7713850 A FR 7713850A FR 7713850 A FR7713850 A FR 7713850A FR 2350761 A1 FR2350761 A1 FR 2350761A1
Authority
FR
France
Prior art keywords
monitoring
high intensity
luminescent discharges
luminescent
discharges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR7713850A
Other languages
French (fr)
Inventor
Werner Oppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Publication of FR2350761A1 publication Critical patent/FR2350761A1/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
FR7713850A 1976-05-07 1977-05-06 METHOD AND DEVICE FOR THE MONITORING OF LUMINESCENT DISCHARGES OF HIGH INTENSITY Pending FR2350761A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (en) 1976-05-07 1976-05-07 Method and device for monitoring high-current glow discharges

Publications (1)

Publication Number Publication Date
FR2350761A1 true FR2350761A1 (en) 1977-12-02

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7713850A Pending FR2350761A1 (en) 1976-05-07 1977-05-06 METHOD AND DEVICE FOR THE MONITORING OF LUMINESCENT DISCHARGES OF HIGH INTENSITY

Country Status (9)

Country Link
JP (1) JPS5340644A (en)
BR (1) BR7702855A (en)
DD (1) DD129846A5 (en)
DE (1) DE2620164C2 (en)
FR (1) FR2350761A1 (en)
GB (1) GB1522925A (en)
IT (1) IT1084635B (en)
PL (1) PL197863A1 (en)
ZA (1) ZA772644B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (en) * 1978-07-26 1980-02-13
DE10004556C2 (en) * 2000-02-02 2003-11-27 Ald Vacuum Techn Ag Arrangement for detecting faults in an electrical heater

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
FR1127831A (en) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit with protection relay
FR1153552A (en) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Method and device for the automatic control and monitoring of the start-up and operation of electric corona processes
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
US3260892A (en) * 1959-08-17 1966-07-12 Berghaus Bernhard Device for avoidance of irregular changes of the discharge condition for discharge vessels provided for high current glow discharges
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
DE1565364A1 (en) * 1966-04-02 1970-01-22 Aeg Elotherm Gmbh Circuit to protect the heating conductors of inductors
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
FR2223873A1 (en) * 1973-03-26 1974-10-25 Graco Inc
FR2342000A1 (en) * 1976-02-18 1977-09-16 Berghaus Ionit Anstalt METHOD AND DEVICE FOR MONITORING THE ELECTRIC BEHAVIOR OF A LUMINESCENT DISCHARGE OF HIGH INTENSITY

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
FR1153552A (en) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Method and device for the automatic control and monitoring of the start-up and operation of electric corona processes
FR1127831A (en) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit with protection relay
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
US3260892A (en) * 1959-08-17 1966-07-12 Berghaus Bernhard Device for avoidance of irregular changes of the discharge condition for discharge vessels provided for high current glow discharges
DE1565364A1 (en) * 1966-04-02 1970-01-22 Aeg Elotherm Gmbh Circuit to protect the heating conductors of inductors
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
FR2223873A1 (en) * 1973-03-26 1974-10-25 Graco Inc
FR2342000A1 (en) * 1976-02-18 1977-09-16 Berghaus Ionit Anstalt METHOD AND DEVICE FOR MONITORING THE ELECTRIC BEHAVIOR OF A LUMINESCENT DISCHARGE OF HIGH INTENSITY

Also Published As

Publication number Publication date
BR7702855A (en) 1978-04-04
DD129846A5 (en) 1978-02-08
JPS5526181B2 (en) 1980-07-11
DE2620164B1 (en) 1977-11-10
PL197863A1 (en) 1978-01-02
ZA772644B (en) 1978-04-26
DE2620164C2 (en) 1978-07-06
JPS5340644A (en) 1978-04-13
GB1522925A (en) 1978-08-31
IT1084635B (en) 1985-05-25

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