JPS5491263A - Film thickness detector - Google Patents

Film thickness detector

Info

Publication number
JPS5491263A
JPS5491263A JP15734077A JP15734077A JPS5491263A JP S5491263 A JPS5491263 A JP S5491263A JP 15734077 A JP15734077 A JP 15734077A JP 15734077 A JP15734077 A JP 15734077A JP S5491263 A JPS5491263 A JP S5491263A
Authority
JP
Japan
Prior art keywords
film thickness
thickness detector
detector
film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15734077A
Other languages
Japanese (ja)
Inventor
Hideji Yoshikawa
Hitoshi Kiritani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15734077A priority Critical patent/JPS5491263A/en
Publication of JPS5491263A publication Critical patent/JPS5491263A/en
Pending legal-status Critical Current

Links

JP15734077A 1977-12-28 1977-12-28 Film thickness detector Pending JPS5491263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15734077A JPS5491263A (en) 1977-12-28 1977-12-28 Film thickness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15734077A JPS5491263A (en) 1977-12-28 1977-12-28 Film thickness detector

Publications (1)

Publication Number Publication Date
JPS5491263A true JPS5491263A (en) 1979-07-19

Family

ID=15647540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15734077A Pending JPS5491263A (en) 1977-12-28 1977-12-28 Film thickness detector

Country Status (1)

Country Link
JP (1) JPS5491263A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277218A (en) * 2001-03-22 2002-09-25 Sharp Corp Film thickness measuring device and method thereof
WO2011001968A1 (en) * 2009-07-03 2011-01-06 株式会社シンクロン Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134754A (en) * 1974-09-18 1976-03-24 Oki Electric Ind Co Ltd SETSUCHAKUZAINOATSUSAKENSHUTSUSOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134754A (en) * 1974-09-18 1976-03-24 Oki Electric Ind Co Ltd SETSUCHAKUZAINOATSUSAKENSHUTSUSOCHI

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277218A (en) * 2001-03-22 2002-09-25 Sharp Corp Film thickness measuring device and method thereof
WO2011001968A1 (en) * 2009-07-03 2011-01-06 株式会社シンクロン Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter
JP2011013145A (en) * 2009-07-03 2011-01-20 Shincron:Kk Optical film thickness meter and thin film forming apparatus provided with the optical thickness meter
TWI404908B (en) * 2009-07-03 2013-08-11 Shincron Co Ltd An optical film thickness gauge and a thin film forming apparatus having an optical film thickness gauge
KR101317536B1 (en) * 2009-07-03 2013-10-15 신크론 컴퍼니 리미티드 Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter
US8625111B2 (en) 2009-07-03 2014-01-07 Shincron Co., Ltd. Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter

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