IT1038599B - Dispositivo di misurazione per il grado di evaporazione inprocessi di evaporazione sottovuoto - Google Patents

Dispositivo di misurazione per il grado di evaporazione inprocessi di evaporazione sottovuoto

Info

Publication number
IT1038599B
IT1038599B IT2390475A IT2390475A IT1038599B IT 1038599 B IT1038599 B IT 1038599B IT 2390475 A IT2390475 A IT 2390475A IT 2390475 A IT2390475 A IT 2390475A IT 1038599 B IT1038599 B IT 1038599B
Authority
IT
Italy
Prior art keywords
evaporation
degree
measuring device
processes
vacuum evaporation
Prior art date
Application number
IT2390475A
Other languages
English (en)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Application granted granted Critical
Publication of IT1038599B publication Critical patent/IT1038599B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
IT2390475A 1974-06-12 1975-05-30 Dispositivo di misurazione per il grado di evaporazione inprocessi di evaporazione sottovuoto IT1038599B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742428445 DE2428445A1 (de) 1974-06-12 1974-06-12 Messvorrichtung fuer die verdampfungsrate bei vakuum-aufdampfprozessen

Publications (1)

Publication Number Publication Date
IT1038599B true IT1038599B (it) 1979-11-30

Family

ID=5917982

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2390475A IT1038599B (it) 1974-06-12 1975-05-30 Dispositivo di misurazione per il grado di evaporazione inprocessi di evaporazione sottovuoto

Country Status (5)

Country Link
JP (1) JPS5111495A (it)
CH (1) CH590461A5 (it)
DE (1) DE2428445A1 (it)
GB (1) GB1516395A (it)
IT (1) IT1038599B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7909860B2 (en) 2003-09-03 2011-03-22 Synthes Usa, Llc Bone plate with captive clips

Also Published As

Publication number Publication date
JPS5111495A (ja) 1976-01-29
CH590461A5 (it) 1977-08-15
GB1516395A (en) 1978-07-05
DE2428445A1 (de) 1976-01-02

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