GB1516395A - Apparatus for measuring the evaporation rate in vacuum vapour deposition processes - Google Patents

Apparatus for measuring the evaporation rate in vacuum vapour deposition processes

Info

Publication number
GB1516395A
GB1516395A GB2526175A GB2526175A GB1516395A GB 1516395 A GB1516395 A GB 1516395A GB 2526175 A GB2526175 A GB 2526175A GB 2526175 A GB2526175 A GB 2526175A GB 1516395 A GB1516395 A GB 1516395A
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
vacuum vapour
measuring
evaporation rate
deposition processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2526175A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1516395A publication Critical patent/GB1516395A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB2526175A 1974-06-12 1975-06-12 Apparatus for measuring the evaporation rate in vacuum vapour deposition processes Expired GB1516395A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742428445 DE2428445A1 (de) 1974-06-12 1974-06-12 Messvorrichtung fuer die verdampfungsrate bei vakuum-aufdampfprozessen

Publications (1)

Publication Number Publication Date
GB1516395A true GB1516395A (en) 1978-07-05

Family

ID=5917982

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2526175A Expired GB1516395A (en) 1974-06-12 1975-06-12 Apparatus for measuring the evaporation rate in vacuum vapour deposition processes

Country Status (5)

Country Link
JP (1) JPS5111495A (enrdf_load_stackoverflow)
CH (1) CH590461A5 (enrdf_load_stackoverflow)
DE (1) DE2428445A1 (enrdf_load_stackoverflow)
GB (1) GB1516395A (enrdf_load_stackoverflow)
IT (1) IT1038599B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7909860B2 (en) 2003-09-03 2011-03-22 Synthes Usa, Llc Bone plate with captive clips

Also Published As

Publication number Publication date
JPS5111495A (ja) 1976-01-29
CH590461A5 (enrdf_load_stackoverflow) 1977-08-15
DE2428445A1 (de) 1976-01-02
IT1038599B (it) 1979-11-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee