GB1469005A - Standard telephones cables ltd semiconductor device manufacture - Google Patents
Standard telephones cables ltd semiconductor device manufactureInfo
- Publication number
- GB1469005A GB1469005A GB5157474A GB5157474A GB1469005A GB 1469005 A GB1469005 A GB 1469005A GB 5157474 A GB5157474 A GB 5157474A GB 5157474 A GB5157474 A GB 5157474A GB 1469005 A GB1469005 A GB 1469005A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cables
- etching
- standard telephones
- etching solution
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 5
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- 230000005669 field effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
- H01L21/30635—Electrolytic etching of AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Abstract
1469005 Semi-conductor devices STANDARD TELEPHONES & CABLES Ltd 18 Nov 1975 [28 Nov 1974] 51574/74 Heading H1K [Also in Division C7] A semi-conductor device, e.g. a field effect transistor or a photocathode, is manufactured from a semiconductor body 1 e.g. of gallium arsenide by preferentially etching one or more of its relatively high resistivity portions 2, e.g. doped with Cr and O in an etching solution 3 whilst an electrical potential, e.g. of 10 volts is applied to the body to render only the relatively low resistivity portion(s) sufficiently negative with respect to the etching solution to inhibit etching of the former. The etching solution may be aqueous, e.g. containing H 2 SO 4 and H 2 O 2 , KOH and H 2 O 2 or H 2 SO 4 and (NH 4 ) 2 S 2 O 8 , or comprise Br 2 and methanol.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5157474A GB1469005A (en) | 1974-11-28 | 1974-11-28 | Standard telephones cables ltd semiconductor device manufacture |
DE19752551444 DE2551444A1 (en) | 1974-11-28 | 1975-11-15 | METHOD FOR SHAPING A SEMICONDUCTOR BODY |
JP14168075A JPS5177074A (en) | 1974-11-28 | 1975-11-28 | HANDOTAINOE TSUCHINGU |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5157474A GB1469005A (en) | 1974-11-28 | 1974-11-28 | Standard telephones cables ltd semiconductor device manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1469005A true GB1469005A (en) | 1977-03-30 |
Family
ID=10460546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5157474A Expired GB1469005A (en) | 1974-11-28 | 1974-11-28 | Standard telephones cables ltd semiconductor device manufacture |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5177074A (en) |
DE (1) | DE2551444A1 (en) |
GB (1) | GB1469005A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2000190A (en) * | 1977-06-14 | 1979-01-04 | Sony Corp | Methods of electrolytically etching ferrite bodies and magnetic transducer heads including bodies so etched |
GB2165993A (en) * | 1984-10-24 | 1986-04-23 | Marconi Instruments Ltd | Method of fabricating devices on semiconductor substrates |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0309782B1 (en) * | 1987-09-30 | 1994-06-01 | Siemens Aktiengesellschaft | Etching process for silicon (100) |
US6401009B1 (en) | 1999-02-16 | 2002-06-04 | Suzette M. Chandonnet | Sundry article vending apparatus |
-
1974
- 1974-11-28 GB GB5157474A patent/GB1469005A/en not_active Expired
-
1975
- 1975-11-15 DE DE19752551444 patent/DE2551444A1/en active Pending
- 1975-11-28 JP JP14168075A patent/JPS5177074A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2000190A (en) * | 1977-06-14 | 1979-01-04 | Sony Corp | Methods of electrolytically etching ferrite bodies and magnetic transducer heads including bodies so etched |
GB2000190B (en) * | 1977-06-14 | 1982-03-17 | Sony Corp | Methods of electrolytically etching ferrite bodies and magnetic transducer heads including bodies so etched |
GB2165993A (en) * | 1984-10-24 | 1986-04-23 | Marconi Instruments Ltd | Method of fabricating devices on semiconductor substrates |
Also Published As
Publication number | Publication date |
---|---|
DE2551444A1 (en) | 1976-08-12 |
JPS5177074A (en) | 1976-07-03 |
JPS5622368B2 (en) | 1981-05-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |