GB1495186A - Electrical solid state devices - Google Patents

Electrical solid state devices

Info

Publication number
GB1495186A
GB1495186A GB3604875A GB3604875A GB1495186A GB 1495186 A GB1495186 A GB 1495186A GB 3604875 A GB3604875 A GB 3604875A GB 3604875 A GB3604875 A GB 3604875A GB 1495186 A GB1495186 A GB 1495186A
Authority
GB
United Kingdom
Prior art keywords
photoresist
substrate
solid state
marginal portions
masking film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3604875A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Priority to GB3604875A priority Critical patent/GB1495186A/en
Publication of GB1495186A publication Critical patent/GB1495186A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)

Abstract

1495186 Semi-conductor devices PLESSEY CO Ltd 11 Aug 1976 [2 Sept 1975] 36048/75 Heading H1K A semi-conductor device is made by forming a masking film 2 on a substrate 1, covering the film 2 with a photoresist 3, forming a channel in the photoresist 3, etching the masking film 2 in the channel to expose the substrate 1 and to undermine the photoresist 3 and form overhanging portions thereof over exposed marginal portions of the substrate 1, depositing a further masking film 13 to cover the substrate 1 but leaving said exposed marginal portions uncovered, removing the photoresist 3, and subjecting the uncovered marginal portions a treatment such as ion bombardment to form a resistor of dimensions about 1 Á in an I.C.
GB3604875A 1976-08-11 1976-08-11 Electrical solid state devices Expired GB1495186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3604875A GB1495186A (en) 1976-08-11 1976-08-11 Electrical solid state devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3604875A GB1495186A (en) 1976-08-11 1976-08-11 Electrical solid state devices

Publications (1)

Publication Number Publication Date
GB1495186A true GB1495186A (en) 1977-12-14

Family

ID=10384374

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3604875A Expired GB1495186A (en) 1976-08-11 1976-08-11 Electrical solid state devices

Country Status (1)

Country Link
GB (1) GB1495186A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2579827A1 (en) * 1985-04-01 1986-10-03 Thomson Csf METHOD FOR MAKING A SELF-ALIGNED GRID METALLIZATION FIELD EFFECT TRANSISTOR
GB2175442A (en) * 1985-05-15 1986-11-26 Stc Plc Laser manufacture
WO1987004857A1 (en) * 1986-02-10 1987-08-13 Hughes Aircraft Company Double layer photoresist process for well self-align and ion implantation masking

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2579827A1 (en) * 1985-04-01 1986-10-03 Thomson Csf METHOD FOR MAKING A SELF-ALIGNED GRID METALLIZATION FIELD EFFECT TRANSISTOR
EP0197838A1 (en) * 1985-04-01 1986-10-15 Thomson-Csf Method of producing a field effect transistor with self-aligned gate metallization
GB2175442A (en) * 1985-05-15 1986-11-26 Stc Plc Laser manufacture
GB2175442B (en) * 1985-05-15 1989-05-24 Stc Plc Laser manufacture
WO1987004857A1 (en) * 1986-02-10 1987-08-13 Hughes Aircraft Company Double layer photoresist process for well self-align and ion implantation masking
US4767721A (en) * 1986-02-10 1988-08-30 Hughes Aircraft Company Double layer photoresist process for well self-align and ion implantation masking

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19960810