GB1431069A - Pulsed field emission electron gun apparatus - Google Patents

Pulsed field emission electron gun apparatus

Info

Publication number
GB1431069A
GB1431069A GB3291873A GB3291873A GB1431069A GB 1431069 A GB1431069 A GB 1431069A GB 3291873 A GB3291873 A GB 3291873A GB 3291873 A GB3291873 A GB 3291873A GB 1431069 A GB1431069 A GB 1431069A
Authority
GB
United Kingdom
Prior art keywords
pulses
tip
pulse
field emission
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3291873A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1431069A publication Critical patent/GB1431069A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

1431069 Automatic current control NIHON DENSHI K K 10 July 1973 [17 July 1972] 32918/73 Heading G3R Field emission electron gun apparatus comprises an emitter tip 2, means 6 for heating the tip, means for supplying pulses between the tip and an electrode to produce field emission and means for maintaining the emission current constant by controlling the pulse duty factor, the tip temperature or a bias voltage applied between pulses. The beam current is compared with a reference signal in a differential amplifier 10 which has a D.C. output converted into a time modulated pulse train by analog-digital converter 12. This pulse train is converted by a mono-multi circuit 13 into pulses of constant duration which are applied to a pulse amplifier 14 controlling the duty factor of the pulse signal applied between the tip and the electrode 4, either the frequency or pulse width being varied. In another embodiment a variable bias potential is applied between pulses. Alternatively the emitter temperature is controlled, the temperature during and between pulses being different, e.g. the tip is heated only between pulses.
GB3291873A 1972-07-17 1973-07-10 Pulsed field emission electron gun apparatus Expired GB1431069A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7148972A JPS557656B2 (en) 1972-07-17 1972-07-17

Publications (1)

Publication Number Publication Date
GB1431069A true GB1431069A (en) 1976-04-07

Family

ID=13462110

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3291873A Expired GB1431069A (en) 1972-07-17 1973-07-10 Pulsed field emission electron gun apparatus

Country Status (4)

Country Link
US (1) US3887839A (en)
JP (1) JPS557656B2 (en)
FR (1) FR2193248B1 (en)
GB (1) GB1431069A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4337422A (en) * 1980-03-17 1982-06-29 The Perkin-Elmer Corporation Field emission gun with noise compensation
JPS5818101A (en) * 1981-07-27 1983-02-02 Nippon Denzai Kogyo Kenkyusho:Kk Touch sensor
US5025196A (en) * 1986-06-02 1991-06-18 Canon Kabushiki Kaisha Image forming device with beam current control
JPS6440219A (en) * 1987-08-04 1989-02-10 Fanuc Ltd Machining start hole measuring device
JP3131339B2 (en) * 1993-12-22 2001-01-31 三菱電機株式会社 Cathode, cathode ray tube and method of operating cathode ray tube
JPH08212952A (en) * 1995-02-06 1996-08-20 Natl Res Inst For Metals Laser irradiation type electron gun
EP1426997A1 (en) * 2002-12-06 2004-06-09 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Field emitter beam source and method for controlling a beam current
EP1993119B1 (en) * 2005-09-05 2017-11-08 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
EP2365511B1 (en) 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning
US8487534B2 (en) * 2010-03-31 2013-07-16 General Electric Company Pierce gun and method of controlling thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE878685C (en) * 1951-03-28 1953-06-05 Wilhelm Dipl-Chem Dr Stuermer Method for imaging objects with the field emission microscope
US3361928A (en) * 1962-11-28 1968-01-02 Hitachi Ltd Transformers having a plurality of secondary windings and charged particle sources of double pulsing system utilizing such transformers
US3775637A (en) * 1971-09-15 1973-11-27 Rca Corp Cathode ray display intensity control circuit
US3786305A (en) * 1972-05-15 1974-01-15 Hitachi Ltd Field emission electron gun
US3794878A (en) * 1972-12-11 1974-02-26 Ford Motor Co Electron beam regulator

Also Published As

Publication number Publication date
FR2193248B1 (en) 1977-02-18
FR2193248A1 (en) 1974-02-15
DE2336155A1 (en) 1974-02-07
US3887839A (en) 1975-06-03
JPS557656B2 (en) 1980-02-27
JPS4929766A (en) 1974-03-16
DE2336155B2 (en) 1975-10-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee