JPS5491263A - Film thickness detector - Google Patents
Film thickness detectorInfo
- Publication number
- JPS5491263A JPS5491263A JP15734077A JP15734077A JPS5491263A JP S5491263 A JPS5491263 A JP S5491263A JP 15734077 A JP15734077 A JP 15734077A JP 15734077 A JP15734077 A JP 15734077A JP S5491263 A JPS5491263 A JP S5491263A
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- thickness detector
- detector
- film
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15734077A JPS5491263A (en) | 1977-12-28 | 1977-12-28 | Film thickness detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15734077A JPS5491263A (en) | 1977-12-28 | 1977-12-28 | Film thickness detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5491263A true JPS5491263A (en) | 1979-07-19 |
Family
ID=15647540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15734077A Pending JPS5491263A (en) | 1977-12-28 | 1977-12-28 | Film thickness detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5491263A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002277218A (en) * | 2001-03-22 | 2002-09-25 | Sharp Corp | Film thickness measuring device and method thereof |
WO2011001968A1 (en) * | 2009-07-03 | 2011-01-06 | 株式会社シンクロン | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134754A (en) * | 1974-09-18 | 1976-03-24 | Oki Electric Ind Co Ltd | SETSUCHAKUZAINOATSUSAKENSHUTSUSOCHI |
-
1977
- 1977-12-28 JP JP15734077A patent/JPS5491263A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134754A (en) * | 1974-09-18 | 1976-03-24 | Oki Electric Ind Co Ltd | SETSUCHAKUZAINOATSUSAKENSHUTSUSOCHI |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002277218A (en) * | 2001-03-22 | 2002-09-25 | Sharp Corp | Film thickness measuring device and method thereof |
WO2011001968A1 (en) * | 2009-07-03 | 2011-01-06 | 株式会社シンクロン | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter |
JP2011013145A (en) * | 2009-07-03 | 2011-01-20 | Shincron:Kk | Optical film thickness meter and thin film forming apparatus provided with the optical thickness meter |
TWI404908B (en) * | 2009-07-03 | 2013-08-11 | Shincron Co Ltd | An optical film thickness gauge and a thin film forming apparatus having an optical film thickness gauge |
KR101317536B1 (en) * | 2009-07-03 | 2013-10-15 | 신크론 컴퍼니 리미티드 | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter |
US8625111B2 (en) | 2009-07-03 | 2014-01-07 | Shincron Co., Ltd. | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter |
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