JPS5413367A - Method of controlling thickness of evaporated film in photoelectric type film thickness meter - Google Patents

Method of controlling thickness of evaporated film in photoelectric type film thickness meter

Info

Publication number
JPS5413367A
JPS5413367A JP7773077A JP7773077A JPS5413367A JP S5413367 A JPS5413367 A JP S5413367A JP 7773077 A JP7773077 A JP 7773077A JP 7773077 A JP7773077 A JP 7773077A JP S5413367 A JPS5413367 A JP S5413367A
Authority
JP
Japan
Prior art keywords
thickness
film
photoelectric type
controlling
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7773077A
Other languages
Japanese (ja)
Other versions
JPS5724485B2 (en
Inventor
Kazuo Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINKUU KIKI KOUGIYOU KK
Original Assignee
SHINKUU KIKI KOUGIYOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINKUU KIKI KOUGIYOU KK filed Critical SHINKUU KIKI KOUGIYOU KK
Priority to JP7773077A priority Critical patent/JPS5413367A/en
Publication of JPS5413367A publication Critical patent/JPS5413367A/en
Publication of JPS5724485B2 publication Critical patent/JPS5724485B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP7773077A 1977-07-01 1977-07-01 Method of controlling thickness of evaporated film in photoelectric type film thickness meter Granted JPS5413367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7773077A JPS5413367A (en) 1977-07-01 1977-07-01 Method of controlling thickness of evaporated film in photoelectric type film thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7773077A JPS5413367A (en) 1977-07-01 1977-07-01 Method of controlling thickness of evaporated film in photoelectric type film thickness meter

Publications (2)

Publication Number Publication Date
JPS5413367A true JPS5413367A (en) 1979-01-31
JPS5724485B2 JPS5724485B2 (en) 1982-05-25

Family

ID=13642007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7773077A Granted JPS5413367A (en) 1977-07-01 1977-07-01 Method of controlling thickness of evaporated film in photoelectric type film thickness meter

Country Status (1)

Country Link
JP (1) JPS5413367A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242307A (en) * 1984-05-17 1985-12-02 Matsushita Electric Ind Co Ltd Control method of film thickness
US8174757B2 (en) 2002-01-04 2012-05-08 The Furukawa Electric Co., Ltd. Wavelength determining apparatus, method and program for thin film thickness monitoring light

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410411A (en) * 1992-01-17 1995-04-25 Matsushita Electric Industrial Co., Ltd. Method of and apparatus for forming multi-layer film
JP4491289B2 (en) * 2004-06-29 2010-06-30 Ｈｏｙａ株式会社 Thin film forming apparatus and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242307A (en) * 1984-05-17 1985-12-02 Matsushita Electric Ind Co Ltd Control method of film thickness
JPH0575966B2 (en) * 1984-05-17 1993-10-21 Matsushita Electric Ind Co Ltd
US8174757B2 (en) 2002-01-04 2012-05-08 The Furukawa Electric Co., Ltd. Wavelength determining apparatus, method and program for thin film thickness monitoring light

Also Published As

Publication number Publication date
JPS5724485B2 (en) 1982-05-25

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