ZA772644B - Process and apparatus for monitoring high current glow discharges - Google Patents
Process and apparatus for monitoring high current glow dischargesInfo
- Publication number
- ZA772644B ZA772644B ZA00772644A ZA772644A ZA772644B ZA 772644 B ZA772644 B ZA 772644B ZA 00772644 A ZA00772644 A ZA 00772644A ZA 772644 A ZA772644 A ZA 772644A ZA 772644 B ZA772644 B ZA 772644B
- Authority
- ZA
- South Africa
- Prior art keywords
- high current
- monitoring high
- glow discharges
- current glow
- discharges
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2620164A DE2620164C2 (en) | 1976-05-07 | 1976-05-07 | Method and device for monitoring high-current glow discharges |
Publications (1)
Publication Number | Publication Date |
---|---|
ZA772644B true ZA772644B (en) | 1978-04-26 |
Family
ID=5977282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ZA00772644A ZA772644B (en) | 1976-05-07 | 1977-05-03 | Process and apparatus for monitoring high current glow discharges |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5340644A (en) |
BR (1) | BR7702855A (en) |
DD (1) | DD129846A5 (en) |
DE (1) | DE2620164C2 (en) |
FR (1) | FR2350761A1 (en) |
GB (1) | GB1522925A (en) |
IT (1) | IT1084635B (en) |
PL (1) | PL197863A1 (en) |
ZA (1) | ZA772644B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5521918U (en) * | 1978-07-26 | 1980-02-13 | ||
DE10004556C2 (en) * | 2000-02-02 | 2003-11-27 | Ald Vacuum Techn Ag | Arrangement for detecting faults in an electrical heater |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB756760A (en) * | 1953-05-04 | 1956-09-12 | Air Preheater | Precipitator flashover control through current and voltage response |
BE569245A (en) * | 1953-12-09 | |||
FR1127831A (en) * | 1954-07-22 | 1956-12-26 | Apra Precipitator Corp | Circuit with protection relay |
US2911571A (en) * | 1956-04-10 | 1959-11-03 | Hoerder Huettenunion Ag | Operation of glow discharges |
CH389797A (en) * | 1959-08-17 | 1965-03-31 | Berghaus Elektrophysik Anst | Device to avoid sudden changes in the state of discharge for discharge vessels operated with high-current glow discharges |
DE1565364B2 (en) * | 1966-04-02 | 1971-09-02 | AEG Elotherm GmbH, 5630 Remscheid Hasten | CIRCUIT FOR PROTECTION FOR THE HEATING DUCTS OF INDUCTORS |
US3740579A (en) * | 1966-10-03 | 1973-06-19 | Ex Cell O Corp | Zener coupled amplifier circuit with feedback |
FR1541370A (en) * | 1966-11-08 | 1968-10-04 | Berghaus Elektrophysik Anst | Method and device for controlling the electrical behavior of a high intensity glow discharge, for metallurgical operations |
US3809955A (en) * | 1973-03-26 | 1974-05-07 | Graco Inc | Safety circuit for electrostatic spray gun |
US3801899A (en) * | 1973-03-26 | 1974-04-02 | Gen Electric | Means for detecting the inception of corona discharges within induction apparatus |
DE2606395C3 (en) * | 1976-02-18 | 1979-01-18 | Ionit Anstalt Bernhard Berghaus, Vaduz | Method and device for monitoring the electrical behavior of a high-current glow discharge |
-
1976
- 1976-05-07 DE DE2620164A patent/DE2620164C2/en not_active Expired
-
1977
- 1977-04-25 GB GB17067/77A patent/GB1522925A/en not_active Expired
- 1977-05-03 ZA ZA00772644A patent/ZA772644B/en unknown
- 1977-05-04 PL PL19786377A patent/PL197863A1/en unknown
- 1977-05-04 BR BR7702855A patent/BR7702855A/en unknown
- 1977-05-05 DD DD7700198782A patent/DD129846A5/en unknown
- 1977-05-06 IT IT23312/77A patent/IT1084635B/en active
- 1977-05-06 FR FR7713850A patent/FR2350761A1/en active Pending
- 1977-05-07 JP JP5253677A patent/JPS5340644A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
BR7702855A (en) | 1978-04-04 |
FR2350761A1 (en) | 1977-12-02 |
DD129846A5 (en) | 1978-02-08 |
JPS5526181B2 (en) | 1980-07-11 |
DE2620164B1 (en) | 1977-11-10 |
PL197863A1 (en) | 1978-01-02 |
DE2620164C2 (en) | 1978-07-06 |
JPS5340644A (en) | 1978-04-13 |
GB1522925A (en) | 1978-08-31 |
IT1084635B (en) | 1985-05-25 |
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