GB1440776A - Electron-beam apparatus - Google Patents
Electron-beam apparatusInfo
- Publication number
- GB1440776A GB1440776A GB4577273A GB4577273A GB1440776A GB 1440776 A GB1440776 A GB 1440776A GB 4577273 A GB4577273 A GB 4577273A GB 4577273 A GB4577273 A GB 4577273A GB 1440776 A GB1440776 A GB 1440776A
- Authority
- GB
- United Kingdom
- Prior art keywords
- jaws
- wire
- current
- anode
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7213355A NL7213355A (de) | 1972-10-03 | 1972-10-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1440776A true GB1440776A (en) | 1976-06-23 |
Family
ID=19817064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4577273A Expired GB1440776A (en) | 1972-10-03 | 1973-10-01 | Electron-beam apparatus |
Country Status (10)
Country | Link |
---|---|
US (1) | US3864572A (de) |
JP (1) | JPS5241137B2 (de) |
BE (1) | BE805539A (de) |
CA (1) | CA992670A (de) |
DE (1) | DE2349352C3 (de) |
FR (1) | FR2201540B1 (de) |
GB (1) | GB1440776A (de) |
IT (1) | IT994357B (de) |
NL (1) | NL7213355A (de) |
SE (1) | SE384759B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6828565B2 (en) | 2002-09-26 | 2004-12-07 | Leo Elektronenmikroskopie Gmbh | Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5533310U (de) * | 1978-08-24 | 1980-03-04 | ||
JPS58126376U (ja) * | 1982-02-20 | 1983-08-27 | 深沢 房次郎 | 扉のストツパ |
US4496881A (en) | 1982-09-29 | 1985-01-29 | Tetra Pak Developpement Sa | Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly |
JPS59163506A (ja) * | 1983-03-09 | 1984-09-14 | Hitachi Ltd | 電子ビ−ム測長装置 |
US4762975A (en) * | 1984-02-06 | 1988-08-09 | Phrasor Scientific, Incorporated | Method and apparatus for making submicrom powders |
US4829177A (en) * | 1986-09-11 | 1989-05-09 | Gregory Hirsch | Point projection photoelectron microscope with hollow needle |
JPH02134503A (ja) * | 1988-11-15 | 1990-05-23 | Mitsubishi Electric Corp | 走査型トンネル顕微鏡 |
DE3839707A1 (de) * | 1988-11-24 | 1990-05-31 | Integrated Circuit Testing | Verfahren zum betrieb eines elektronenstrahlmessgeraetes |
JPH03190044A (ja) * | 1989-12-19 | 1991-08-20 | Ebara Corp | 電子線加速器 |
US5015862A (en) * | 1990-01-22 | 1991-05-14 | Oregon Graduate Institute Of Science & Technology | Laser modulation of LMI sources |
ES2029426A6 (es) * | 1991-03-22 | 1992-08-01 | Univ Madrid | Obtencion de una fuente atomica de iones metalicos produciendo una fusion superficial por medio de un campo electrico. |
US5568004A (en) * | 1992-09-07 | 1996-10-22 | Kleindiek; Stephan | Electromechanical positioning device |
US6828996B2 (en) | 2001-06-22 | 2004-12-07 | Applied Materials, Inc. | Electron beam patterning with a heated electron source |
US6847164B2 (en) * | 2002-12-10 | 2005-01-25 | Applied Matrials, Inc. | Current-stabilizing illumination of photocathode electron beam source |
US11417492B2 (en) * | 2019-09-26 | 2022-08-16 | Kla Corporation | Light modulated electron source |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3388280A (en) * | 1966-04-19 | 1968-06-11 | Victor E. De Lucia | Laser energized hot cathode type of electron discharge device |
US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1972
- 1972-10-03 NL NL7213355A patent/NL7213355A/xx unknown
-
1973
- 1973-10-01 SE SE7313345A patent/SE384759B/xx unknown
- 1973-10-01 CA CA182,224A patent/CA992670A/en not_active Expired
- 1973-10-01 BE BE136239A patent/BE805539A/xx unknown
- 1973-10-01 GB GB4577273A patent/GB1440776A/en not_active Expired
- 1973-10-01 IT IT7352853A patent/IT994357B/it active
- 1973-10-02 DE DE2349352A patent/DE2349352C3/de not_active Expired
- 1973-10-02 US US402844A patent/US3864572A/en not_active Expired - Lifetime
- 1973-10-03 JP JP48110595A patent/JPS5241137B2/ja not_active Expired
- 1973-10-03 FR FR7335310A patent/FR2201540B1/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6828565B2 (en) | 2002-09-26 | 2004-12-07 | Leo Elektronenmikroskopie Gmbh | Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source |
Also Published As
Publication number | Publication date |
---|---|
FR2201540A1 (de) | 1974-04-26 |
DE2349352B2 (de) | 1977-07-21 |
SE384759B (sv) | 1976-05-17 |
NL7213355A (de) | 1974-04-05 |
US3864572A (en) | 1975-02-04 |
DE2349352A1 (de) | 1974-04-11 |
IT994357B (it) | 1975-10-20 |
BE805539A (fr) | 1974-04-01 |
JPS4993798A (de) | 1974-09-06 |
CA992670A (en) | 1976-07-06 |
JPS5241137B2 (de) | 1977-10-17 |
DE2349352C3 (de) | 1978-03-30 |
FR2201540B1 (de) | 1976-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |