DD129846A5 - METHOD AND DEVICE FOR MONITORING ELECTRICITY GLIMETRY CHARGES - Google Patents

METHOD AND DEVICE FOR MONITORING ELECTRICITY GLIMETRY CHARGES

Info

Publication number
DD129846A5
DD129846A5 DD7700198782A DD19878277A DD129846A5 DD 129846 A5 DD129846 A5 DD 129846A5 DD 7700198782 A DD7700198782 A DD 7700198782A DD 19878277 A DD19878277 A DD 19878277A DD 129846 A5 DD129846 A5 DD 129846A5
Authority
DD
German Democratic Republic
Prior art keywords
glimetry
charges
monitoring electricity
electricity
monitoring
Prior art date
Application number
DD7700198782A
Other languages
German (de)
Inventor
Werner Oppel
Original Assignee
Berghaus Ionit Anstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Ionit Anstalt filed Critical Berghaus Ionit Anstalt
Publication of DD129846A5 publication Critical patent/DD129846A5/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • H05B7/16Heating by glow discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
DD7700198782A 1976-05-07 1977-05-05 METHOD AND DEVICE FOR MONITORING ELECTRICITY GLIMETRY CHARGES DD129846A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2620164A DE2620164C2 (en) 1976-05-07 1976-05-07 Method and device for monitoring high-current glow discharges

Publications (1)

Publication Number Publication Date
DD129846A5 true DD129846A5 (en) 1978-02-08

Family

ID=5977282

Family Applications (1)

Application Number Title Priority Date Filing Date
DD7700198782A DD129846A5 (en) 1976-05-07 1977-05-05 METHOD AND DEVICE FOR MONITORING ELECTRICITY GLIMETRY CHARGES

Country Status (9)

Country Link
JP (1) JPS5340644A (en)
BR (1) BR7702855A (en)
DD (1) DD129846A5 (en)
DE (1) DE2620164C2 (en)
FR (1) FR2350761A1 (en)
GB (1) GB1522925A (en)
IT (1) IT1084635B (en)
PL (1) PL197863A1 (en)
ZA (1) ZA772644B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521918U (en) * 1978-07-26 1980-02-13
DE10004556C2 (en) * 2000-02-02 2003-11-27 Ald Vacuum Techn Ag Arrangement for detecting faults in an electrical heater

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756760A (en) * 1953-05-04 1956-09-12 Air Preheater Precipitator flashover control through current and voltage response
BE569245A (en) * 1953-12-09
FR1127831A (en) * 1954-07-22 1956-12-26 Apra Precipitator Corp Circuit with protection relay
US2911571A (en) * 1956-04-10 1959-11-03 Hoerder Huettenunion Ag Operation of glow discharges
CH389797A (en) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Device to avoid sudden changes in the state of discharge for discharge vessels operated with high-current glow discharges
DE1565364B2 (en) * 1966-04-02 1971-09-02 AEG Elotherm GmbH, 5630 Remscheid Hasten CIRCUIT FOR PROTECTION FOR THE HEATING DUCTS OF INDUCTORS
US3740579A (en) * 1966-10-03 1973-06-19 Ex Cell O Corp Zener coupled amplifier circuit with feedback
FR1541370A (en) * 1966-11-08 1968-10-04 Berghaus Elektrophysik Anst Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations
US3809955A (en) * 1973-03-26 1974-05-07 Graco Inc Safety circuit for electrostatic spray gun
US3801899A (en) * 1973-03-26 1974-04-02 Gen Electric Means for detecting the inception of corona discharges within induction apparatus
DE2606395C3 (en) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Method and device for monitoring the electrical behavior of a high-current glow discharge

Also Published As

Publication number Publication date
BR7702855A (en) 1978-04-04
FR2350761A1 (en) 1977-12-02
JPS5526181B2 (en) 1980-07-11
DE2620164B1 (en) 1977-11-10
PL197863A1 (en) 1978-01-02
ZA772644B (en) 1978-04-26
DE2620164C2 (en) 1978-07-06
JPS5340644A (en) 1978-04-13
GB1522925A (en) 1978-08-31
IT1084635B (en) 1985-05-25

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